FR2995698B1 - Procede pour la mesure de potentiels de surface sur des dispositifs polarises - Google Patents

Procede pour la mesure de potentiels de surface sur des dispositifs polarises

Info

Publication number
FR2995698B1
FR2995698B1 FR1258747A FR1258747A FR2995698B1 FR 2995698 B1 FR2995698 B1 FR 2995698B1 FR 1258747 A FR1258747 A FR 1258747A FR 1258747 A FR1258747 A FR 1258747A FR 2995698 B1 FR2995698 B1 FR 2995698B1
Authority
FR
France
Prior art keywords
measuring surface
surface potentials
polarized devices
polarized
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1258747A
Other languages
English (en)
Other versions
FR2995698A1 (fr
Inventor
Louis Giraudet
Nicolae Bogdan Bercu
Olivier Simonetti
Jean-Louis Nicolas
Michael Molinari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Reims Champagne Ardenne URCA
Original Assignee
Universite de Reims Champagne Ardenne URCA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1258747A priority Critical patent/FR2995698B1/fr
Application filed by Universite de Reims Champagne Ardenne URCA filed Critical Universite de Reims Champagne Ardenne URCA
Priority to CA2883881A priority patent/CA2883881A1/fr
Priority to EP13779256.0A priority patent/EP2898331A1/fr
Priority to JP2015531631A priority patent/JP2015529828A/ja
Priority to US14/429,306 priority patent/US20150253354A1/en
Priority to KR1020157010136A priority patent/KR20150064095A/ko
Priority to CN201380048589.6A priority patent/CN104903731A/zh
Priority to PCT/FR2013/052140 priority patent/WO2014044966A1/fr
Publication of FR2995698A1 publication Critical patent/FR2995698A1/fr
Application granted granted Critical
Publication of FR2995698B1 publication Critical patent/FR2995698B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/20—Sample handling devices or methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/30—Scanning potential microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR1258747A 2012-09-18 2012-09-18 Procede pour la mesure de potentiels de surface sur des dispositifs polarises Expired - Fee Related FR2995698B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1258747A FR2995698B1 (fr) 2012-09-18 2012-09-18 Procede pour la mesure de potentiels de surface sur des dispositifs polarises
EP13779256.0A EP2898331A1 (fr) 2012-09-18 2013-09-18 Procédé pour la mesure de potentiels de surface sur des dispositifs polarisés
JP2015531631A JP2015529828A (ja) 2012-09-18 2013-09-18 分極されたデバイス上の表面電位を測定する方法
US14/429,306 US20150253354A1 (en) 2012-09-18 2013-09-18 Method for measuring surface potentials on polarized devices
CA2883881A CA2883881A1 (fr) 2012-09-18 2013-09-18 Procede pour la mesure de potentiels de surface sur des dispositifs polarises
KR1020157010136A KR20150064095A (ko) 2012-09-18 2013-09-18 편극된 장치의 표면 포텐셜 측정 방법
CN201380048589.6A CN104903731A (zh) 2012-09-18 2013-09-18 测量极化设备上的表面电势的方法
PCT/FR2013/052140 WO2014044966A1 (fr) 2012-09-18 2013-09-18 Procédé pour la mesure de potentiels de surface sur des dispositifs polarisés

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1258747A FR2995698B1 (fr) 2012-09-18 2012-09-18 Procede pour la mesure de potentiels de surface sur des dispositifs polarises

Publications (2)

Publication Number Publication Date
FR2995698A1 FR2995698A1 (fr) 2014-03-21
FR2995698B1 true FR2995698B1 (fr) 2014-10-17

Family

ID=47827349

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1258747A Expired - Fee Related FR2995698B1 (fr) 2012-09-18 2012-09-18 Procede pour la mesure de potentiels de surface sur des dispositifs polarises

Country Status (8)

Country Link
US (1) US20150253354A1 (fr)
EP (1) EP2898331A1 (fr)
JP (1) JP2015529828A (fr)
KR (1) KR20150064095A (fr)
CN (1) CN104903731A (fr)
CA (1) CA2883881A1 (fr)
FR (1) FR2995698B1 (fr)
WO (1) WO2014044966A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6227262B2 (ja) * 2013-03-06 2017-11-08 株式会社荏原製作所 表面電位測定装置および表面電位測定方法
US11175306B2 (en) * 2017-05-10 2021-11-16 Cornell University Atomic force microscopy apparatus, methods, and applications
CN108828269B (zh) * 2018-04-26 2020-10-13 中北大学 基于光学定位技术的原子力显微镜精确重复定位实现装置
CN112666369B (zh) * 2020-12-24 2024-07-02 广州中源仪器技术有限公司 原子力显微镜系统
CN113092825B (zh) * 2021-03-05 2022-12-30 中山大学 原子力显微镜系统及其电流检测方法
CN113092826B (zh) * 2021-03-05 2023-04-07 中山大学 扫描探针显微镜系统及其测量方法
CN114397352B (zh) * 2021-12-31 2024-02-20 华中科技大学 一种对探针与样品间距变化不敏感的电势测量方法
CN114322745B (zh) * 2021-12-31 2022-09-30 华中科技大学 一种同时测量导体表面电势和表面形貌的方法
CN116754796A (zh) * 2023-05-10 2023-09-15 北京工业大学 一种高空间分辨率的电磁无损检测方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
JP3294662B2 (ja) * 1993-04-21 2002-06-24 株式会社リコー 表面電位計
US5907096A (en) * 1997-06-02 1999-05-25 International Business Machines Corporation Detecting fields with a two-pass, dual-amplitude-mode scanning force microscope
JP2002214113A (ja) 2001-01-16 2002-07-31 National Institute Of Advanced Industrial & Technology トポグラフ測定方法
CN101493397B (zh) * 2009-02-27 2010-12-29 中山大学 一种静电力显微镜及其测量方法
FR2956484B1 (fr) * 2010-02-15 2012-04-20 Centre Nat Recherche Mesure du potentiel de surface d'un materiau.

Also Published As

Publication number Publication date
CA2883881A1 (fr) 2014-03-27
US20150253354A1 (en) 2015-09-10
FR2995698A1 (fr) 2014-03-21
CN104903731A (zh) 2015-09-09
WO2014044966A1 (fr) 2014-03-27
JP2015529828A (ja) 2015-10-08
EP2898331A1 (fr) 2015-07-29
KR20150064095A (ko) 2015-06-10

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Year of fee payment: 4

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Effective date: 20170531