IL102123A - Miniature circuit Microwave and millimeter wave adjustment - Google Patents

Miniature circuit Microwave and millimeter wave adjustment

Info

Publication number: IL102123A
Authority: IL; Israel
Prior art keywords: circuit; miniature; circuit means; electrostatically actuated; transmission line
Prior art date: 1991-06-07

Application number

IL10212392A

Other languages

English (en)

Hebrew (he)

Other versions

IL102123A0 (en

Original Assignee

Hughes Aircraft Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1991-06-07

Filing date

1992-06-05

Publication date

1994-08-26

1992-06-05 Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co

1993-01-14 Publication of IL102123A0 publication Critical patent/IL102123A0/xx

1994-08-26 Publication of IL102123A publication Critical patent/IL102123A/en

Links

230000005540 biological transmission Effects 0.000 claims description 77
239000000758 substrate Substances 0.000 claims description 34
239000010409 thin film Substances 0.000 claims description 10
230000005686 electrostatic field Effects 0.000 claims description 6
JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 4
229910001218 Gallium arsenide Inorganic materials 0.000 claims description 4
230000000694 effects Effects 0.000 claims description 4
238000002955 isolation Methods 0.000 claims description 4
239000004020 conductor Substances 0.000 claims description 3
230000005684 electric field Effects 0.000 claims description 2
229910052594 sapphire Inorganic materials 0.000 claims description 2
239000010980 sapphire Substances 0.000 claims description 2
229910052738 indium Inorganic materials 0.000 claims 1
APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
239000010931 gold Substances 0.000 description 15
229910052737 gold Inorganic materials 0.000 description 15
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 14
238000000034 method Methods 0.000 description 12
239000003570 air Substances 0.000 description 10
239000000463 material Substances 0.000 description 9
RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 7
239000010936 titanium Substances 0.000 description 7
229910052719 titanium Inorganic materials 0.000 description 7
229920002120 photoresistant polymer Polymers 0.000 description 6
238000005530 etching Methods 0.000 description 5
238000004519 manufacturing process Methods 0.000 description 5
230000000873 masking effect Effects 0.000 description 4
230000008569 process Effects 0.000 description 4
238000012545 processing Methods 0.000 description 4
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
230000008901 benefit Effects 0.000 description 3
230000008878 coupling Effects 0.000 description 3
238000010168 coupling process Methods 0.000 description 3
238000005859 coupling reaction Methods 0.000 description 3
238000005516 engineering process Methods 0.000 description 3
238000001465 metallisation Methods 0.000 description 3
239000004065 semiconductor Substances 0.000 description 3
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
238000013459 approach Methods 0.000 description 2
230000002238 attenuated effect Effects 0.000 description 2
238000013461 design Methods 0.000 description 2
230000008020 evaporation Effects 0.000 description 2
238000001704 evaporation Methods 0.000 description 2
229910052751 metal Inorganic materials 0.000 description 2
239000002184 metal Substances 0.000 description 2
230000003071 parasitic effect Effects 0.000 description 2
229910052710 silicon Inorganic materials 0.000 description 2
239000010703 silicon Substances 0.000 description 2
VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
108010076504 Protein Sorting Signals Proteins 0.000 description 1
230000002411 adverse Effects 0.000 description 1
239000012080 ambient air Substances 0.000 description 1
230000008859 change Effects 0.000 description 1
238000000151 deposition Methods 0.000 description 1
230000008021 deposition Effects 0.000 description 1
239000003989 dielectric material Substances 0.000 description 1
230000002708 enhancing effect Effects 0.000 description 1
239000010408 film Substances 0.000 description 1
-1 for example Substances 0.000 description 1
150000002343 gold Chemical class 0.000 description 1
238000003780 insertion Methods 0.000 description 1
230000037431 insertion Effects 0.000 description 1
238000005459 micromachining Methods 0.000 description 1
238000003801 milling Methods 0.000 description 1
238000012986 modification Methods 0.000 description 1
230000004048 modification Effects 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
238000007747 plating Methods 0.000 description 1
230000005855 radiation Effects 0.000 description 1
229910052703 rhodium Inorganic materials 0.000 description 1
239000010948 rhodium Substances 0.000 description 1
MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
235000012239 silicon dioxide Nutrition 0.000 description 1
239000000377 silicon dioxide Substances 0.000 description 1
238000004544 sputter deposition Methods 0.000 description 1
229910001220 stainless steel Inorganic materials 0.000 description 1
239000010935 stainless steel Substances 0.000 description 1
239000000126 substance Substances 0.000 description 1
229910052715 tantalum Inorganic materials 0.000 description 1
GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
238000013519 translation Methods 0.000 description 1
238000007740 vapor deposition Methods 0.000 description 1

