FR2950194B1 - Actionneur electromecanique a electrodes interdigitees - Google Patents

Actionneur electromecanique a electrodes interdigitees

Info

Publication number
FR2950194B1
FR2950194B1 FR0904345A FR0904345A FR2950194B1 FR 2950194 B1 FR2950194 B1 FR 2950194B1 FR 0904345 A FR0904345 A FR 0904345A FR 0904345 A FR0904345 A FR 0904345A FR 2950194 B1 FR2950194 B1 FR 2950194B1
Authority
FR
France
Prior art keywords
electromechanical actuator
interdigited electrodes
interdigited
electrodes
electromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0904345A
Other languages
English (en)
Other versions
FR2950194A1 (fr
Inventor
Bernard Diem
Henri Sibuet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0904345A priority Critical patent/FR2950194B1/fr
Priority to EP10175846.4A priority patent/EP2296157B1/fr
Priority to JP2010202835A priority patent/JP2011060766A/ja
Priority to US12/879,261 priority patent/US8390407B2/en
Publication of FR2950194A1 publication Critical patent/FR2950194A1/fr
Application granted granted Critical
Publication of FR2950194B1 publication Critical patent/FR2950194B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0042—Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
FR0904345A 2009-09-11 2009-09-11 Actionneur electromecanique a electrodes interdigitees Expired - Fee Related FR2950194B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0904345A FR2950194B1 (fr) 2009-09-11 2009-09-11 Actionneur electromecanique a electrodes interdigitees
EP10175846.4A EP2296157B1 (fr) 2009-09-11 2010-09-08 Actionneur électromécanique à électrodes interdigitées
JP2010202835A JP2011060766A (ja) 2009-09-11 2010-09-10 相互嵌合電極を備えた電気機械アクチュエータ
US12/879,261 US8390407B2 (en) 2009-09-11 2010-09-10 Electromechanical actuator with interdigitated electrodes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0904345A FR2950194B1 (fr) 2009-09-11 2009-09-11 Actionneur electromecanique a electrodes interdigitees

Publications (2)

Publication Number Publication Date
FR2950194A1 FR2950194A1 (fr) 2011-03-18
FR2950194B1 true FR2950194B1 (fr) 2011-09-02

Family

ID=42112023

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0904345A Expired - Fee Related FR2950194B1 (fr) 2009-09-11 2009-09-11 Actionneur electromecanique a electrodes interdigitees

Country Status (4)

Country Link
US (1) US8390407B2 (fr)
EP (1) EP2296157B1 (fr)
JP (1) JP2011060766A (fr)
FR (1) FR2950194B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2780925B1 (fr) 2011-12-21 2018-09-05 Siemens Aktiengesellschaft Contacteur
US10132699B1 (en) * 2014-10-06 2018-11-20 National Technology & Engineering Solutions Of Sandia, Llc Electrodeposition processes for magnetostrictive resonators
CN114554020A (zh) * 2020-11-24 2022-05-27 西门子(深圳)磁共振有限公司 磁共振成像系统的呼叫装置及磁共振成像系统

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6384952B1 (en) * 1997-03-27 2002-05-07 Mems Optical Inc. Vertical comb drive actuated deformable mirror device and method
US6115231A (en) * 1997-11-25 2000-09-05 Tdk Corporation Electrostatic relay
JP2000065855A (ja) * 1998-08-17 2000-03-03 Mitsubishi Electric Corp 半導体加速度スイッチ、半導体加速度スイッチの製造方法
DE19912669A1 (de) * 1999-03-20 2000-09-21 Abb Research Ltd Substratparallel arbeitendes Mikrorelais
US6496612B1 (en) 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
US6506989B2 (en) * 2001-03-20 2003-01-14 Board Of Supervisors Of Louisana State University And Agricultural And Mechanical College Micro power switch
US6798315B2 (en) * 2001-12-04 2004-09-28 Mayo Foundation For Medical Education And Research Lateral motion MEMS Switch
DE10235369A1 (de) * 2002-08-02 2004-02-19 Robert Bosch Gmbh Mikromechanischer Schalter
US7474923B2 (en) * 2003-04-29 2009-01-06 Medtronic, Inc. Micro electromechanical switches and medical devices incorporating same
US7498715B2 (en) * 2005-10-31 2009-03-03 Xiao Yang Method and structure for an out-of plane compliant micro actuator
FR2927466A1 (fr) * 2008-06-17 2009-08-14 Commissariat Energie Atomique Actionneur bistable a commande electrostatique et consommation electrique faible

Also Published As

Publication number Publication date
EP2296157B1 (fr) 2014-12-10
EP2296157A1 (fr) 2011-03-16
US8390407B2 (en) 2013-03-05
JP2011060766A (ja) 2011-03-24
FR2950194A1 (fr) 2011-03-18
US20110220470A1 (en) 2011-09-15

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Legal Events

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Year of fee payment: 7

ST Notification of lapse

Effective date: 20170531