FR3145616B1 - Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse - Google Patents

Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse Download PDF

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Publication number
FR3145616B1
FR3145616B1 FR2301139A FR2301139A FR3145616B1 FR 3145616 B1 FR3145616 B1 FR 3145616B1 FR 2301139 A FR2301139 A FR 2301139A FR 2301139 A FR2301139 A FR 2301139A FR 3145616 B1 FR3145616 B1 FR 3145616B1
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FR
France
Prior art keywords
mass
acceleration
accelerometer
force
elastically deformable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2301139A
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English (en)
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FR3145616A1 (fr
Inventor
Aurélien Fougerat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sercel SAS
Original Assignee
Sercel SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sercel SAS filed Critical Sercel SAS
Priority to FR2301139A priority Critical patent/FR3145616B1/fr
Priority to EP24709482.4A priority patent/EP4662494A1/fr
Priority to JP2025545848A priority patent/JP2026503163A/ja
Priority to CN202480011229.7A priority patent/CN120813844A/zh
Priority to PCT/FR2024/050152 priority patent/WO2024165816A1/fr
Publication of FR3145616A1 publication Critical patent/FR3145616A1/fr
Application granted granted Critical
Publication of FR3145616B1 publication Critical patent/FR3145616B1/fr
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Vibration Prevention Devices (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un accéléromètre comportant un support (2), une masse sismique (1) à laquelle est associé un capteur d’accélération qui présente au moins un axe de sensibilité d’accélération (As), la masse sismique étant susceptible d'être soumise à une force induite par une accélération à mesurer, et à une force statique, telle que la force de pesanteur ou une force d’inertie ; un dispositif de liaison (3) élastiquement déformable, qui relie la masse sismique (1) au support (2). L’accéléromètre comprend aussi un système de butée (5) fixe, et un dispositif de butée mobile (34) qui est fixé au dispositif de liaison (3) élastiquement déformable, ou qui forme partie du dispositif de liaison (3) élastiquement déformable, et un système de déplacement (4) configuré pour déplacer le dispositif de butée mobile (34) contre le système de butée (5) fixe, de manière à déformer élastiquement le dispositif de liaison (3) élastiquement déformable pour appliquer une force de rappel (FR) à la masse sismique (1). Figure pour l’abrégé : Fig.2
FR2301139A 2023-02-07 2023-02-07 Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse Active FR3145616B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2301139A FR3145616B1 (fr) 2023-02-07 2023-02-07 Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse
EP24709482.4A EP4662494A1 (fr) 2023-02-07 2024-02-06 Accéléromètre comprenant une masse et un dispositif sensible à l'accélération associé à la masse
JP2025545848A JP2026503163A (ja) 2023-02-07 2024-02-06 質量体および該質量体に関連付けられた加速度感応デバイスを備える加速度計
CN202480011229.7A CN120813844A (zh) 2023-02-07 2024-02-06 包括质量块和与质量块相关联的加速度敏感装置的加速度计
PCT/FR2024/050152 WO2024165816A1 (fr) 2023-02-07 2024-02-06 Accéléromètre comprenant une masse et un dispositif sensible à l'accélération associé à la masse

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2301139A FR3145616B1 (fr) 2023-02-07 2023-02-07 Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse
FR2301139 2023-02-07

Publications (2)

Publication Number Publication Date
FR3145616A1 FR3145616A1 (fr) 2024-08-09
FR3145616B1 true FR3145616B1 (fr) 2025-01-10

Family

ID=85937046

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2301139A Active FR3145616B1 (fr) 2023-02-07 2023-02-07 Accéléromètre comprenant une masse et un dispositif sensible à l’accélération associé à la masse

Country Status (5)

Country Link
EP (1) EP4662494A1 (fr)
JP (1) JP2026503163A (fr)
CN (1) CN120813844A (fr)
FR (1) FR3145616B1 (fr)
WO (1) WO2024165816A1 (fr)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5610335A (en) * 1993-05-26 1997-03-11 Cornell Research Foundation Microelectromechanical lateral accelerometer
FR2735580B1 (fr) 1995-06-14 1997-07-18 Commissariat Energie Atomique Accelerometre du type a compensation de l'effet de la pesanteur et procede de realisation d'un tel accelerometre
FR2764706B1 (fr) 1997-06-17 1999-07-09 Commissariat Energie Atomique Accelerometre miniaturise du type a compensation par ressort de l'effet de la pesanteur et son procede de fabrication
NL2012967B1 (en) 2014-06-06 2016-06-27 Stichting Vu-Vumc MEMS sensor structure comprising mechanically preloaded suspension springs.
DE102015001128B4 (de) * 2015-01-29 2021-09-30 Northrop Grumman Litef Gmbh Beschleunigungssensor mit Federkraftkompensation
US10190938B2 (en) * 2015-09-22 2019-01-29 Murata Manufacturing Co., Ltd. Semi-flexible proof-mass
CN110763870B (zh) 2019-11-06 2020-10-16 中国科学院地质与地球物理研究所 Mems传感器检测装置以及mems传感器系统
DE102021200147A1 (de) * 2021-01-11 2022-07-14 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Betreiben eines mikromechanischen Inertialsensors und mikromechanischer Inertialsensor

Also Published As

Publication number Publication date
JP2026503163A (ja) 2026-01-27
CN120813844A (zh) 2025-10-17
WO2024165816A1 (fr) 2024-08-15
EP4662494A1 (fr) 2025-12-17
FR3145616A1 (fr) 2024-08-09

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