FR3139896B1 - Système de mesure d’une longueur d’onde centrale d’une raie spectrale avec une haute précision et méthode associée. - Google Patents

Système de mesure d’une longueur d’onde centrale d’une raie spectrale avec une haute précision et méthode associée. Download PDF

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Publication number
FR3139896B1
FR3139896B1 FR2209563A FR2209563A FR3139896B1 FR 3139896 B1 FR3139896 B1 FR 3139896B1 FR 2209563 A FR2209563 A FR 2209563A FR 2209563 A FR2209563 A FR 2209563A FR 3139896 B1 FR3139896 B1 FR 3139896B1
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interest
central wavelength
signal
measuring
spectrometer
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FR2209563A
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English (en)
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FR3139896A1 (fr
Inventor
Jean-Baptiste Sirven
Kévin Touchet
FRéDéRIC CHARTIER
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Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
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Priority to FR2209563A priority Critical patent/FR3139896B1/fr
Priority to KR1020257012941A priority patent/KR20250070098A/ko
Priority to JP2025517082A priority patent/JP2025531357A/ja
Priority to PCT/EP2023/075943 priority patent/WO2024061969A1/fr
Priority to EP23776025.1A priority patent/EP4591039A1/fr
Priority to CN202380066696.5A priority patent/CN119895237A/zh
Publication of FR3139896A1 publication Critical patent/FR3139896A1/fr
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/3103—Atomic absorption analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/443—Emission spectrometry

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Système (10) de mesure d’une longueur d’onde centrale d’intérêt (λc) d’une raie spectrale d’intérêt (RSe) mesurée par un spectromètre, le système comprenant: un système de détection comprenant un spectromètre (Spectro) associé à un détecteur (Det) une fibre optique (FOY) en Y configurée de sorte que : la première entrée collecte un signal lumineux (SLech) issu de l’échantillon, dit signal échantillon, la deuxième entrée collecte un signal lumineux (SLref) issu d’une source de référence (Sref), dit signal référence, la sortie est couplée à une entrée du spectromètre,le système de mesure étant configuré pour que le détecteur détecte ledit signal échantillon et ledit signal référence simultanément ou séquentiellement dans le temps, le système de mesure comprenant en outre une unité de traitement (UT) configurée pour : traiter lesdits profils mesurés d’intérêt et de référence,déterminer une valeur de la longueur d’onde centrale d’intérêt à partir d’une différence entre lesdites positions d’intérêt et de référence, de ladite valeur connue de la longueur d’onde de référence et d’une dispersion linéaire (DL) du système de détection. Figure 5
FR2209563A 2022-09-21 2022-09-21 Système de mesure d’une longueur d’onde centrale d’une raie spectrale avec une haute précision et méthode associée. Active FR3139896B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR2209563A FR3139896B1 (fr) 2022-09-21 2022-09-21 Système de mesure d’une longueur d’onde centrale d’une raie spectrale avec une haute précision et méthode associée.
KR1020257012941A KR20250070098A (ko) 2022-09-21 2023-09-20 높은 정확도로 스펙트럼 라인의 중심 파장을 측정하기 위한 시스템 및 연관된 방법
JP2025517082A JP2025531357A (ja) 2022-09-21 2023-09-20 高精度で分光線の中心波長を測定するためのシステム及び関連する方法
PCT/EP2023/075943 WO2024061969A1 (fr) 2022-09-21 2023-09-20 Système de mesure d'une longueur d'onde centrale d'une raie spectrale avec une haute précision et méthode associée
EP23776025.1A EP4591039A1 (fr) 2022-09-21 2023-09-20 Système de mesure d'une longueur d'onde centrale d'une raie spectrale avec une haute précision et méthode associée
CN202380066696.5A CN119895237A (zh) 2022-09-21 2023-09-20 用于以高精度测量光谱线的中心波长的系统和相关方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2209563 2022-09-21
FR2209563A FR3139896B1 (fr) 2022-09-21 2022-09-21 Système de mesure d’une longueur d’onde centrale d’une raie spectrale avec une haute précision et méthode associée.

Publications (2)

Publication Number Publication Date
FR3139896A1 FR3139896A1 (fr) 2024-03-22
FR3139896B1 true FR3139896B1 (fr) 2024-12-13

Family

ID=85222563

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2209563A Active FR3139896B1 (fr) 2022-09-21 2022-09-21 Système de mesure d’une longueur d’onde centrale d’une raie spectrale avec une haute précision et méthode associée.

Country Status (6)

Country Link
EP (1) EP4591039A1 (fr)
JP (1) JP2025531357A (fr)
KR (1) KR20250070098A (fr)
CN (1) CN119895237A (fr)
FR (1) FR3139896B1 (fr)
WO (1) WO2024061969A1 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6029115A (en) * 1996-10-03 2000-02-22 Perkin Elmer Llc Analyzing spectrometric data
US20020186363A1 (en) * 1999-09-03 2002-12-12 James Samsoondar Method and apparatus for screening plasma for interferents in plasma from donor blood bags
US7636158B1 (en) * 2004-09-24 2009-12-22 Romuald Pawluczyk Optimal coupling of high performance line imaging spectrometer to imaging system
GB2490497A (en) * 2011-05-03 2012-11-07 Waterford Inst Technology A stationary waveguide spectrum analyser
FR3069926B1 (fr) 2017-08-07 2021-08-06 Commissariat Energie Atomique Dispositif de mesure isotopique
US10794763B2 (en) * 2019-02-20 2020-10-06 Verity Instruments, Inc. Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer
GB2586046B (en) * 2019-07-31 2021-12-22 Thermo Fisher Scient Bremen Gmbh Peak determination in two-dimensional optical spectra

Also Published As

Publication number Publication date
JP2025531357A (ja) 2025-09-19
WO2024061969A1 (fr) 2024-03-28
EP4591039A1 (fr) 2025-07-30
CN119895237A (zh) 2025-04-25
KR20250070098A (ko) 2025-05-20
FR3139896A1 (fr) 2024-03-22

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