ID21276A - Kotak yang bersih - Google Patents

Kotak yang bersih

Info

Publication number
ID21276A
ID21276A IDP981465A ID981465A ID21276A ID 21276 A ID21276 A ID 21276A ID P981465 A IDP981465 A ID P981465A ID 981465 A ID981465 A ID 981465A ID 21276 A ID21276 A ID 21276A
Authority
ID
Indonesia
Prior art keywords
clean box
clean
box
Prior art date
Application number
IDP981465A
Other languages
English (en)
Inventor
Minoru Yoshida
Takeshi Doi
Original Assignee
Innotech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innotech Corp filed Critical Innotech Corp
Publication of ID21276A publication Critical patent/ID21276A/id

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/19Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers
    • H10P72/1924Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control
    • H10P72/1926Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier
    • H10P72/1928Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier characterised by the presence of antistatic elements
IDP981465A 1997-11-11 1998-11-09 Kotak yang bersih ID21276A (id)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9325486A JPH11145272A (ja) 1997-11-11 1997-11-11 クリーンボックス
CA002264226A CA2264226A1 (en) 1997-11-11 1999-03-03 Clean box

Publications (1)

Publication Number Publication Date
ID21276A true ID21276A (id) 1999-05-12

Family

ID=32070460

Family Applications (1)

Application Number Title Priority Date Filing Date
IDP981465A ID21276A (id) 1997-11-11 1998-11-09 Kotak yang bersih

Country Status (8)

Country Link
EP (1) EP0917183A3 (id)
JP (1) JPH11145272A (id)
CN (1) CN1217571A (id)
AU (1) AU9144998A (id)
CA (1) CA2264226A1 (id)
ID (1) ID21276A (id)
SG (1) SG75893A1 (id)
TW (1) TW396489B (id)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI334399B (en) * 2003-11-18 2010-12-11 Net Plastic Inc Hermetically sealed container for large-sized precision sheet (semi-)product

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03228349A (ja) * 1990-02-02 1991-10-09 Nec Corp 半導体ウェハーケース
US5320225A (en) * 1993-04-23 1994-06-14 Hrc Products Apparatus and method for securely carrying a substrate
JPH0758192A (ja) * 1993-08-12 1995-03-03 Nikon Corp 基板収納ケース
EP0692817B1 (en) * 1994-07-15 1997-09-24 Fluoroware, Inc. Wafer carrier
JPH08288377A (ja) * 1995-04-18 1996-11-01 Sony Corp ウェーハ収納体

Also Published As

Publication number Publication date
TW396489B (en) 2000-07-01
AU9144998A (en) 1999-06-03
SG75893A1 (en) 2000-10-24
CN1217571A (zh) 1999-05-26
EP0917183A2 (en) 1999-05-19
JPH11145272A (ja) 1999-05-28
CA2264226A1 (en) 2000-09-03
EP0917183A3 (en) 2002-04-03

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