FR2986370B1 - Circuit integre 3d - Google Patents
Circuit integre 3dInfo
- Publication number
- FR2986370B1 FR2986370B1 FR1250950A FR1250950A FR2986370B1 FR 2986370 B1 FR2986370 B1 FR 2986370B1 FR 1250950 A FR1250950 A FR 1250950A FR 1250950 A FR1250950 A FR 1250950A FR 2986370 B1 FR2986370 B1 FR 2986370B1
- Authority
- FR
- France
- Prior art keywords
- integrated circuit
- integrated
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/201—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates the substrates comprising an insulating layer on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D88/00—Three-dimensional [3D] integrated devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D88/00—Three-dimensional [3D] integrated devices
- H10D88/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
- H10P90/19—Preparing inhomogeneous wafers
- H10P90/1904—Preparing vertically inhomogeneous wafers
- H10P90/1906—Preparing SOI wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
- H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1250950A FR2986370B1 (fr) | 2012-02-01 | 2012-02-01 | Circuit integre 3d |
| US13/751,489 US9018078B2 (en) | 2012-02-01 | 2013-01-28 | Method of making a 3D integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1250950A FR2986370B1 (fr) | 2012-02-01 | 2012-02-01 | Circuit integre 3d |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2986370A1 FR2986370A1 (fr) | 2013-08-02 |
| FR2986370B1 true FR2986370B1 (fr) | 2014-11-21 |
Family
ID=46149593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1250950A Active FR2986370B1 (fr) | 2012-02-01 | 2012-02-01 | Circuit integre 3d |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9018078B2 (fr) |
| FR (1) | FR2986370B1 (fr) |
Families Citing this family (205)
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| JP2734962B2 (ja) * | 1993-12-27 | 1998-04-02 | 日本電気株式会社 | 薄膜トランジスタ及びその製造方法 |
| US20100190334A1 (en) * | 2003-06-24 | 2010-07-29 | Sang-Yun Lee | Three-dimensional semiconductor structure and method of manufacturing the same |
| US7863748B2 (en) * | 2003-06-24 | 2011-01-04 | Oh Choonsik | Semiconductor circuit and method of fabricating the same |
| US7391109B2 (en) * | 2006-05-22 | 2008-06-24 | Hewlett-Packard Development Company, L.P. | Integrated circuit interconnect |
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| US9018078B2 (en) | 2015-04-28 |
| FR2986370A1 (fr) | 2013-08-02 |
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