GB0910027D0 - Frequency tuning of disc resonator gyroscopes via resonatoe mass perturbation based on an identified model - Google Patents

Frequency tuning of disc resonator gyroscopes via resonatoe mass perturbation based on an identified model

Info

Publication number
GB0910027D0
GB0910027D0 GBGB0910027.2A GB0910027A GB0910027D0 GB 0910027 D0 GB0910027 D0 GB 0910027D0 GB 0910027 A GB0910027 A GB 0910027A GB 0910027 D0 GB0910027 D0 GB 0910027D0
Authority
GB
United Kingdom
Prior art keywords
mass
resonator
disc resonator
disc
frequency response
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB0910027.2A
Other versions
GB2460935A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing Co
University of California
University of California Berkeley
Original Assignee
Boeing Co
University of California
University of California Berkeley
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/481,247 external-priority patent/US8333112B2/en
Application filed by Boeing Co, University of California, University of California Berkeley filed Critical Boeing Co
Publication of GB0910027D0 publication Critical patent/GB0910027D0/en
Publication of GB2460935A publication Critical patent/GB2460935A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0075—Arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators
    • G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional [2D] vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
    • H03H3/0076—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients
    • H03H3/0077—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks for obtaining desired frequency or temperature coefficients by tuning of resonance frequency
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

The invention relates to tuning of disc resonator gyroscopes (DRGs) in order to reduce the frequency split between the Coriolis coupled modes by perturbing the mass distribution of the disc resonator based on an identified model. A method of tuning the resonator comprises measuring a frequency response matrix of the resonator 1702, the frequency response matrix having a plurality of inputs and a plurality of outputs, and the resonator having a plurality of coupled resonance modes. A structural mechanics model of the resonator is fitted to the frequency response matrix 1704 to identify parameters of the structural mechanics model including mass, damping and stiffness matrices, and their sensitivity to mass perturbation. The amount of mass perturbation to the resonator is then estimated to improve the degeneracy of the plurality of coupled resonance modes based on the identified parameters of the structural mechanics model. The mass perturbation may comprise removing mass by a laser ablation process, or may comprise adding mass by a mass deposition process. The DRG may comprise a microelectromechanical system (MEMS) disc resonator gyroscope.
GB0910027A 2008-06-10 2009-06-10 Frequency tuning of disc resonator gyroscopes via resonator mass perturbations based on an identified model Withdrawn GB2460935A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US6040008P 2008-06-10 2008-06-10
US12/481,247 US8333112B2 (en) 2008-06-10 2009-06-09 Frequency tuning of disc resonator gyroscopes via resonator mass perturbation based on an identified model

Publications (2)

Publication Number Publication Date
GB0910027D0 true GB0910027D0 (en) 2009-07-22
GB2460935A GB2460935A (en) 2009-12-23

Family

ID=40937222

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0910027A Withdrawn GB2460935A (en) 2008-06-10 2009-06-10 Frequency tuning of disc resonator gyroscopes via resonator mass perturbations based on an identified model

Country Status (1)

Country Link
GB (1) GB2460935A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112329333A (en) * 2020-10-15 2021-02-05 湖北工业大学 A Natural Frequency and Mode Shape Configuration Method Based on Added Mass
CN115824263A (en) * 2023-02-13 2023-03-21 中国船舶集团有限公司第七〇七研究所 Damping trimming method and system based on hemispherical resonator gyroscope

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201204355D0 (en) * 2012-03-13 2012-04-25 Atlantic Inertial Systems Ltd Vibratory ring structure
GB2567479B (en) 2017-10-13 2022-04-06 Atlantic Inertial Systems Ltd Angular rate sensors
GB2570732B (en) 2018-02-06 2023-01-11 Atlantic Inertial Systems Ltd Angular rate sensors

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7068126B2 (en) * 2004-03-04 2006-06-27 Discera Method and apparatus for frequency tuning of a micro-mechanical resonator
AU2004100725A4 (en) * 2004-08-25 2004-09-23 Timothy Coffey A seat
JP2006105614A (en) * 2004-09-30 2006-04-20 Seiko Epson Corp Vibrating gyroscope and manufacturing method of vibrating gyroscope
JP5036215B2 (en) * 2006-05-19 2012-09-26 日本碍子株式会社 Piezoelectric thin film resonator and method for adjusting resonance frequency of piezoelectric thin film resonator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112329333A (en) * 2020-10-15 2021-02-05 湖北工业大学 A Natural Frequency and Mode Shape Configuration Method Based on Added Mass
CN115824263A (en) * 2023-02-13 2023-03-21 中国船舶集团有限公司第七〇七研究所 Damping trimming method and system based on hemispherical resonator gyroscope

Also Published As

Publication number Publication date
GB2460935A (en) 2009-12-23

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)