FR2950959B1 - Dispositif de support pour chargement de plaques - Google Patents

Dispositif de support pour chargement de plaques

Info

Publication number
FR2950959B1
FR2950959B1 FR0956979A FR0956979A FR2950959B1 FR 2950959 B1 FR2950959 B1 FR 2950959B1 FR 0956979 A FR0956979 A FR 0956979A FR 0956979 A FR0956979 A FR 0956979A FR 2950959 B1 FR2950959 B1 FR 2950959B1
Authority
FR
France
Prior art keywords
support device
loading plates
loading
plates
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0956979A
Other languages
English (en)
Other versions
FR2950959A1 (fr
Inventor
Francois Abbe
Baptiste Cristini
Olivier Drevet
Marc Antoine Violleau
Remy Bessettes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilis Engineering Lu
Safran Ceramics SA
Original Assignee
SNECMA Propulsion Solide SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SNECMA Propulsion Solide SA filed Critical SNECMA Propulsion Solide SA
Priority to FR0956979A priority Critical patent/FR2950959B1/fr
Priority to PCT/FR2010/052114 priority patent/WO2011042666A1/fr
Priority to EP10782334A priority patent/EP2486353A1/fr
Publication of FR2950959A1 publication Critical patent/FR2950959A1/fr
Application granted granted Critical
Publication of FR2950959B1 publication Critical patent/FR2950959B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/0084—Charging; Manipulation of SC or SC wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/13—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3311—Horizontal transfer of a batch of workpieces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Products (AREA)
FR0956979A 2009-10-07 2009-10-07 Dispositif de support pour chargement de plaques Expired - Fee Related FR2950959B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0956979A FR2950959B1 (fr) 2009-10-07 2009-10-07 Dispositif de support pour chargement de plaques
PCT/FR2010/052114 WO2011042666A1 (fr) 2009-10-07 2010-10-07 Dispositif de support pour chargement de plaques
EP10782334A EP2486353A1 (fr) 2009-10-07 2010-10-07 Dispositif de support pour chargement de plaques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0956979A FR2950959B1 (fr) 2009-10-07 2009-10-07 Dispositif de support pour chargement de plaques

Publications (2)

Publication Number Publication Date
FR2950959A1 FR2950959A1 (fr) 2011-04-08
FR2950959B1 true FR2950959B1 (fr) 2011-12-16

Family

ID=42078983

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0956979A Expired - Fee Related FR2950959B1 (fr) 2009-10-07 2009-10-07 Dispositif de support pour chargement de plaques

Country Status (3)

Country Link
EP (1) EP2486353A1 (fr)
FR (1) FR2950959B1 (fr)
WO (1) WO2011042666A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59200431A (ja) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd ウエハ−ボ−ト搬送用具
FR2861143B1 (fr) 2003-10-20 2006-01-20 Snecma Moteurs Aube de turbomachine, notamment aube de soufflante et son procede de fabrication
FR2887601B1 (fr) 2005-06-24 2007-10-05 Snecma Moteurs Sa Piece mecanique et procede de fabrication d'une telle piece

Also Published As

Publication number Publication date
FR2950959A1 (fr) 2011-04-08
EP2486353A1 (fr) 2012-08-15
WO2011042666A1 (fr) 2011-04-14

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Legal Events

Date Code Title Description
TQ Partial transmission of property
TQ Partial transmission of property

Owner name: SNECMA PROPULSION SOLIDE, FR

Effective date: 20131121

Owner name: AGILIS ENGINEERING, LU

Effective date: 20131121

Owner name: HERAKLES, FR

Effective date: 20131121

ST Notification of lapse

Effective date: 20150630