FR81843E - Procédé de mesure de l'épaisseur de couches minces interférentielles - Google Patents

Procédé de mesure de l'épaisseur de couches minces interférentielles

Info

Publication number
FR81843E
FR81843E FR902521A FR902521A FR81843E FR 81843 E FR81843 E FR 81843E FR 902521 A FR902521 A FR 902521A FR 902521 A FR902521 A FR 902521A FR 81843 E FR81843 E FR 81843E
Authority
FR
France
Prior art keywords
measuring
thickness
interference layers
thin interference
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR902521A
Other languages
English (en)
Inventor
Pierre Lostis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1199051D priority Critical patent/FR1199051A/fr
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR902521A priority patent/FR81843E/fr
Application granted granted Critical
Publication of FR81843E publication Critical patent/FR81843E/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR902521A 1962-06-29 1962-06-29 Procédé de mesure de l'épaisseur de couches minces interférentielles Expired FR81843E (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1199051D FR1199051A (fr) 1962-06-29 1958-06-09 Procédé de mesure de l'épaisseur de couches minces interférentielles
FR902521A FR81843E (fr) 1962-06-29 1962-06-29 Procédé de mesure de l'épaisseur de couches minces interférentielles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR902521A FR81843E (fr) 1962-06-29 1962-06-29 Procédé de mesure de l'épaisseur de couches minces interférentielles

Publications (1)

Publication Number Publication Date
FR81843E true FR81843E (fr) 1963-11-15

Family

ID=8782209

Family Applications (2)

Application Number Title Priority Date Filing Date
FR1199051D Expired FR1199051A (fr) 1962-06-29 1958-06-09 Procédé de mesure de l'épaisseur de couches minces interférentielles
FR902521A Expired FR81843E (fr) 1962-06-29 1962-06-29 Procédé de mesure de l'épaisseur de couches minces interférentielles

Family Applications Before (1)

Application Number Title Priority Date Filing Date
FR1199051D Expired FR1199051A (fr) 1962-06-29 1958-06-09 Procédé de mesure de l'épaisseur de couches minces interférentielles

Country Status (1)

Country Link
FR (2) FR1199051A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3700366A1 (de) * 1987-01-08 1988-07-21 Leybold Ag Einrichtung zum ermitteln der jeweiligen dicke von sich veraendernden material-schichten auf einem substrat waehrend des beschichtungsvorgangs

Also Published As

Publication number Publication date
FR1199051A (fr) 1959-12-11

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