IL102040A - Miniature tuner in millimeter waves and in the microwave - Google Patents

Miniature tuner in millimeter waves and in the microwave

Info

Publication number: IL102040A
Authority: IL; Israel
Prior art keywords: transmission line; miniature; stub; electrostatically actuated; tunable circuit
Prior art date: 1991-05-31

Application number

IL10204092A

Other languages

English (en)

Hebrew (he)

Other versions

IL102040A0 (en

Original Assignee

Hughes Aircraft Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-05-31

Filing date

1992-05-28

Publication date

1995-11-27

1992-05-28 Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co

1992-12-30 Publication of IL102040A0 publication Critical patent/IL102040A0/xx

1995-11-27 Publication of IL102040A publication Critical patent/IL102040A/en

Links

230000005540 biological transmission Effects 0.000 claims description 79
239000000758 substrate Substances 0.000 claims description 30
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 17
239000010931 gold Substances 0.000 claims description 17
229910052737 gold Inorganic materials 0.000 claims description 17
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 8
239000004020 conductor Substances 0.000 claims description 8
230000005686 electrostatic field Effects 0.000 claims description 8
239000000463 material Substances 0.000 claims description 8
229910052719 titanium Inorganic materials 0.000 claims description 8
239000010936 titanium Substances 0.000 claims description 8
239000010409 thin film Substances 0.000 claims description 7
230000000694 effects Effects 0.000 claims description 5
JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims description 2
229910052594 sapphire Inorganic materials 0.000 claims description 2
239000010980 sapphire Substances 0.000 claims description 2
238000000034 method Methods 0.000 description 10
238000004519 manufacturing process Methods 0.000 description 6
229920002120 photoresistant polymer Polymers 0.000 description 6
238000005530 etching Methods 0.000 description 5
230000000873 masking effect Effects 0.000 description 4
238000005516 engineering process Methods 0.000 description 3
238000001465 metallisation Methods 0.000 description 3
238000012545 processing Methods 0.000 description 3
239000004065 semiconductor Substances 0.000 description 3
238000007747 plating Methods 0.000 description 2
229910052710 silicon Inorganic materials 0.000 description 2
239000010703 silicon Substances 0.000 description 2
244000261422 Lysimachia clethroides Species 0.000 description 1
108010076504 Protein Sorting Signals Proteins 0.000 description 1
238000000151 deposition Methods 0.000 description 1
230000008021 deposition Effects 0.000 description 1
238000013461 design Methods 0.000 description 1
239000003989 dielectric material Substances 0.000 description 1
230000005684 electric field Effects 0.000 description 1
238000009713 electroplating Methods 0.000 description 1
230000002708 enhancing effect Effects 0.000 description 1
230000008020 evaporation Effects 0.000 description 1
238000001704 evaporation Methods 0.000 description 1
239000010408 film Substances 0.000 description 1
238000003780 insertion Methods 0.000 description 1
230000037431 insertion Effects 0.000 description 1
238000005459 micromachining Methods 0.000 description 1
238000003801 milling Methods 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
230000005855 radiation Effects 0.000 description 1
229910052703 rhodium Inorganic materials 0.000 description 1
239000010948 rhodium Substances 0.000 description 1
MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
238000004904 shortening Methods 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
229910001220 stainless steel Inorganic materials 0.000 description 1
239000010935 stainless steel Substances 0.000 description 1
239000000126 substance Substances 0.000 description 1
238000013519 translation Methods 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/04—Coupling devices of the waveguide type with variable factor of coupling

Landscapes

Control Of Motors That Do Not Use Commutators (AREA)
Waveguides (AREA)
Waveguide Connection Structure (AREA)

IL10204092A 1991-05-31 1992-05-28 Miniature tuner in millimeter waves and in the microwave IL102040A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US07/708,955 US5164688A (en)	1991-05-31	1991-05-31	Miniature microwave and millimeter wave tuner

Publications (2)

Publication Number	Publication Date
IL102040A0 IL102040A0 (en)	1992-12-30
IL102040A true IL102040A (en)	1995-11-27

Family

ID=24847863

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL10204092A IL102040A (en)	1991-05-31	1992-05-28	Miniature tuner in millimeter waves and in the microwave

Country Status (5)

