GR1006618B - Μεθοδος για την κατασκευη περιοδικων δομων σε πολυμερη με διεργασιες πλασματος - Google Patents
Μεθοδος για την κατασκευη περιοδικων δομων σε πολυμερη με διεργασιες πλασματοςInfo
- Publication number
- GR1006618B GR1006618B GR20080100404A GR20080100404A GR1006618B GR 1006618 B GR1006618 B GR 1006618B GR 20080100404 A GR20080100404 A GR 20080100404A GR 20080100404 A GR20080100404 A GR 20080100404A GR 1006618 B GR1006618 B GR 1006618B
- Authority
- GR
- Greece
- Prior art keywords
- polymer
- plasma
- nanostructures
- periodic
- fabrication
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 230000000737 periodic effect Effects 0.000 title abstract 4
- 229920000642 polymer Polymers 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 4
- 239000002086 nanomaterial Substances 0.000 abstract 4
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 abstract 4
- 229960000909 sulfur hexafluoride Drugs 0.000 abstract 4
- 238000005530 etching Methods 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 238000005314 correlation function Methods 0.000 abstract 1
- 239000004205 dimethyl polysiloxane Substances 0.000 abstract 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 abstract 1
- 239000011261 inert gas Substances 0.000 abstract 1
- 229920000592 inorganic polymer Polymers 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052754 neon Inorganic materials 0.000 abstract 1
- 229910052756 noble gas Inorganic materials 0.000 abstract 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 abstract 1
- 229920000620 organic polymer Polymers 0.000 abstract 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 abstract 1
- 238000009832 plasma treatment Methods 0.000 abstract 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 abstract 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 abstract 1
- 239000004926 polymethyl methacrylate Substances 0.000 abstract 1
- 238000007619 statistical method Methods 0.000 abstract 1
- 229910052724 xenon Inorganic materials 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2023/00—Use of polyalkenes or derivatives thereof as moulding material
- B29K2023/04—Polymers of ethylene
- B29K2023/06—PE, i.e. polyethylene
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2025/00—Use of polymers of vinyl-aromatic compounds or derivatives thereof as moulding material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2033/00—Use of polymers of unsaturated acids or derivatives thereof as moulding material
- B29K2033/04—Polymers of esters
- B29K2033/12—Polymers of methacrylic acid esters, e.g. PMMA, i.e. polymethylmethacrylate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2067/00—Use of polyesters or derivatives thereof, as moulding material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2083/00—Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as moulding material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Αυτή η εφεύρεση παρουσιάζει μέθοδο για την κατασκευή περιοδικών νανοδομών στις επιφάνειες των πολυμερών με τη βοήθεια των διεργασιών πλάσματος, η οποία μέθοδος περιλαμβάνει τα ακόλουθα βήματα: (ί) παροχή ομοιογενούς οργανικού πολυμερούς υλικού (όπωςΡΜΜΑ, ή PET, ή PEEK, ή PS, ή ΡΕ, ή COC) ή ανόργανου πολυμερούς (όπως PDMS ή ORMOCER) (Ν) έκθεση του πολυμερούς σε πλάσμα εγχάραξης όπως οξυγόνο (Ο2) ή εξαφθοριούχο θείο (SFe) ή μίγμα οξυγόνου (Ο2) και εξαφθοριούχου θείου (SFe), ή μίγματα αερίων που εγχαράσσουν με αδρανή αέρια όπως οποιοδήποτε ευγενές αέριο (Ar, He, Ne, Xe). όπου οι συνθήκες επεξεργασίας πλάσματος συμπεριλαμβανομένων των τοιχωμάτων του αντιδραστήρα, του δυναμικού αυτοπόλωσης, της θερμοκρασίας των ηλεκτροδίων, του χρόνου επεξεργασίας, της πίεσης, και των φυσικοχημικών ιδιοτήτων του πολυμερούς επιλέγονται κατάλληλα για να παράγουν περιοδικές νανοδομές που έχουν λοφώδη δομή ομοιόμορφα χωρισμένων κατά διαστήματα και ταξινομημένων προεξοχών. Στατιστική ανάλυση των νανοδομών δείχνει ότι η συνάρτηση συσχέτισης υψών (HHCF) της επιφάνειας της νανοδομής, G(r), παρουσιάζει τουλάχιστον έναν περιοδικό μέγιστο και ένα ελάχιστο, και ο κυκλικά υπολογισμένος κατά μέσο όρο γρήγορος μετασχηματισμός κατά Φουριέ (FFT) παρουσιάζει ευδιάκριτο μέγιστο.