FR2955654B1 - Systeme et procede d'evaluation de deformations inhomogenes dans des plaques multicouches - Google Patents

Systeme et procede d'evaluation de deformations inhomogenes dans des plaques multicouches

Info

Publication number
FR2955654B1
FR2955654B1 FR1050468A FR1050468A FR2955654B1 FR 2955654 B1 FR2955654 B1 FR 2955654B1 FR 1050468 A FR1050468 A FR 1050468A FR 1050468 A FR1050468 A FR 1050468A FR 2955654 B1 FR2955654 B1 FR 2955654B1
Authority
FR
France
Prior art keywords
inhomogenous
deformations
evaluating
multilayer plates
multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1050468A
Other languages
English (en)
Other versions
FR2955654A1 (fr
Inventor
Marcel Broekaart
Arnaud Castex
Laurent Marinier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soitec SA
Original Assignee
Soitec SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1050468A priority Critical patent/FR2955654B1/fr
Application filed by Soitec SA filed Critical Soitec SA
Priority to EP11705922A priority patent/EP2529182A1/fr
Priority to PCT/FR2011/050127 priority patent/WO2011089368A1/fr
Priority to KR1020147036799A priority patent/KR20150006901A/ko
Priority to US13/574,585 priority patent/US9733075B2/en
Priority to CN201180007676.8A priority patent/CN102741650B/zh
Priority to JP2012549406A priority patent/JP5633854B2/ja
Priority to SG2012050357A priority patent/SG182423A1/en
Priority to KR1020127022108A priority patent/KR20120123105A/ko
Publication of FR2955654A1 publication Critical patent/FR2955654A1/fr
Application granted granted Critical
Publication of FR2955654B1 publication Critical patent/FR2955654B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/06—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/32—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70633—Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S73/00—Measuring and testing
    • Y10S73/01—Vibration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
FR1050468A 2010-01-25 2010-01-25 Systeme et procede d'evaluation de deformations inhomogenes dans des plaques multicouches Expired - Fee Related FR2955654B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR1050468A FR2955654B1 (fr) 2010-01-25 2010-01-25 Systeme et procede d'evaluation de deformations inhomogenes dans des plaques multicouches
PCT/FR2011/050127 WO2011089368A1 (fr) 2010-01-25 2011-01-24 Systeme et procede d'evaluation de deformations inhomogenes dans des plaques multicouches
KR1020147036799A KR20150006901A (ko) 2010-01-25 2011-01-24 멀티레이어 플레이트들 내의 불균일 변형들에 대한 평가 시스템 및 방법
US13/574,585 US9733075B2 (en) 2010-01-25 2011-01-24 System and method for assessing inhomogeneous deformations in multilayer plates
EP11705922A EP2529182A1 (fr) 2010-01-25 2011-01-24 Systeme et procede d'evaluation de deformations inhomogenes dans des plaques multicouches
CN201180007676.8A CN102741650B (zh) 2010-01-25 2011-01-24 用于估算多层晶片的非均匀变形的系统和方法
JP2012549406A JP5633854B2 (ja) 2010-01-25 2011-01-24 多層ウェーハ内の不均一変形の評価のためのシステム及び方法
SG2012050357A SG182423A1 (en) 2010-01-25 2011-01-24 System and method for assessing inhomogeneous deformations in multilayer plates
KR1020127022108A KR20120123105A (ko) 2010-01-25 2011-01-24 멀티레이어 플레이트들 내의 불균일 변형들에 대한 평가 시스템 및 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1050468A FR2955654B1 (fr) 2010-01-25 2010-01-25 Systeme et procede d'evaluation de deformations inhomogenes dans des plaques multicouches

Publications (2)

Publication Number Publication Date
FR2955654A1 FR2955654A1 (fr) 2011-07-29
FR2955654B1 true FR2955654B1 (fr) 2012-03-30

Family

ID=42676821

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1050468A Expired - Fee Related FR2955654B1 (fr) 2010-01-25 2010-01-25 Systeme et procede d'evaluation de deformations inhomogenes dans des plaques multicouches

Country Status (8)

Country Link
US (1) US9733075B2 (fr)
EP (1) EP2529182A1 (fr)
JP (1) JP5633854B2 (fr)
KR (2) KR20150006901A (fr)
CN (1) CN102741650B (fr)
FR (1) FR2955654B1 (fr)
SG (1) SG182423A1 (fr)
WO (1) WO2011089368A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0639688B2 (ja) 1983-05-13 1994-05-25 日本電気株式会社 シリコン薄膜の形成方法
FR2978864B1 (fr) * 2011-08-02 2014-02-07 Soitec Silicon On Insulator Procede de correction de desalignement de positions sur une premiere plaque collee sur une deuxieme plaque
WO2017028048A1 (fr) 2015-08-14 2017-02-23 华为技术有限公司 Procédé, appareil et système de transmission de données de dispositif à dispositif (d2d)
US10540759B2 (en) 2016-11-29 2020-01-21 Kla-Tencor Corporation Bonded wafer metrology
AT15801U3 (de) * 2017-09-29 2019-03-15 Ev Group E Thallner Gmbh Verfahren und Vorrichtung zur Vermessung einer Bondwelle
US10962888B2 (en) * 2017-11-29 2021-03-30 Taiwan Semiconductor Manufacturing Co., Ltd Structures for acoustic wave overlay error determination using periodic structures
US11829077B2 (en) * 2020-12-11 2023-11-28 Kla Corporation System and method for determining post bonding overlay
US11782411B2 (en) 2021-07-28 2023-10-10 Kla Corporation System and method for mitigating overlay distortion patterns caused by a wafer bonding tool
US20230030116A1 (en) * 2021-07-28 2023-02-02 Kla Corporation System and method for optimizing through silicon via overlay