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/04—Coupling devices of the waveguide type with variable factor of coupling
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
- H02N1/002—Electrostatic motors
- H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path

Landscapes

Non-Reversible Transmitting Devices (AREA)
Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Micromachines (AREA)
Control Of Motors That Do Not Use Commutators (AREA)
Waveguides (AREA)

IL10212392A 1991-06-07 1992-06-05 Miniature circuit Microwave and millimeter wave adjustment IL102123A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US07/712,028 US5168249A (en)	1991-06-07	1991-06-07	Miniature microwave and millimeter wave tunable circuit

Publications (2)

Publication Number	Publication Date
IL102123A0 IL102123A0 (en)	1993-01-14
IL102123A true IL102123A (en)	1994-08-26

Family

ID=24860504

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL10212392A IL102123A (en)	1991-06-07	1992-06-05	Miniature circuit Microwave and millimeter wave adjustment

Country Status (5)

Country	Link
US (1)	US5168249A (de)
EP (1)	EP0517232B1 (de)
JP (1)	JPH0795647B2 (de)
DE (1)	DE69228146T2 (de)
IL (1)	IL102123A (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5194833A (en) *	1991-11-15	1993-03-16	Motorola, Inc.	Airbridge compensated microwave conductors
FR2704357B1 (fr) *	1993-04-20	1995-06-02	Thomson Csf	Eléments électroniques intégrés à caractéristiques électriques variables, en particulier pour hyperfréquences.
US5619061A (en) *	1993-07-27	1997-04-08	Texas Instruments Incorporated	Micromechanical microwave switching
US5467068A (en) *	1994-07-07	1995-11-14	Hewlett-Packard Company	Micromachined bi-material signal switch
US5901031A (en) *	1995-02-01	1999-05-04	Murata Manufacturing Co., Ltd.	Variable capacitor
US5578976A (en) *	1995-06-22	1996-11-26	Rockwell International Corporation	Micro electromechanical RF switch
US5757319A (en) *	1996-10-29	1998-05-26	Hughes Electronics Corporation	Ultrabroadband, adaptive phased array antenna systems using microelectromechanical electromagnetic components
US5994982A (en) *	1997-07-18	1999-11-30	Trw Inc.	MEMS switched resonators for VCO applications
KR100252009B1 (ko) *	1997-09-25	2000-04-15	윤종용	마이크로 진동구조물과 그 공진주파수 조절방법 및 이를 이용한 마이크로 엑츄에이터
US6037719A (en) *	1998-04-09	2000-03-14	Hughes Electronics Corporation	Matrix-addressed display having micromachined electromechanical switches
US6724125B2 (en)	1999-03-30	2004-04-20	Massachusetts Institute Of Technology	Methods and apparatus for diffractive optical processing using an actuatable structure
US6329738B1 (en)	1999-03-30	2001-12-11	Massachusetts Institute Of Technology	Precision electrostatic actuation and positioning
KR100320190B1 (ko) *	1999-05-17	2002-01-10	구자홍	고주파 스위치의 구조 및 그 제조방법
US6143997A (en) *	1999-06-04	2000-11-07	The Board Of Trustees Of The University Of Illinois	Low actuation voltage microelectromechanical device and method of manufacture
US6218911B1 (en) *	1999-07-13	2001-04-17	Trw Inc.	Planar airbridge RF terminal MEMS switch
US6215644B1 (en)	1999-09-09	2001-04-10	Jds Uniphase Inc.	High frequency tunable capacitors
US6229684B1 (en)	1999-12-15	2001-05-08	Jds Uniphase Inc.	Variable capacitor and associated fabrication method
US6373682B1 (en)	1999-12-15	2002-04-16	Mcnc	Electrostatically controlled variable capacitor