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GR20080100404A GR1006618B (el) | 2008-06-13 | 2008-06-13 | Μεθοδος για την κατασκευη περιοδικων δομων σε πολυμερη με διεργασιες πλασματος |
| EP09762028.0A EP2300214B1 (en) | 2008-06-13 | 2009-06-15 | Method for the fabrication of periodic structures on polymers using plasma processes |
| US12/997,701 US8951428B2 (en) | 2008-06-13 | 2009-06-15 | Method for the fabrication of periodic structures on polymers using plasma processes |
| PCT/GR2009/000039 WO2009150479A1 (en) | 2008-06-13 | 2009-06-15 | Method for the fabrication of periodic structures on polymers using plasma processes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GR20080100404A GR1006618B (el) | 2008-06-13 | 2008-06-13 | Μεθοδος για την κατασκευη περιοδικων δομων σε πολυμερη με διεργασιες πλασματος |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GR1006618B true GR1006618B (el) | 2009-12-03 |
Family
ID=40717168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GR20080100404A GR1006618B (el) | 2008-06-13 | 2008-06-13 | Μεθοδος για την κατασκευη περιοδικων δομων σε πολυμερη με διεργασιες πλασματος |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8951428B2 (el) |
| EP (1) | EP2300214B1 (el) |
| GR (1) | GR1006618B (el) |
| WO (1) | WO2009150479A1 (el) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3141298A1 (en) | 2015-09-09 | 2017-03-15 | National Center For Scientific Research "Demokritos" | Polymeric microfluidic device for nucleic acid purification fabricated via plasma micro-nanotexturing |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201011335A (en) * | 2008-08-15 | 2010-03-16 | Omnivision Cdm Optics Inc | Anti-reflective surfaces and methods for making the same |
| KR101071778B1 (ko) * | 2008-10-29 | 2011-10-11 | 현대자동차주식회사 | 고분자 전해질 막에 나노 표면 구조를 형성하기 위한 연료전지용 전극막 접합체 제조 방법 |
| WO2013012942A2 (en) | 2011-07-20 | 2013-01-24 | The Board Of Trustees Of The Leland Stanford Junior University | Transparent electrochemical energy storage devices |
| US8691102B1 (en) * | 2012-12-31 | 2014-04-08 | Headway Technologies, Inc. | Method of manufacturing plasmon generator |
| US8945408B2 (en) | 2013-06-14 | 2015-02-03 | Tokyo Electron Limited | Etch process for reducing directed self assembly pattern defectivity |
| US9153457B2 (en) | 2013-06-14 | 2015-10-06 | Tokyo Electron Limited | Etch process for reducing directed self assembly pattern defectivity using direct current positioning |
| KR101787299B1 (ko) * | 2013-09-04 | 2017-10-18 | 도쿄엘렉트론가부시키가이샤 | 직류 중첩을 사용해서 유도 자기조립 패턴 결함률을 감소시키기 위한 에칭 프로세스 |
| GR1009056B (el) * | 2014-03-12 | 2017-06-23 | Εθνικο Κεντρο Ερευνας Φυσικων Επιστημων (Εκεφε) "Δημοκριτος" | Νανοδομημενα με ηλεκτρικες εκκενωσεις πλασματος υποστρωματα για επιλεκτικο εμπλουτισμο καρκινικων κυτταρων |
| GR1009057B (el) | 2014-06-03 | 2017-06-23 | Ευαγγελος Μιχαηλ Γογγολιδης | Μεθοδος παρασκευης χημικα σταθερων υποστρωματων με εγχαραξη πλασματος για απευθειας ομοιοπολικη ακινητοποιηση βιομοριων |
| US9666447B2 (en) * | 2014-10-28 | 2017-05-30 | Tokyo Electron Limited | Method for selectivity enhancement during dry plasma etching |
| CN104445052A (zh) * | 2014-12-05 | 2015-03-25 | 天津大学 | 氧等离子体刻蚀聚二甲基硅氧烷表面形貌的方法 |
| CN105129724A (zh) * | 2015-08-11 | 2015-12-09 | 中国科学院电子学研究所 | 表面增强拉曼散射衬底的制备方法 |
| KR101843622B1 (ko) | 2015-12-17 | 2018-03-30 | 성균관대학교산학협력단 | 블록 공중합체의 표면 경화 방법 |
