FR2985251B1 - Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems) - Google Patents

Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems)

Info

Publication number
FR2985251B1
FR2985251B1 FR1250066A FR1250066A FR2985251B1 FR 2985251 B1 FR2985251 B1 FR 2985251B1 FR 1250066 A FR1250066 A FR 1250066A FR 1250066 A FR1250066 A FR 1250066A FR 2985251 B1 FR2985251 B1 FR 2985251B1
Authority
FR
France
Prior art keywords
mems
answers
micro
detecting
resonator device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1250066A
Other languages
English (en)
Other versions
FR2985251A1 (fr
Inventor
Hassan Tanbakuchi
Bernard Legrand
Didier Theron
Damien Ducatteau
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keysight Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Priority to FR1250066A priority Critical patent/FR2985251B1/fr
Priority to US13/469,571 priority patent/US8952891B2/en
Priority to GB1221855.8A priority patent/GB2498251B/en
Publication of FR2985251A1 publication Critical patent/FR2985251A1/fr
Application granted granted Critical
Publication of FR2985251B1 publication Critical patent/FR2985251B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2431—Ring resonators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
FR1250066A 2012-01-04 2012-01-04 Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems) Expired - Fee Related FR2985251B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR1250066A FR2985251B1 (fr) 2012-01-04 2012-01-04 Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems)
US13/469,571 US8952891B2 (en) 2012-01-04 2012-05-11 Detecting responses of micro-electromechanical system (MEMS) resonator device
GB1221855.8A GB2498251B (en) 2012-01-04 2012-12-05 Detecting responses of micro-electromechanical system (MEMS) resonator device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1250066A FR2985251B1 (fr) 2012-01-04 2012-01-04 Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems)

Publications (2)

Publication Number Publication Date
FR2985251A1 FR2985251A1 (fr) 2013-07-05
FR2985251B1 true FR2985251B1 (fr) 2016-09-30

Family

ID=46124439

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1250066A Expired - Fee Related FR2985251B1 (fr) 2012-01-04 2012-01-04 Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems)

Country Status (3)

Country Link
US (1) US8952891B2 (fr)
FR (1) FR2985251B1 (fr)
GB (1) GB2498251B (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI531949B (zh) * 2014-06-26 2016-05-01 矽創電子股份有限公司 電容電壓資訊感測電路及其相關抗雜訊觸控電路
US9379733B1 (en) * 2014-07-08 2016-06-28 Mcube, Inc. Synchronous modulation resonator with sigma delta modulator
US9575014B2 (en) * 2014-12-22 2017-02-21 Texas Instruments Incorporated Material determination by sweeping a range of frequencies
US10523254B2 (en) * 2017-07-20 2019-12-31 Qualcomm Incorporated Mixer S11 control via sum component termination
JP7012349B2 (ja) * 2017-11-20 2022-01-28 国立研究開発法人産業技術総合研究所 走査型マイクロ波顕微鏡、及びこれを用いた被測定物の表面の電気特性の測定方法
CN108169562A (zh) * 2018-02-06 2018-06-15 南京大学 一种利用微波实时改变机械振子频率的装置和方法
US20190352174A1 (en) * 2018-05-18 2019-11-21 Lawrence Livermore National Security, Llc Position sensing circuit for an electronically driven mems device
US11820649B2 (en) 2018-05-18 2023-11-21 Lawrence Livermore National Security, Llc Position sensing circuit for an electrostatically driven MEMS device
WO2020247891A1 (fr) * 2019-06-07 2020-12-10 The Regents Of The University Of California Capteur à base de rigidité électrique
CN112782427B (zh) * 2019-11-07 2026-02-10 霍尼韦尔国际公司 用于避免振梁加速度计的电容馈通的谐振器电极配置
WO2022183030A1 (fr) * 2021-02-26 2022-09-01 Lawrence Livermore National Security, Llc Circuit de détection de position pour dispositif mems à commande électrostatique

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856140B2 (en) * 2000-09-20 2005-02-15 Neocera, Inc. System and method for quantitative measurements of a material's complex permittivity with use of near-field microwave probes
KR100574510B1 (ko) * 2004-05-11 2006-04-27 삼성전자주식회사 멤스 공정을 이용한 자기부상 구조물 및 그 제조방법
US7408693B2 (en) * 2004-07-27 2008-08-05 Jds Uniphase Corporation Electro-optic device
US7001785B1 (en) * 2004-12-06 2006-02-21 Veeco Instruments, Inc. Capacitance probe for thin dielectric film characterization
US20070080695A1 (en) * 2005-10-11 2007-04-12 Morrell Gary A Testing system and method for a MEMS sensor
JP4635023B2 (ja) 2006-04-06 2011-02-16 株式会社東芝 Ｍｅｍｓ
JP4388539B2 (ja) * 2006-10-20 2009-12-24 独立行政法人科学技術振興機構 共振器及び磁気共鳴測定装置
FR2915803B1 (fr) 2007-05-02 2012-06-08 Centre Nat Rech Scient Sonde pour microscopie a force atomique
EP2291910B1 (fr) 2008-06-18 2011-11-09 Nxp B.V. Resonateur mems pour filter et melanger
FR2941534B1 (fr) * 2009-01-26 2011-12-23 Commissariat Energie Atomique Capteur de champ magnetique a jauge de contrainte suspendue
US8188755B2 (en) * 2010-01-12 2012-05-29 Maxim Integrated Products, Inc. Electrostatic MEMS driver with on-chip capacitance measurement for autofocus applications
US9304155B2 (en) * 2012-12-19 2016-04-05 Invensense, Inc. Mode-tuning sense interface

Also Published As

Publication number Publication date
US8952891B2 (en) 2015-02-10
GB2498251B (en) 2017-11-15
GB2498251A (en) 2013-07-10
US20130169341A1 (en) 2013-07-04
FR2985251A1 (fr) 2013-07-05

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Legal Events

Date Code Title Description
TP Transmission of property

Owner name: KEYSIGHT TECHNOLOGIES INC., US

Effective date: 20150723

PLFP Fee payment

Year of fee payment: 5

PLFP Fee payment

Year of fee payment: 6

PLFP Fee payment

Year of fee payment: 7

ST Notification of lapse

Effective date: 20190906