ID21276A - Kotak yang bersih - Google Patents
Kotak yang bersihInfo
- Publication number
- ID21276A ID21276A IDP981465A ID981465A ID21276A ID 21276 A ID21276 A ID 21276A ID P981465 A IDP981465 A ID P981465A ID 981465 A ID981465 A ID 981465A ID 21276 A ID21276 A ID 21276A
- Authority
- ID
- Indonesia
- Prior art keywords
- clean box
- clean
- box
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
- H10P72/19—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
- H10P72/1924—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
- H10P72/1926—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
- H10P72/1928—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier characterised by the presence of antistatic elements
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9325486A JPH11145272A (ja) | 1997-11-11 | 1997-11-11 | クリーンボックス |
| CA002264226A CA2264226A1 (en) | 1997-11-11 | 1999-03-03 | Clean box |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ID21276A true ID21276A (id) | 1999-05-12 |
Family
ID=32070460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IDP981465A ID21276A (id) | 1997-11-11 | 1998-11-09 | Kotak yang bersih |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP0917183A3 (id) |
| JP (1) | JPH11145272A (id) |
| CN (1) | CN1217571A (id) |
| AU (1) | AU9144998A (id) |
| CA (1) | CA2264226A1 (id) |
| ID (1) | ID21276A (id) |
| SG (1) | SG75893A1 (id) |
| TW (1) | TW396489B (id) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI334399B (en) * | 2003-11-18 | 2010-12-11 | Net Plastic Inc | Hermetically sealed container for large-sized precision sheet (semi-)product |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03228349A (ja) * | 1990-02-02 | 1991-10-09 | Nec Corp | 半導体ウェハーケース |
| US5320225A (en) * | 1993-04-23 | 1994-06-14 | Hrc Products | Apparatus and method for securely carrying a substrate |
| JPH0758192A (ja) * | 1993-08-12 | 1995-03-03 | Nikon Corp | 基板収納ケース |
| EP0692817B1 (en) * | 1994-07-15 | 1997-09-24 | Fluoroware, Inc. | Wafer carrier |
| JPH08288377A (ja) * | 1995-04-18 | 1996-11-01 | Sony Corp | ウェーハ収納体 |
-
1997
- 1997-11-11 JP JP9325486A patent/JPH11145272A/ja active Pending
-
1998
- 1998-11-06 TW TW087118550A patent/TW396489B/zh not_active IP Right Cessation
- 1998-11-06 SG SG1998004568A patent/SG75893A1/en unknown
- 1998-11-09 ID IDP981465A patent/ID21276A/id unknown
- 1998-11-10 EP EP98203782A patent/EP0917183A3/en not_active Withdrawn
- 1998-11-10 AU AU91449/98A patent/AU9144998A/en not_active Abandoned
- 1998-11-11 CN CN98123311.2A patent/CN1217571A/zh active Pending
-
1999
- 1999-03-03 CA CA002264226A patent/CA2264226A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| TW396489B (en) | 2000-07-01 |
| AU9144998A (en) | 1999-06-03 |
| SG75893A1 (en) | 2000-10-24 |
| CN1217571A (zh) | 1999-05-26 |
| EP0917183A2 (en) | 1999-05-19 |
| JPH11145272A (ja) | 1999-05-28 |
| CA2264226A1 (en) | 2000-09-03 |
| EP0917183A3 (en) | 2002-04-03 |
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