| CN106115617B (zh) * | 2016-06-28 | 2018-12-11 | 北京随能科技有限公司 | 一种聚合物纳米柱阵列的无模板制备方法 |
| US10850441B2 (en) * | 2018-01-11 | 2020-12-01 | Mhi Health Devices, Inc. | Surfaces having tunable asperities and method |
| CN112437718B (zh) * | 2018-06-28 | 2022-07-12 | 应用材料公司 | 用于聚合物膜的表面处理方法 |
| GR1010186B (el) | 2019-09-25 | 2022-03-02 | Nanoplasmas Private Company, | Διαγνωστικη ψηφιδα για την αναλυση της παρουσιας βακτηριων σε ενα δειγμα |
| CN111146364B (zh) * | 2020-01-21 | 2021-03-30 | 福州大学 | 一种提高发光器件出光效率的微纳复合结构的制备方法 |
| JP7630550B2 (ja) * | 2023-05-01 | 2025-02-17 | Ｋｏｉｄｅ Ｊａｐａｎ株式会社 | 光学部材の製造方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5173146A (en) * | 1989-08-31 | 1992-12-22 | Toyoda Gosei Co., Ltd. | Plasma treatment method |
| WO2004024805A1 (de) * | 2002-09-09 | 2004-03-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur reduzierung der grenzflächenreflexion von kunststoffsubstraten sowie derart modifiziertes substrat und dessen verwendung |
| WO2007031799A1 (en) * | 2005-09-16 | 2007-03-22 | National Center For Scientific Research 'demokritos' | Method for the fabrication of high surface area ratio and high aspect ratio surfaces on substrates |
| WO2008064663A1 (de) * | 2006-11-30 | 2008-06-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur herstellung einer nanostruktur an einer kunststoffoberfläche |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR950009281B1 (ko) * | 1992-07-10 | 1995-08-18 | 현대전자산업주식회사 | 알루미늄 금속배선 형성방법 |
| AU4967499A (en) * | 1998-07-02 | 2000-01-24 | Massachusetts Institute Of Technology | Periodic porous and relief nanostructured articles |
| US6893705B2 (en) * | 2001-05-25 | 2005-05-17 | Massachusetts Institute Of Technology | Large area orientation of block copolymer microdomains in thin films |
| US6969568B2 (en) * | 2004-01-28 | 2005-11-29 | Freescale Semiconductor, Inc. | Method for etching a quartz layer in a photoresistless semiconductor mask |
| US7329871B2 (en) * | 2005-02-04 | 2008-02-12 | Stc.Unm | Plasmonic enhanced infrared detector element |
| JP2006302679A (ja) * | 2005-04-21 | 2006-11-02 | Seiko Epson Corp | 導電膜の形成方法、及び電子機器の製造方法 |
-
2008
- 2008-06-13 GR GR20080100404A patent/GR1006618B/el active IP Right Grant
-
2009
- 2009-06-15 EP EP09762028.0A patent/EP2300214B1/en not_active Not-in-force
- 2009-06-15 WO PCT/GR2009/000039 patent/WO2009150479A1/en not_active Ceased
- 2009-06-15 US US12/997,701 patent/US8951428B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5173146A (en) * | 1989-08-31 | 1992-12-22 | Toyoda Gosei Co., Ltd. | Plasma treatment method |
| WO2004024805A1 (de) * | 2002-09-09 | 2004-03-25 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur reduzierung der grenzflächenreflexion von kunststoffsubstraten sowie derart modifiziertes substrat und dessen verwendung |
| WO2007031799A1 (en) * | 2005-09-16 | 2007-03-22 | National Center For Scientific Research 'demokritos' | Method for the fabrication of high surface area ratio and high aspect ratio surfaces on substrates |
| WO2008064663A1 (de) * | 2006-11-30 | 2008-06-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur herstellung einer nanostruktur an einer kunststoffoberfläche |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3141298A1 (en) | 2015-09-09 | 2017-03-15 | National Center For Scientific Research "Demokritos" | Polymeric microfluidic device for nucleic acid purification fabricated via plasma micro-nanotexturing |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2009150479A4 (en) | 2010-03-04 |
| US20110165382A1 (en) | 2011-07-07 |
| EP2300214A1 (en) | 2011-03-30 |
| EP2300214B1 (en) | 2017-11-22 |
| US8951428B2 (en) | 2015-02-10 |
| WO2009150479A1 (en) | 2009-12-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PG | Patent granted |