FR3138517B1 - Micro-bolometre d’imagerie infrarouge aveugle et procede de realisation - Google Patents

Micro-bolometre d’imagerie infrarouge aveugle et procede de realisation Download PDF

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Publication number
FR3138517B1
FR3138517B1 FR2207795A FR2207795A FR3138517B1 FR 3138517 B1 FR3138517 B1 FR 3138517B1 FR 2207795 A FR2207795 A FR 2207795A FR 2207795 A FR2207795 A FR 2207795A FR 3138517 B1 FR3138517 B1 FR 3138517B1
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FR
France
Prior art keywords
bolometer
infrared imaging
blind
producing same
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2207795A
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English (en)
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FR3138517A1 (fr
Inventor
Nicolas Boudou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lynred SAS
Original Assignee
Lynred SAS
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Filing date
Publication date
Application filed by Lynred SAS filed Critical Lynred SAS
Priority to FR2207795A priority Critical patent/FR3138517B1/fr
Priority to PCT/FR2023/050505 priority patent/WO2024023402A1/fr
Publication of FR3138517A1 publication Critical patent/FR3138517A1/fr
Application granted granted Critical
Publication of FR3138517B1 publication Critical patent/FR3138517B1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/046—Materials; Selection of thermal materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J2005/065—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by shielding

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

L’invention concerne un micro-bolomètre aveugle d’imagerie infrarouge (10) comprenant :– un substrat (11) ; – une membrane (14) ; et– un écran d’occultation (19) disposé au-dessus de la membrane (14) de sorte à bloquer les rayonnements infrarouges incidents ; ledit écran d’occultation (19) comprenant :. au moins une couche métallique présentant une épaisseur supérieure à 150 nanomètres ; et. au moins deux évents de libération (32) destinés à permettre le retrait d’au moins une couche sacrificielle mise en œuvre lors du procédé de fabrication du micro-bolomètre aveugle (10), chaque évent de libération (32) présentant un taux d’ouverture inférieur à 30% et une taille inférieure à 3 micromètres. Figure pour abrégé : Fig 1
FR2207795A 2022-07-28 2022-07-28 Micro-bolometre d’imagerie infrarouge aveugle et procede de realisation Active FR3138517B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2207795A FR3138517B1 (fr) 2022-07-28 2022-07-28 Micro-bolometre d’imagerie infrarouge aveugle et procede de realisation
PCT/FR2023/050505 WO2024023402A1 (fr) 2022-07-28 2023-04-07 Micro-bolometre d'imagerie infrarouge aveugle et procede de realisation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2207795A FR3138517B1 (fr) 2022-07-28 2022-07-28 Micro-bolometre d’imagerie infrarouge aveugle et procede de realisation
FR2207795 2022-07-28

Publications (2)

Publication Number Publication Date
FR3138517A1 FR3138517A1 (fr) 2024-02-02
FR3138517B1 true FR3138517B1 (fr) 2025-03-14

Family

ID=84488234

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2207795A Active FR3138517B1 (fr) 2022-07-28 2022-07-28 Micro-bolometre d’imagerie infrarouge aveugle et procede de realisation

Country Status (2)

Country Link
FR (1) FR3138517B1 (fr)
WO (1) WO2024023402A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3175662B2 (ja) * 1997-10-07 2001-06-11 日本電気株式会社 熱型赤外線検出素子の製造方法
JP2011232157A (ja) 2010-04-27 2011-11-17 Mitsubishi Electric Corp 赤外線撮像装置
FR2966595B1 (fr) * 2010-10-26 2013-01-25 Commissariat Energie Atomique Dispositif de detection d'un rayonnement electromagnetique.
CN207964094U (zh) 2015-01-08 2018-10-12 菲力尔系统公司 红外探测装置
FR3045148B1 (fr) 2015-12-15 2017-12-08 Ulis Dispositif de detection a membranes bolometriques suspendues a fort rendement d'absorption et rapport signal sur bruit
FR3118663B1 (fr) * 2021-01-04 2024-07-12 Commissariat Energie Atomique Procédé de fabrication d’un dispositif de détection comportant une structure d’encapsulation comportant une couche mince opaque reposant sur une paroi périphérique minérale

Also Published As

Publication number Publication date
WO2024023402A1 (fr) 2024-02-01
FR3138517A1 (fr) 2024-02-02

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