FR3135828B1 - Dispositif piezoelectrique miniaturise - Google Patents

Dispositif piezoelectrique miniaturise Download PDF

Info

Publication number
FR3135828B1
FR3135828B1 FR2204674A FR2204674A FR3135828B1 FR 3135828 B1 FR3135828 B1 FR 3135828B1 FR 2204674 A FR2204674 A FR 2204674A FR 2204674 A FR2204674 A FR 2204674A FR 3135828 B1 FR3135828 B1 FR 3135828B1
Authority
FR
France
Prior art keywords
electrodes
piezoelectric device
miniaturized piezoelectric
vias
stack
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2204674A
Other languages
English (en)
Other versions
FR3135828A1 (fr
Inventor
Mohammed Benwadih
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR2204674A priority Critical patent/FR3135828B1/fr
Priority to PCT/FR2023/050701 priority patent/WO2023222974A1/fr
Publication of FR3135828A1 publication Critical patent/FR3135828A1/fr
Application granted granted Critical
Publication of FR3135828B1 publication Critical patent/FR3135828B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/857—Macromolecular compositions

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

Dispositif piézoélectrique comprenant un empilement comprenant des couches piézoélectriques organiques (400), des premières électrodes (100) et des deuxièmes électrodes (200), chaque couche piézoélectrique organique (400) étant disposée entre une première électrode (100) et une deuxième électrode (200), le dispositif piézoélectrique comprenant en outre des vias (510, 520) pour connecter électriquement, d’une part, les premières électrodes (200) et, d’autre part, les deuxièmes électrodes (200), disposés dans les couches piézoélectriques organiques (400) et traversants de part en part l’empilement, les vias (510, 520) ayant une forme de disque, d’hippodrome ou d’ovale présentant des angles (α) rentrants supérieurs à 315°. Figure pour l’abrégé : 5
FR2204674A 2022-05-17 2022-05-17 Dispositif piezoelectrique miniaturise Active FR3135828B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2204674A FR3135828B1 (fr) 2022-05-17 2022-05-17 Dispositif piezoelectrique miniaturise
PCT/FR2023/050701 WO2023222974A1 (fr) 2022-05-17 2023-05-16 Dispositif piezoelectrique miniaturise

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2204674 2022-05-17
FR2204674A FR3135828B1 (fr) 2022-05-17 2022-05-17 Dispositif piezoelectrique miniaturise

Publications (2)

Publication Number Publication Date
FR3135828A1 FR3135828A1 (fr) 2023-11-24
FR3135828B1 true FR3135828B1 (fr) 2024-05-10

Family

ID=83189088

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2204674A Active FR3135828B1 (fr) 2022-05-17 2022-05-17 Dispositif piezoelectrique miniaturise

Country Status (2)

Country Link
FR (1) FR3135828B1 (fr)
WO (1) WO2023222974A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017165282A1 (fr) * 2016-03-21 2017-09-28 President And Fellows Of Harvard College Techniques et dispositifs de fabrication utilisant des élastomères diélectriques
US20240074321A1 (en) * 2019-10-25 2024-02-29 Universität des Saarlandes Dielectric Transducer, Method for the Production Thereof and Actuator, Sensor or Generator
FR3103060B1 (fr) * 2019-11-07 2022-12-09 Commissariat Energie Atomique Dispositif électromécanique à base de polymères ferroélectriques et procédés de fabrication d’un tel dispositif

Also Published As

Publication number Publication date
WO2023222974A1 (fr) 2023-11-23
FR3135828A1 (fr) 2023-11-24

Similar Documents

Publication Publication Date Title
JP3554467B2 (ja) バイオテクノロジー用ｍｏｓトランジスタ
FR2875007B1 (fr) Puce biologique comportant un reseau d'electrodes sur un substrat
CA2383031A1 (fr) Biocapteur
DE602005023435D1 (de) Elektrochemische testvorrichtung und damit verbundene verfahren
ATE200942T1 (de) Festoxidbrennstoffzellen mit spezifischen elektrodenschichten
EP1088877A3 (fr) Dispositif à cristaux liquides et appareil à cristaux liquides
FR3135828B1 (fr) Dispositif piezoelectrique miniaturise
US12611698B2 (en) Wafer level ultrasonic device
EP0291903A3 (fr) Ancre de membrane pour électrodes sélectives d'ion
KR910012773A (ko) 액정 표시장치
TW200523840A (en) Display device having a plurality of leads connected to a single common line
TW200847306A (en) Dimple free gold bump for drive IC
CN1652137A (zh) 电容式压力感测元结构及制造方法
EP1128417A3 (fr) Dispositif de mémoire à semi-conducteur
JP2007526466A (ja) バイオコンポーネントを測定するための電解効果トランジスタ
CN113536988A (zh) 超声波指纹识别模组及其检测方法、显示模组
TW548402B (en) Tester and holder for tester
WO2006036691A3 (fr) Dispositif a memoire polymerique ferroelectrique comprenant des electrodes polymeriques et procede de fabrication afferent
JP2005109291A5 (fr)
JPS5838979Y2 (ja) デ−タ入力盤の誤入力防止装置
EP0178582A3 (fr) Dispositif semi-conducteur à blocage inverse
JPH0615376Y2 (ja) フラットスイッチ
JP2004081712A (ja) 電極装置
TW201039419A (en) Pixel array substrate and liquid crystal display
JPS6477029A (en) Active device

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20231124

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4