FR3141767B1 - Profilomètre pour surfaces optiques - Google Patents

Profilomètre pour surfaces optiques Download PDF

Info

Publication number
FR3141767B1
FR3141767B1 FR2211704A FR2211704A FR3141767B1 FR 3141767 B1 FR3141767 B1 FR 3141767B1 FR 2211704 A FR2211704 A FR 2211704A FR 2211704 A FR2211704 A FR 2211704A FR 3141767 B1 FR3141767 B1 FR 3141767B1
Authority
FR
France
Prior art keywords
optical element
sensor support
optical
profilometer
curved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2211704A
Other languages
English (en)
Other versions
FR3141767A1 (fr
Inventor
Camille Frapolli
Laurent-Daniel Haret
Jacques Billet
Renaud Mercier-Ythier
Rémi Bourgois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Reosc SAS
Original Assignee
Safran Reosc SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Safran Reosc SAS filed Critical Safran Reosc SAS
Priority to FR2211704A priority Critical patent/FR3141767B1/fr
Priority to PCT/EP2023/081099 priority patent/WO2024100091A1/fr
Publication of FR3141767A1 publication Critical patent/FR3141767A1/fr
Application granted granted Critical
Publication of FR3141767B1 publication Critical patent/FR3141767B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/207Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

L’invention concerne un profilomètre (1) pour surface optique (So), comportant un bâti (2),des capteurs de distance (6), montés sur un support de capteurs (3) pour mesurer chacun une distance selon un axe de mesure (9) localement sensiblement normale à une surface de montage (5) du support de capteurs (3), etun support d’élément optique (10) pour maintenir une surface optique (So) d’un élément optique (Eo) à mesurer en regard des capteurs de distance (6) et du support de capteurs (3), la surface de montage (5) étant incurvée pour être complémentaire d’une surface de référence incurvée d’un élément optique de référence maintenu en regard du support de capteurs (3), la surface optique (So) de l’élément optique (Eo) à mesurer étant théoriquement identique à la surface de référence de l’élément optique de référence. FIGURE DE L’ABREGE : Fig. 1
FR2211704A 2022-11-09 2022-11-09 Profilomètre pour surfaces optiques Active FR3141767B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR2211704A FR3141767B1 (fr) 2022-11-09 2022-11-09 Profilomètre pour surfaces optiques
PCT/EP2023/081099 WO2024100091A1 (fr) 2022-11-09 2023-11-08 Profilometre pour surfaces optiques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2211704 2022-11-09
FR2211704A FR3141767B1 (fr) 2022-11-09 2022-11-09 Profilomètre pour surfaces optiques

Publications (2)

Publication Number Publication Date
FR3141767A1 FR3141767A1 (fr) 2024-05-10
FR3141767B1 true FR3141767B1 (fr) 2024-12-13

Family

ID=85792249

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2211704A Active FR3141767B1 (fr) 2022-11-09 2022-11-09 Profilomètre pour surfaces optiques

Country Status (2)

Country Link
FR (1) FR3141767B1 (fr)
WO (1) WO2024100091A1 (fr)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005022127A2 (fr) * 2003-08-21 2005-03-10 Sensor-Tech Messtechnik Gmbh Dispositif de mesure d'un element plan

Also Published As

Publication number Publication date
WO2024100091A1 (fr) 2024-05-16
FR3141767A1 (fr) 2024-05-10

Similar Documents

Publication Publication Date Title
US7215418B2 (en) Inspection of transparent substrates for defects
TWI718285B (zh) 溫度測定用基板及溫度測定系統
CN1207493A (zh) 金属基体表面非金属涂层厚度非接触测量方法及其装置
JP7467386B2 (ja) 光ファイバセンサ
HU196259B (en) Optoelktromechanical measuring transducer
CN104568117B (zh) 一种具有宽频响、高灵敏的差动式光纤f‑p振动传感器
FR3141767B1 (fr) Profilomètre pour surfaces optiques
KR100221696B1 (ko) 연속제조된 스트립의 평활도 측정롤러
CN105158508B (zh) 一种结构简单的新型光纤振动加速度传感器
EP3465123B1 (fr) Capteur pour mesurer une force de serrage appliquée sur un organe d'assemblage a vis
EP2102585A1 (fr) Dispositif et procédé de mesure des déformations mécaniques d'un profilé
JP3940499B2 (ja) レール変位量測定装置
IT202100006203A1 (it) Dispositivo e metodo per una rilevazione di forza e/o coppia di frenata in corrispondenza di una pinza freno
JPH0735629A (ja) 歪測定装置,歪制御装置および把握力測定装置,加工制御装置
EP0101726A1 (fr) Dispositif optique de detection de deplacement.
JP6427982B2 (ja) 測定装置
KR101033032B1 (ko) 변위 측정 장치
JP2000275018A (ja) 歪み計測方法および装置
JPH03252516A (ja) 厚み測定装置
KR200211258Y1 (ko) 반도체 웨이퍼 증착두께측정장치
JPH0480643A (ja) 屈折率測定装置
JP2003247899A (ja) 光ファイバ張力検出装置
JP3944583B2 (ja) 光学密着不要なブロックゲージ校正方法および装置
Dufour et al. Precise surface profilometry based on low-coherence interferometry
JPS6055206A (ja) 光干渉計

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20240510

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4