FR3131141B1 - Structure plane de resonateur mecanique a vibration d'extension-compression selon un mode partiel egal a trois - Google Patents

Structure plane de resonateur mecanique a vibration d'extension-compression selon un mode partiel egal a trois Download PDF

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Publication number
FR3131141B1
FR3131141B1 FR2113592A FR2113592A FR3131141B1 FR 3131141 B1 FR3131141 B1 FR 3131141B1 FR 2113592 A FR2113592 A FR 2113592A FR 2113592 A FR2113592 A FR 2113592A FR 3131141 B1 FR3131141 B1 FR 3131141B1
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France
Prior art keywords
extension
mechanical resonator
plane structure
vibration according
partial mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2113592A
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English (en)
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FR3131141A1 (fr
Inventor
Paul Chapellier
Pierre Lavenus
Thomas Perrier
Vincent Gaudineau
Raphaël Levy
Claude Chartier
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Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
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Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR2113592A priority Critical patent/FR3131141B1/fr
Priority to PCT/FR2022/052217 priority patent/WO2023111418A1/fr
Publication of FR3131141A1 publication Critical patent/FR3131141A1/fr
Application granted granted Critical
Publication of FR3131141B1 publication Critical patent/FR3131141B1/fr
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Une structure plane de résonateur mécanique (1) comprend une portion de plaquette de quartz cristallin dont les faces parallèles sont perpendiculaires à un axe cristallin Z du quartz. La portion de plaquette comprend une poutre principale (10) et deux poutres latérales (11a, 11b). L’ensemble possède un mode de vibration à une fréquence supérieure à 5 MHz, qui comprend une vibration par extension-compression de la poutre principale et des vibrations par flexion des deux poutres latérales parallèlement à la plaquette. Une telle structure possède une valeur de facteur de qualité qui est supérieure à 105.Figure d’abrégé : Figure 1
FR2113592A 2021-12-16 2021-12-16 Structure plane de resonateur mecanique a vibration d'extension-compression selon un mode partiel egal a trois Active FR3131141B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2113592A FR3131141B1 (fr) 2021-12-16 2021-12-16 Structure plane de resonateur mecanique a vibration d'extension-compression selon un mode partiel egal a trois
PCT/FR2022/052217 WO2023111418A1 (fr) 2021-12-16 2022-12-01 Structure plane de resonateur mecanique a vibration d'extension-compression selon un mode partiel egal a trois

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2113592A FR3131141B1 (fr) 2021-12-16 2021-12-16 Structure plane de resonateur mecanique a vibration d'extension-compression selon un mode partiel egal a trois
FR2113592 2021-12-16

Publications (2)

Publication Number Publication Date
FR3131141A1 FR3131141A1 (fr) 2023-06-23
FR3131141B1 true FR3131141B1 (fr) 2023-11-10

Family

ID=81580700

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2113592A Active FR3131141B1 (fr) 2021-12-16 2021-12-16 Structure plane de resonateur mecanique a vibration d'extension-compression selon un mode partiel egal a trois

Country Status (2)

Country Link
FR (1) FR3131141B1 (fr)
WO (1) WO2023111418A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4322144C2 (de) * 1992-07-03 1997-06-05 Murata Manufacturing Co Vibratoreinheit
JP3743913B2 (ja) * 2002-09-19 2006-02-08 有限会社ピエデック技術研究所 水晶振動子、水晶ユニット、水晶発振器とそれらの製造方法
FR3002095B1 (fr) 2013-02-14 2015-02-20 Onera (Off Nat Aerospatiale) Structure plane de resonateur mecanique decouple par des vibrations de flexion et d'extension-compression

Also Published As

Publication number Publication date
WO2023111418A1 (fr) 2023-06-22
FR3131141A1 (fr) 2023-06-23

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