ID16622A - Alat dan metode untuk melayani lapisan-lapisan bawah dalam kontener cairan - Google Patents

Alat dan metode untuk melayani lapisan-lapisan bawah dalam kontener cairan

Info

Publication number
ID16622A
ID16622A IDP971321A ID971321A ID16622A ID 16622 A ID16622 A ID 16622A ID P971321 A IDP971321 A ID P971321A ID 971321 A ID971321 A ID 971321A ID 16622 A ID16622 A ID 16622A
Authority
ID
Indonesia
Prior art keywords
tools
methods
fluid content
down layers
substrates
Prior art date
Application number
IDP971321A
Other languages
English (en)
Inventor
Martin Weber
Marc Meuris
Ingrid Cornelissen
Original Assignee
Steag Micro Tech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19652526A external-priority patent/DE19652526C2/de
Application filed by Steag Micro Tech Gmbh filed Critical Steag Micro Tech Gmbh
Publication of ID16622A publication Critical patent/ID16622A/id

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0416—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Laminated Bodies (AREA)
  • Packaging Frangible Articles (AREA)
  • Chemically Coating (AREA)
IDP971321A 1996-04-22 1997-04-21 Alat dan metode untuk melayani lapisan-lapisan bawah dalam kontener cairan ID16622A (id)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19615969 1996-04-22
DE19652526A DE19652526C2 (de) 1996-04-22 1996-12-17 Transporteinrichtung für Substrate und Verfahren zum Beladen der Transporteinrichtung mit Substraten

Publications (1)

Publication Number Publication Date
ID16622A true ID16622A (id) 1997-10-23

Family

ID=26025010

Family Applications (1)

Application Number Title Priority Date Filing Date
IDP971321A ID16622A (id) 1996-04-22 1997-04-21 Alat dan metode untuk melayani lapisan-lapisan bawah dalam kontener cairan

Country Status (7)

Country Link
EP (1) EP0897593B1 (id)
JP (1) JP3290667B2 (id)
KR (1) KR100310378B1 (id)
AT (1) ATE206244T1 (id)
ID (1) ID16622A (id)
TW (1) TW538442B (id)
WO (1) WO1997040523A1 (id)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108957947A (zh) * 2017-05-18 2018-12-07 苏州光越微纳科技有限公司 全自动量产型软膜复制设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE33341E (en) * 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus
JPS60106135A (ja) * 1983-11-15 1985-06-11 Fujitsu Ltd 乾燥装置
US4987407A (en) 1988-04-22 1991-01-22 Asq. Boats, Inc. Wafer interleaving with electro-optical safety features
US5383484A (en) * 1993-07-16 1995-01-24 Cfmt, Inc. Static megasonic cleaning system for cleaning objects
DE4413077C2 (de) * 1994-04-15 1997-02-06 Steag Micro Tech Gmbh Verfahren und Vorrichtung zur chemischen Behandlung von Substraten

Also Published As

Publication number Publication date
JPH11510964A (ja) 1999-09-21
KR100310378B1 (ko) 2001-11-22
ATE206244T1 (de) 2001-10-15
EP0897593A1 (de) 1999-02-24
KR20000010552A (ko) 2000-02-15
EP0897593B1 (de) 2001-09-26
WO1997040523A1 (de) 1997-10-30
JP3290667B2 (ja) 2002-06-10
TW538442B (en) 2003-06-21

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