FR3135330B1 - Procédé de fabrication de microlentilles - Google Patents

Procédé de fabrication de microlentilles

Info

Publication number
FR3135330B1
FR3135330B1 FR2204255A FR2204255A FR3135330B1 FR 3135330 B1 FR3135330 B1 FR 3135330B1 FR 2204255 A FR2204255 A FR 2204255A FR 2204255 A FR2204255 A FR 2204255A FR 3135330 B1 FR3135330 B1 FR 3135330B1
Authority
FR
France
Prior art keywords
microlens structures
manufacturing process
deformation
formation
convex shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2204255A
Other languages
English (en)
Other versions
FR3135330A1 (fr
Inventor
Jonathan Fantuz
Alain Inard
Didier Dutartre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics Crolles 2 SAS
Original Assignee
STMicroelectronics Crolles 2 SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics Crolles 2 SAS filed Critical STMicroelectronics Crolles 2 SAS
Priority to FR2204255A priority Critical patent/FR3135330B1/fr
Priority to US18/298,781 priority patent/US20230361151A1/en
Publication of FR3135330A1 publication Critical patent/FR3135330A1/fr
Application granted granted Critical
Publication of FR3135330B1 publication Critical patent/FR3135330B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8063—Microlenses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

Selon un aspect, il est proposé un procédé de fabrication d’un dispositif optique sur un substrat support (SUB), comprenant une formation d’une pluralité de microlentille comportant : - une formation de premières structures de microlentille (LS1) par photolithographie (PTH_LITO1) sur le substrat support (SUB), puis par une déformation des premières structures de microlentille (LS1) de façon à donner une forme bombée aux premières structures de microlentille (LS1), les premières structures de microlentille (LS1) étant séparées les unes des autres par des régions d’espacement (GP) après déformation, puis - une formation de deuxièmes structures de microlentille (LS2) par photolithographie (PTH_LITO2) puis par déformation des deuxièmes structures de microlentille (LS2) de sorte que les deuxièmes structures de microlentille (LS2) présentent une forme bombée épousant la forme bombée desdites premières structures de microlentille (LS1) et s’étendent en partie dans les régions d’espacement (GP) entre les premières structures de microlentille (LS1). Figure pour l’abrégé : Fig 9
FR2204255A 2022-05-05 2022-05-05 Procédé de fabrication de microlentilles Active FR3135330B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2204255A FR3135330B1 (fr) 2022-05-05 2022-05-05 Procédé de fabrication de microlentilles
US18/298,781 US20230361151A1 (en) 2022-05-05 2023-04-11 Method for manufacturing microlenses

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2204255 2022-05-05
FR2204255A FR3135330B1 (fr) 2022-05-05 2022-05-05 Procédé de fabrication de microlentilles

Publications (2)

Publication Number Publication Date
FR3135330A1 FR3135330A1 (fr) 2023-11-10
FR3135330B1 true FR3135330B1 (fr) 2025-11-07

Family

ID=82319824

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2204255A Active FR3135330B1 (fr) 2022-05-05 2022-05-05 Procédé de fabrication de microlentilles

Country Status (2)

Country Link
US (1) US20230361151A1 (fr)
FR (1) FR3135330B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2803395A1 (fr) * 1999-12-30 2001-07-06 Commissariat Energie Atomique Microsysteme optique solide a face plane et procede de realisation d'un tel microsysteme
JP2015065268A (ja) * 2013-09-25 2015-04-09 ソニー株式会社 レンズアレイおよびその製造方法、固体撮像装置、並びに電子機器
US20200348455A1 (en) * 2019-05-03 2020-11-05 Semiconductor Components Industries, Llc Imaging systems with improved microlenses

Also Published As

Publication number Publication date
FR3135330A1 (fr) 2023-11-10
US20230361151A1 (en) 2023-11-09

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