FR3147721B1 - Procédé de recyclage d'un gaz effluent issu d'un dépôt ou d'une infiltration chimique en phase vapeur - Google Patents

Procédé de recyclage d'un gaz effluent issu d'un dépôt ou d'une infiltration chimique en phase vapeur Download PDF

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Publication number
FR3147721B1
FR3147721B1 FR2303565A FR2303565A FR3147721B1 FR 3147721 B1 FR3147721 B1 FR 3147721B1 FR 2303565 A FR2303565 A FR 2303565A FR 2303565 A FR2303565 A FR 2303565A FR 3147721 B1 FR3147721 B1 FR 3147721B1
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France
Prior art keywords
effluent gas
chemical vapor
recycling
hydrocarbons
infiltration
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FR2303565A
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English (en)
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FR3147721A1 (fr
Inventor
Laurent Maisse
Paul-André Chevrin
Inès Baron
Jean-François Daniel René Potin
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Safran Landing Systems SAS
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Safran Landing Systems SAS
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Publication date
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Priority to FR2303565A priority Critical patent/FR3147721B1/fr
Priority to CN202480033404.2A priority patent/CN121219061A/zh
Priority to US19/474,360 priority patent/US20260117374A1/en
Priority to EP24722692.1A priority patent/EP4695005A1/fr
Priority to PCT/FR2024/050467 priority patent/WO2024213848A1/fr
Publication of FR3147721A1 publication Critical patent/FR3147721A1/fr
Application granted granted Critical
Publication of FR3147721B1 publication Critical patent/FR3147721B1/fr
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/72—Organic compounds not provided for in groups B01D53/48 - B01D53/70, e.g. hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/75—Multi-step processes
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen; Reversible storage of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification
    • C01B3/56—Separation of hydrogen or hydrogen-containing gases from gaseous mixtures, e.g. purification by contacting with solids; Regeneration of used solids
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10G—CRACKING HYDROCARBON OILS; PRODUCTION OF LIQUID HYDROCARBON MIXTURES, e.g. BY DESTRUCTIVE HYDROGENATION, OLIGOMERISATION, POLYMERISATION; RECOVERY OF HYDROCARBON OILS FROM OIL-SHALE, OIL-SAND, OR GASES; REFINING MIXTURES MAINLY CONSISTING OF HYDROCARBONS; REFORMING OF NAPHTHA; MINERAL WAXES
    • C10G45/00—Refining of hydrocarbon oils using hydrogen or hydrogen-generating compounds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45593—Recirculation of reactive gases
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D01F9/1271—Alkanes or cycloalkanes
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
    • D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
    • D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
    • D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
    • D01F9/1276—Aromatics, e.g. toluene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/108—Hydrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Analytical Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Textile Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Combustion & Propulsion (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Hydrogen, Water And Hydrids (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Production Of Liquid Hydrocarbon Mixture For Refining Petroleum (AREA)

Abstract

Procédé de recyclage d’un gaz effluent issu d’un dépôt ou d’une infiltration chimique en phase vapeur L’invention concerne un procédé de recyclage d’un gaz effluent (50) issu d’un dépôt ou d’une infiltration chimique en phase vapeur et comprenant du dihydrogène, des hydrocarbures insaturés légers en C1 à C4 et des hydrocarbures lourds en C5 et plus, comprenant les étapes suivantes : a) une élimination (60) des hydrocarbures lourds (501) du gaz effluent, b) une hydrogénation catalytique (80) des hydrocarbures insaturés légers de sorte à les éliminer en les transformant en hydrocarbures saturés légers en C1 à C4, cette hydrogénation catalytique étant réalisée sur le gaz effluent obtenu après mise en œuvre de l’étape a) et consommant une partie du dihydrogène présent dans ledit gaz effluent, et c) l’introduction du gaz effluent (402) obtenu après mise en œuvre de l’étape b) dans une enceinte réactionnelle (30) et la formation de pyrocarbone par dépôt ou infiltration chimique en phase vapeur à partir des hydrocarbures saturés légers en C1 à C4 présents dans le gaz effluent ainsi introduit. Figure pour l’abrégé : Fig. 1.
FR2303565A 2023-04-11 2023-04-11 Procédé de recyclage d'un gaz effluent issu d'un dépôt ou d'une infiltration chimique en phase vapeur Active FR3147721B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2303565A FR3147721B1 (fr) 2023-04-11 2023-04-11 Procédé de recyclage d'un gaz effluent issu d'un dépôt ou d'une infiltration chimique en phase vapeur
CN202480033404.2A CN121219061A (zh) 2023-04-11 2024-04-09 再循环从化学气相沉积或渗透产生的排放气体的方法
US19/474,360 US20260117374A1 (en) 2023-04-11 2024-04-09 Method for recycling an effluent gas from chemical vapor deposition or infiltration
EP24722692.1A EP4695005A1 (fr) 2023-04-11 2024-04-09 Procede de recyclage d'un gaz effluent issu d'un depot ou d'une infiltration chimique en phase vapeur
PCT/FR2024/050467 WO2024213848A1 (fr) 2023-04-11 2024-04-09 Procede de recyclage d'un gaz effluent issu d'un depot ou d'une infiltration chimique en phase vapeur

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2303565A FR3147721B1 (fr) 2023-04-11 2023-04-11 Procédé de recyclage d'un gaz effluent issu d'un dépôt ou d'une infiltration chimique en phase vapeur
FR2303565 2023-04-11

Publications (2)

Publication Number Publication Date
FR3147721A1 FR3147721A1 (fr) 2024-10-18
FR3147721B1 true FR3147721B1 (fr) 2025-04-18

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Application Number Title Priority Date Filing Date
FR2303565A Active FR3147721B1 (fr) 2023-04-11 2023-04-11 Procédé de recyclage d'un gaz effluent issu d'un dépôt ou d'une infiltration chimique en phase vapeur

Country Status (5)

Country Link
US (1) US20260117374A1 (fr)
EP (1) EP4695005A1 (fr)
CN (1) CN121219061A (fr)
FR (1) FR3147721B1 (fr)
WO (1) WO2024213848A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3167558A1 (fr) * 2024-10-18 2026-04-24 Safran Ceramics Procédé de valorisation des effluents d'un procédé CVI

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19646094C2 (de) * 1996-11-08 1999-03-18 Sintec Keramik Gmbh Verfahren zur chemischen Gasphaseninfiltration von refraktären Stoffen, insbesondere Kohlenstoff und Siliziumkarbid, sowie Verwendung des Verfahrens
FR2881145B1 (fr) * 2005-01-24 2007-11-23 Snecma Propulsion Solide Sa Procede d'infiltration chimique en phase gazeuse pour la densification de substrats poreux par du carbone pyrolytique
US10648075B2 (en) * 2015-03-23 2020-05-12 Goodrich Corporation Systems and methods for chemical vapor infiltration and densification of porous substrates
FR3108629B1 (fr) * 2020-03-30 2022-04-01 Safran Ceram Procédé de densification de matériaux composites
FR3113049B1 (fr) * 2020-07-30 2022-10-21 Safran Ceram Procédé de recyclage de sous-produits carbonés

Also Published As

Publication number Publication date
FR3147721A1 (fr) 2024-10-18
WO2024213848A1 (fr) 2024-10-17
CN121219061A (zh) 2025-12-26
EP4695005A1 (fr) 2026-02-18
US20260117374A1 (en) 2026-04-30

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