Country	Link
US (1)	US5164688A (de)
EP (1)	EP0516174B1 (de)
JP (1)	JPH07105651B2 (de)
DE (1)	DE69222977T2 (de)
IL (1)	IL102040A (de)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2704357B1 (fr) *	1993-04-20	1995-06-02	Thomson Csf	Eléments électroniques intégrés à caractéristiques électriques variables, en particulier pour hyperfréquences.
US5619061A (en) *	1993-07-27	1997-04-08	Texas Instruments Incorporated	Micromechanical microwave switching
US5467068A (en) *	1994-07-07	1995-11-14	Hewlett-Packard Company	Micromachined bi-material signal switch
US5757319A (en) *	1996-10-29	1998-05-26	Hughes Electronics Corporation	Ultrabroadband, adaptive phased array antenna systems using microelectromechanical electromagnetic components
US5808527A (en) *	1996-12-21	1998-09-15	Hughes Electronics Corporation	Tunable microwave network using microelectromechanical switches
US6043727A (en) *	1998-05-15	2000-03-28	Hughes Electronics Corporation	Reconfigurable millimeterwave filter using stubs and stub extensions selectively coupled using voltage actuated micro-electro-mechanical switches
DE59911153D1 (de)	1998-09-25	2004-12-30	Siemens Ag	Programmierbares mobilfunk-endgerät
US6724125B2 (en)	1999-03-30	2004-04-20	Massachusetts Institute Of Technology	Methods and apparatus for diffractive optical processing using an actuatable structure
US6329738B1 (en)	1999-03-30	2001-12-11	Massachusetts Institute Of Technology	Precision electrostatic actuation and positioning
US6215644B1 (en)	1999-09-09	2001-04-10	Jds Uniphase Inc.	High frequency tunable capacitors
US6229684B1 (en)	1999-12-15	2001-05-08	Jds Uniphase Inc.	Variable capacitor and associated fabrication method
US6373682B1 (en)	1999-12-15	2002-04-16	Mcnc	Electrostatically controlled variable capacitor
US6496351B2 (en)	1999-12-15	2002-12-17	Jds Uniphase Inc.	MEMS device members having portions that contact a substrate and associated methods of operating
US6700299B2 (en) *	2000-08-09	2004-03-02	Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V.	Assembly having variable capacitance
US6485273B1 (en)	2000-09-01	2002-11-26	Mcnc	Distributed MEMS electrostatic pumping devices
US6590267B1 (en)	2000-09-14	2003-07-08	Mcnc	Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6377438B1 (en)	2000-10-23	2002-04-23	Mcnc	Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US20020167695A1 (en) *	2001-03-02	2002-11-14	Senturia Stephen D.	Methods and apparatus for diffractive optical processing using an actuatable structure
US7046410B2 (en)	2001-10-11	2006-05-16	Polychromix, Inc.	Actuatable diffractive optical processor
EP1540839A4 (de) *	2002-08-20	2008-01-02	Lockheed Corp	Verfahren und vorrichtung zum modifizieren eines funkfrequenzgangs
CA2571829A1 (en)	2004-07-23	2006-02-02	Afa Controls, Llc	Methods of operating microvalve assemblies and related structures and related devices
JP2006287619A (ja) *	2005-03-31	2006-10-19	Tdk Corp	分布定数回路及びインピーダンス調整方法
WO2007089770A2 (en) *	2006-01-31	2007-08-09	Polychromix Corporation	Hand-held ir spectrometer with a fixed grating and a diffractive mems-array
TW200940437A (en) *	2008-03-27	2009-10-01	Sunonwealth Electr Mach Ind Co	Miniaturized motor
US9326819B2 (en) *	2009-04-15	2016-05-03	Medwaves, Inc.	Electrically tunable tissue ablation system and method
US10079135B1 (en)	2018-04-18	2018-09-18	Consolidated Nuclear Security, LLC	Gas-sealed stub tuner for microwave systems

