FR3149936B1 - Pompe à vide turbomoléculaire - Google Patents

Pompe à vide turbomoléculaire

Info

Publication number
FR3149936B1
FR3149936B1 FR2306111A FR2306111A FR3149936B1 FR 3149936 B1 FR3149936 B1 FR 3149936B1 FR 2306111 A FR2306111 A FR 2306111A FR 2306111 A FR2306111 A FR 2306111A FR 3149936 B1 FR3149936 B1 FR 3149936B1
Authority
FR
France
Prior art keywords
vacuum pump
cylindrical skirt
turbomolecular vacuum
stator
outer cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2306111A
Other languages
English (en)
Other versions
FR3149936A1 (fr
Inventor
Moreira Alysson Bruno Barbosa
Pierre-Emmanuel Cavarec
Cécile Chavanne
Nicolas Varennes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2306111A priority Critical patent/FR3149936B1/fr
Priority to EP24718748.7A priority patent/EP4728198A1/fr
Priority to CN202480036904.1A priority patent/CN121219497A/zh
Priority to PCT/EP2024/059434 priority patent/WO2024256055A1/fr
Priority to KR1020267000690A priority patent/KR20260022410A/ko
Publication of FR3149936A1 publication Critical patent/FR3149936A1/fr
Application granted granted Critical
Publication of FR3149936B1 publication Critical patent/FR3149936B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/12—Light metals
    • F05D2300/121—Aluminium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Pompe à vide (1) turbomoléculaire comportant un stator (2), un rotor (3) configuré pour tourner dans le stator (2), le rotor (3) comportant au moins un étage de pales (9), une jupe cylindrique interne (14) et au moins une jupe cylindrique externe (15), les jupes cylindriques interne et externe (14, 15) étant coaxiales et configurées pour tourner en regard de stators Holweck respectifs du stator (2), caractérisée en ce que la jupe cylindrique interne (14) est réalisée dans un matériau de conductivité thermique supérieure à celle du matériau formant la au moins une jupe cylindrique externe (15). Figure 1
FR2306111A 2023-06-15 2023-06-15 Pompe à vide turbomoléculaire Active FR3149936B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR2306111A FR3149936B1 (fr) 2023-06-15 2023-06-15 Pompe à vide turbomoléculaire
EP24718748.7A EP4728198A1 (fr) 2023-06-15 2024-04-08 Pompe à vide turbomoléculaire
CN202480036904.1A CN121219497A (zh) 2023-06-15 2024-04-08 涡轮分子真空泵
PCT/EP2024/059434 WO2024256055A1 (fr) 2023-06-15 2024-04-08 Pompe à vide turbomoléculaire
KR1020267000690A KR20260022410A (ko) 2023-06-15 2024-04-08 터보분자 진공 펌프

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2306111 2023-06-15
FR2306111A FR3149936B1 (fr) 2023-06-15 2023-06-15 Pompe à vide turbomoléculaire

Publications (2)

Publication Number Publication Date
FR3149936A1 FR3149936A1 (fr) 2024-12-20
FR3149936B1 true FR3149936B1 (fr) 2026-02-06

Family

ID=87800936

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2306111A Active FR3149936B1 (fr) 2023-06-15 2023-06-15 Pompe à vide turbomoléculaire

Country Status (5)

Country Link
EP (1) EP4728198A1 (fr)
KR (1) KR20260022410A (fr)
CN (1) CN121219497A (fr)
FR (1) FR3149936B1 (fr)
WO (1) WO2024256055A1 (fr)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3792318B2 (ja) * 1996-10-18 2006-07-05 株式会社大阪真空機器製作所 真空ポンプ
JP2002285989A (ja) * 2001-03-27 2002-10-03 Boc Edwards Technologies Ltd 真空ポンプ
JP4785400B2 (ja) * 2005-04-08 2011-10-05 株式会社大阪真空機器製作所 真空ポンプのロータ
EP3536965B1 (fr) * 2018-03-05 2021-09-22 Pfeiffer Vacuum Gmbh Pompe à vide dans laquelle le support d'un palier à roulement a une rigidité et/ou un amortissement réglable(s)
JP7638074B2 (ja) * 2019-09-30 2025-03-03 エドワーズ株式会社 真空ポンプ

Also Published As

Publication number Publication date
CN121219497A (zh) 2025-12-26
KR20260022410A (ko) 2026-02-19
WO2024256055A1 (fr) 2024-12-19
EP4728198A1 (fr) 2026-04-22
FR3149936A1 (fr) 2024-12-20

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