FR3139904B1 - Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé - Google Patents

Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé Download PDF

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Publication number
FR3139904B1
FR3139904B1 FR2209474A FR2209474A FR3139904B1 FR 3139904 B1 FR3139904 B1 FR 3139904B1 FR 2209474 A FR2209474 A FR 2209474A FR 2209474 A FR2209474 A FR 2209474A FR 3139904 B1 FR3139904 B1 FR 3139904B1
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FR
France
Prior art keywords
measuring
door
enclosure
transport enclosure
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2209474A
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English (en)
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FR3139904A1 (fr
Inventor
Donovan Lebon
Julien Bounouar
Barillec Olivier Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
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Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2209474A priority Critical patent/FR3139904B1/fr
Priority to KR1020257009936A priority patent/KR20250069560A/ko
Priority to PCT/EP2023/070270 priority patent/WO2024061513A1/fr
Priority to TW112130109A priority patent/TW202429058A/zh
Publication of FR3139904A1 publication Critical patent/FR3139904A1/fr
Application granted granted Critical
Publication of FR3139904B1 publication Critical patent/FR3139904B1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2226—Sampling from a closed space, e.g. food package, head space
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier

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  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé Dispositif de mesure (1) de la contamination gazeuse d’une enceinte de transport (2) pour le convoyage et le stockage atmosphérique d’au moins un substrat semi-conducteur (6), ladite enceinte (2) comprenant une porte (4b) et une coque (4a) pouvant être fermée par la porte (4b) au niveau d’une zone de joint (7), l’enceinte (2) étant munie d’au moins un port de ventilation (9, 11, 13, 15), le dispositif de mesure (1) comprenant au moins un analyseur (29) configuré pour mesurer la concentration d’au moins un contaminant gazeux, le dispositif de mesure (1) comprenant une interface (3) configurée pour s’accoupler à l’enceinte de transport (2), ladite interface (3) comprenant une plateforme (5) en regard de laquelle la porte (4b) de l’enceinte de transport (2) est destinée à s’accoupler en ménageant un interstice entre la plateforme (5) et la porte (4b), le dispositif de mesure (1) comprenant :- une tête de mesure (25) reliée audit au moins un analyseur (29) et configurée pour être accouplée de manière étanche à l’un du, au moins un, port de ventilation (9) de l’enceinte de transport (2),- au moins une buse d’injection (33) configurée pour injecter un gaz contrôlé dans l’interstice formé entre la plateforme (5) et la porte (4b), de sorte que le gaz contrôlé se répande au moins face à la zone de joint (7) entourant la porte (4b). Figure 1
FR2209474A 2022-09-20 2022-09-20 Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé Active FR3139904B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR2209474A FR3139904B1 (fr) 2022-09-20 2022-09-20 Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé
KR1020257009936A KR20250069560A (ko) 2022-09-20 2023-07-21 반도체 기판을 운반하는 캐리어의 기상 오염을 측정하는 측정 장치 및 관련 측정 방법
PCT/EP2023/070270 WO2024061513A1 (fr) 2022-09-20 2023-07-21 Dispositif de mesure de la contamination gazeuse d'un support de transport de substrats semi-conducteurs et procédé de mesure associé
TW112130109A TW202429058A (zh) 2022-09-20 2023-08-10 用於測量用於輸送半導體基板的載具的氣體污染的裝置及關聯的測量方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2209474A FR3139904B1 (fr) 2022-09-20 2022-09-20 Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé
FR2209474 2022-09-20

Publications (2)

Publication Number Publication Date
FR3139904A1 FR3139904A1 (fr) 2024-03-22
FR3139904B1 true FR3139904B1 (fr) 2024-08-30

Family

ID=84569668

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2209474A Active FR3139904B1 (fr) 2022-09-20 2022-09-20 Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé

Country Status (4)

Country Link
KR (1) KR20250069560A (fr)
FR (1) FR3139904B1 (fr)
TW (1) TW202429058A (fr)
WO (1) WO2024061513A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2915831B1 (fr) * 2007-05-04 2009-09-25 Alcatel Lucent Sas Interface d'enceinte de transport
TW200948688A (en) * 2007-12-18 2009-12-01 Entegris Inc Methods and apparatuses for controlling contamination of substrates
FR3040528B1 (fr) * 2015-09-02 2017-09-15 Pfeiffer Vacuum Sas Procede et station de mesure de la contamination d'une boite de transport pour le convoyage et le stockage atmospherique de substrats

Also Published As

Publication number Publication date
KR20250069560A (ko) 2025-05-19
TW202429058A (zh) 2024-07-16
FR3139904A1 (fr) 2024-03-22
WO2024061513A1 (fr) 2024-03-28

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