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3963998A (en) *	1975-03-13	1976-06-15	Rca Corporation	Variable bandwidth tunable directional filter
US4096453A (en) *	1977-05-19	1978-06-20	Gte Automatic Electric Laboratories Incorporated	Double-mode tuned microwave oscillator
US4472690A (en) *	1982-06-14	1984-09-18	Rockwell International Corporation	Universal transistor characteristic matching apparatus
US4754185A (en) *	1986-10-16	1988-06-28	American Telephone And Telegraph Company, At&T Bell Laboratories	Micro-electrostatic motor
US4716389A (en) *	1986-10-20	1987-12-29	Honeywell Inc.	Millimeter wave microstrip surface mounted attenuator
US4906956A (en) *	1987-10-05	1990-03-06	Menlo Industries, Inc.	On-chip tuning for integrated circuit using heat responsive element
US4922253A (en) *	1989-01-03	1990-05-01	Westinghouse Electric Corp.	High attenuation broadband high speed RF shutter and method of making same
US5043043A (en) *	1990-06-22	1991-08-27	Massachusetts Institute Of Technology	Method for fabricating side drive electrostatic micromotor

1991
- 1991-05-31 US US07/708,955 patent/US5164688A/en not_active Expired - Lifetime
1992
- 1992-05-28 IL IL10204092A patent/IL102040A/en active IP Right Grant
- 1992-05-29 EP EP92109139A patent/EP0516174B1/de not_active Expired - Lifetime
- 1992-05-29 DE DE69222977T patent/DE69222977T2/de not_active Expired - Lifetime
- 1992-06-01 JP JP4140756A patent/JPH07105651B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US5164688A (en)	1992-11-17
IL102040A0 (en)	1992-12-30
EP0516174A3 (en)	1994-06-08
DE69222977D1 (de)	1997-12-11
EP0516174B1 (de)	1997-11-05
DE69222977T2 (de)	1998-06-10
EP0516174A2 (de)	1992-12-02
JPH05199017A (ja)	1993-08-06
JPH07105651B2 (ja)	1995-11-13

Legal Events

Date	Code	Title	Description
1996-05-14	FF	Patent granted

Publication	Publication Date	Title
US5164688A (en)	1992-11-17	Miniature microwave and millimeter wave tuner
US5175521A (en)	1992-12-29	Miniature dynamically tunable microwave and millimeter wave device
EP0517232B1 (de)	1999-01-13	Verbesserte Miniatur-Abstimmschaltung für Mikrowellen und Millimeterwellen
US6784766B2 (en)	2004-08-31	MEMS tunable filters
US8174341B2 (en)	2012-05-08	Thin film based split resonator tunable metamaterial
US6218911B1 (en)	2001-04-17	Planar airbridge RF terminal MEMS switch
US8436698B2 (en)	2013-05-07	MEMS-based tunable filter
US6232847B1 (en)	2001-05-15	Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology
US7085121B2 (en)	2006-08-01	Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
US4661884A (en)	1987-04-28	Miniature, multiple layer, side mounting high frequency blocking capacitor
US8242862B2 (en)	2012-08-14	Tunable bandpass filter
US5543765A (en)	1996-08-06	Integrated electronic elements with variable electrical characteristics, especially for microwave frequencies
EP1385189A2 (de)	2004-01-28	Schalter
US10298193B2 (en)	2019-05-21	Integrated microelectromechanical system devices and methods for making the same
JPS62254501A (ja)	1987-11-06	ストリツプラインフイルタ
US7157989B2 (en)	2007-01-02	Inline waveguide phase shifter with electromechanical means to change the physical dimension of the waveguide
US20140152400A1 (en)	2014-06-05	Novel phase shifters and tuning elements
KR100558435B1 (ko)	2006-03-10	마이크로 엑츄에이터와, 이를 구비한 가변 광감쇄기 및 그제조방법
US7283347B2 (en)	2007-10-16	Low cost digital variable capacitor
EP1573769B1 (de)	2007-02-14	Mikroelektromechanischer hf-schalter
US7405637B1 (en)	2008-07-29	Miniature tunable filter having an electrostatically adjustable membrane
DD248454A1 (de)	1987-08-05	Miniaturisiertes elektromagnetisches schaltelement
TWI535104B (zh)	2016-05-21	新穎相移器及調諧元件
JPS6125313A (ja)	1986-02-04	ステツプ可変減衰器
WO2014031920A1 (en)	2014-02-27	Switches for use in microelectromechanical and other systems, and processes for making same