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
FR2638846B1 (fr) * 1988-11-04 1991-01-18 Armines Procede et appareil d'evaluation ou de mesure des caracteristiques des proprietes d'adherence d'une couche mince appliquee sur la surface rugueuse d'un substrat ou d'elements de renforcement d'un corps en materiau composite ou agregat
US6175416B1 (en) 1996-08-06 2001-01-16 Brown University Research Foundation Optical stress generator and detector
GB9603262D0 (en) * 1996-02-16 1996-04-17 Bio Rad Micromeasurements Ltd Positional measurements
JP3884163B2 (ja) 1998-03-31 2007-02-21 信越半導体株式会社 半導体基板の表面形状計測装置及び半導体基板の表面形状判定方法
KR20010109212A (ko) * 2000-05-31 2001-12-08 시마무라 테루오 평가방법, 위치검출방법, 노광방법 및 디바이스 제조방법,및 노광장치
CN1231749C (zh) 2001-05-25 2005-12-14 加州理工学院 用于分析板结构的曲率和应力信息的系统和方法
JP4464033B2 (ja) * 2002-06-13 2010-05-19 信越半導体株式会社 半導体ウエーハの形状評価方法及び形状評価装置
EP1477851A1 (fr) * 2003-05-13 2004-11-17 ASML Netherlands B.V. Méthode de fabrication d'un dispositif et appareil lithographique
JP2005064394A (ja) * 2003-08-19 2005-03-10 Canon Inc 検出方法、露光方法、露光装置、及び、デバイスの製造方法
CN102585760A (zh) 2004-03-19 2012-07-18 住友电木株式会社 树脂组合物及采用该树脂组合物制作的半导体装置
US7363173B2 (en) * 2004-06-01 2008-04-22 California Institute Of Technology Techniques for analyzing non-uniform curvatures and stresses in thin-film structures on substrates with non-local effects
US7966135B2 (en) * 2004-06-01 2011-06-21 California Institute Of Technology Characterizing curvatures and stresses in thin-film structures on substrates having spatially non-uniform variations
US7487050B2 (en) * 2004-06-01 2009-02-03 California Institute Of Technology Techniques and devices for characterizing spatially non-uniform curvatures and stresses in thin-film structures on substrates with non-local effects
JP5153998B2 (ja) * 2005-02-25 2013-02-27 Ｈｏｙａ株式会社 マスクブランク用透明基板の製造方法、マスクブランクの製造方法、露光用マスクの製造方法、及び半導体デバイスの製造方法
DE102005054193B4 (de) * 2005-11-14 2009-08-13 Rodenstock Gmbh Spannungsmessung von Beschichtungen mit einem Piezoaktuator
JP2009529785A (ja) 2006-03-09 2009-08-20 ウルトラテック インク 基板の曲率および応力マッピングデータに基づくリソグラフィ位置ずれの判定方法
US7553678B2 (en) * 2006-03-17 2009-06-30 United Microelectronics Corp. Method for detecting semiconductor manufacturing conditions
US8794072B2 (en) * 2007-10-10 2014-08-05 Sonoscan, Inc. Scanning acoustic microscope with profilometer function
FR2931014B1 (fr) 2008-05-06 2010-09-03 Soitec Silicon On Insulator Procede d'assemblage de plaques par adhesion moleculaire
US8065109B2 (en) * 2008-08-28 2011-11-22 Kla-Tencor Corporation Localized substrate geometry characterization

Also Published As

Publication number Publication date
KR20120123105A (ko) 2012-11-07
US9733075B2 (en) 2017-08-15
KR20150006901A (ko) 2015-01-19
US20130054154A1 (en) 2013-02-28
JP5633854B2 (ja) 2014-12-03
FR2955654A1 (fr) 2011-07-29
SG182423A1 (en) 2012-08-30
EP2529182A1 (fr) 2012-12-05
CN102741650A (zh) 2012-10-17
WO2011089368A1 (fr) 2011-07-28
CN102741650B (zh) 2016-03-16
JP2013518401A (ja) 2013-05-20

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Legal Events

Date Code Title Description
CD Change of name or company name

Owner name: SOITEC, FR

Effective date: 20120907

PLFP Fee payment

Year of fee payment: 7

ST Notification of lapse

Effective date: 20170929