FR3054005B1 - Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe - Google Patents

Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe Download PDF

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Publication number
FR3054005B1
FR3054005B1 FR1656782A FR1656782A FR3054005B1 FR 3054005 B1 FR3054005 B1 FR 3054005B1 FR 1656782 A FR1656782 A FR 1656782A FR 1656782 A FR1656782 A FR 1656782A FR 3054005 B1 FR3054005 B1 FR 3054005B1
Authority
FR
France
Prior art keywords
sas
unloading
loading
pump group
associated pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1656782A
Other languages
English (en)
Other versions
FR3054005A1 (fr
Inventor
Eric MANDALLAZ
Christophe Santi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR1656782A priority Critical patent/FR3054005B1/fr
Priority to TW106120787A priority patent/TWI723186B/zh
Priority to EP17735085.7A priority patent/EP3485168B1/fr
Priority to KR1020197003693A priority patent/KR102404612B1/ko
Priority to PCT/EP2017/066178 priority patent/WO2018010970A1/fr
Priority to CN201780042978.6A priority patent/CN109477485B/zh
Publication of FR3054005A1 publication Critical patent/FR3054005A1/fr
Application granted granted Critical
Publication of FR3054005B1 publication Critical patent/FR3054005B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/20—Flow
    • F04C2270/205—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
FR1656782A 2016-07-13 2016-07-13 Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe Expired - Fee Related FR3054005B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1656782A FR3054005B1 (fr) 2016-07-13 2016-07-13 Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe
TW106120787A TWI723186B (zh) 2016-07-13 2017-06-21 用於降低負載鎖定件內的壓力的方法及相關的幫浦單元
EP17735085.7A EP3485168B1 (fr) 2016-07-13 2017-06-29 Procédé de descente en pression dans un sas de chargement et de déchargement et groupe de pompage associé
KR1020197003693A KR102404612B1 (ko) 2016-07-13 2017-06-29 로딩 및 언로딩 록 내의 압력을 감소시키는 방법 및 관련 펌프 유닛
PCT/EP2017/066178 WO2018010970A1 (fr) 2016-07-13 2017-06-29 Procédé de descente en pression dans un sas de chargement et de déchargement et groupe de pompage associé
CN201780042978.6A CN109477485B (zh) 2016-07-13 2017-06-29 用于降低负载锁中的压力的方法和相关泵单元

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1656782A FR3054005B1 (fr) 2016-07-13 2016-07-13 Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe
FR1656782 2016-07-13

Publications (2)

Publication Number Publication Date
FR3054005A1 FR3054005A1 (fr) 2018-01-19
FR3054005B1 true FR3054005B1 (fr) 2018-08-24

Family

ID=56943791

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1656782A Expired - Fee Related FR3054005B1 (fr) 2016-07-13 2016-07-13 Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe

Country Status (6)

Country Link
EP (1) EP3485168B1 (fr)
KR (1) KR102404612B1 (fr)
CN (1) CN109477485B (fr)
FR (1) FR3054005B1 (fr)
TW (1) TWI723186B (fr)
WO (1) WO2018010970A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800021148A1 (it) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A Pompa ausiliaria volumetrica per la generazione del vuoto.
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
BE1028087B1 (nl) 2020-02-24 2021-09-21 Atlas Copco Airpower Nv Werkwijze voor het aansturen van een vacuümsysteem en vacuümsysteem
BE1028135B1 (nl) * 2020-03-10 2021-10-11 Atlas Copco Airpower Nv Werkwijze en inrichting voor het regelen van de pompsnelheid, computerprogramma en een door een computer leesbaar medium waarop het computerprogramma is opgeslagen daarbij toegepast en een pomp
FR3112171B1 (fr) * 2020-10-16 2022-07-08 Pfeiffer Vacuum Procédé de contrôle d’une puissance de fonctionnement d’une pompe à vide et pompe à vide
KR102873694B1 (ko) * 2021-03-26 2025-10-20 한미반도체 주식회사 반도체 기판 절단장치
FR3129992B1 (fr) * 2021-12-08 2023-12-01 Pfeiffer Vacuum Groupe de pompage, dispositif et procédé de pompage et de traitement

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3639512A1 (de) * 1986-11-20 1988-06-01 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpsystem mit einer waelzkolbenpumpe
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP2006342688A (ja) * 2005-06-07 2006-12-21 Ebara Corp 真空排気システム
FR2888894A1 (fr) * 2005-07-20 2007-01-26 Alcatel Sa Pompage rapide d'enceinte avec economie d'energie
FR2940322B1 (fr) * 2008-12-19 2011-02-11 Alcatel Lucent Procede de descente en pression dans un sas de chargement et de dechargement et equipement associe
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
US20130343912A1 (en) * 2011-03-11 2013-12-26 Ulvac Kiko, Inc. Vacuum pump, vacuum exhaust device, and method of operating vacuum pump
US11215180B2 (en) * 2012-06-28 2022-01-04 Sterling Industry Consult Gmbh Method and pump arrangement for evacuating a chamber
FR3017425A1 (fr) * 2014-02-12 2015-08-14 Adixen Vacuum Products Systeme de pompage et procede de descente en pression dans un sas de chargement et de dechargement

Also Published As

Publication number Publication date
TW201804083A (zh) 2018-02-01
KR102404612B1 (ko) 2022-05-31
TWI723186B (zh) 2021-04-01
CN109477485A (zh) 2019-03-15
WO2018010970A1 (fr) 2018-01-18
CN109477485B (zh) 2020-07-10
EP3485168B1 (fr) 2020-04-22
KR20190022880A (ko) 2019-03-06
EP3485168A1 (fr) 2019-05-22
FR3054005A1 (fr) 2018-01-19

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