US6496351B2 (en)	1999-12-15	2002-12-17	Jds Uniphase Inc.	MEMS device members having portions that contact a substrate and associated methods of operating
DE10009453A1 (de) *	2000-02-29	2002-04-04	Daimler Chrysler Ag	Phasenschieber und Anordnung aus mehreren Phasenschiebern
US6485273B1 (en)	2000-09-01	2002-11-26	Mcnc	Distributed MEMS electrostatic pumping devices
US6590267B1 (en)	2000-09-14	2003-07-08	Mcnc	Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
US6377438B1 (en)	2000-10-23	2002-04-23	Mcnc	Hybrid microelectromechanical system tunable capacitor and associated fabrication methods
US20020167695A1 (en) *	2001-03-02	2002-11-14	Senturia Stephen D.	Methods and apparatus for diffractive optical processing using an actuatable structure
US7046410B2 (en)	2001-10-11	2006-05-16	Polychromix, Inc.	Actuatable diffractive optical processor
US6919784B2 (en)	2001-10-18	2005-07-19	The Board Of Trustees Of The University Of Illinois	High cycle MEMS device
US6717496B2 (en)	2001-11-13	2004-04-06	The Board Of Trustees Of The University Of Illinois	Electromagnetic energy controlled low actuation voltage microelectromechanical switch
WO2003052781A1 (en) *	2001-12-14	2003-06-26	Midwest Research Institute	Tunable circuit for tunable capacitor devices
US6998946B2 (en)	2002-09-17	2006-02-14	The Board Of Trustees Of The University Of Illinois	High cycle deflection beam MEMS devices
CA2571829A1 (en)	2004-07-23	2006-02-02	Afa Controls, Llc	Methods of operating microvalve assemblies and related structures and related devices
WO2007089770A2 (en) *	2006-01-31	2007-08-09	Polychromix Corporation	Hand-held ir spectrometer with a fixed grating and a diffractive mems-array
CN103354429B (zh) *	2013-03-12	2015-09-16	北京纳米能源与系统研究所	一种滑动摩擦纳米发电机及发电方法
CN108933544B (zh) *	2018-07-02	2024-03-12	青岛天工智造创新科技有限公司	压缩装置以及压缩装置控制方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4096453A (en) *	1977-05-19	1978-06-20	Gte Automatic Electric Laboratories Incorporated	Double-mode tuned microwave oscillator
US4472690A (en) *	1982-06-14	1984-09-18	Rockwell International Corporation	Universal transistor characteristic matching apparatus
US4716389A (en) *	1986-10-20	1987-12-29	Honeywell Inc.	Millimeter wave microstrip surface mounted attenuator
US4906956A (en) *	1987-10-05	1990-03-06	Menlo Industries, Inc.	On-chip tuning for integrated circuit using heat responsive element
US4922253A (en) *	1989-01-03	1990-05-01	Westinghouse Electric Corp.	High attenuation broadband high speed RF shutter and method of making same
JPH0691754B2 (ja) *	1989-04-24	1994-11-14	新技術事業団	フィルムを利用した接触型静電アクチュエータ
US5043043A (en) *	1990-06-22	1991-08-27	Massachusetts Institute Of Technology	Method for fabricating side drive electrostatic micromotor

1991
- 1991-06-07 US US07/712,028 patent/US5168249A/en not_active Expired - Lifetime
1992
- 1992-06-05 EP EP92109507A patent/EP0517232B1/de not_active Expired - Lifetime
- 1992-06-05 IL IL10212392A patent/IL102123A/en not_active IP Right Cessation
- 1992-06-05 DE DE69228146T patent/DE69228146T2/de not_active Expired - Lifetime
- 1992-06-08 JP JP4147645A patent/JPH0795647B2/ja not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US5168249A (en)	1992-12-01
EP0517232A3 (en)	1994-05-18
IL102123A0 (en)	1993-01-14
JPH05315816A (ja)	1993-11-26
DE69228146T2 (de)	1999-05-20
EP0517232A2 (de)	1992-12-09
EP0517232B1 (de)	1999-01-13
DE69228146D1 (de)	1999-02-25
JPH0795647B2 (ja)	1995-10-11

Legal Events

Date	Code	Title	Description
1998-12-06	KB	Patent renewed
2003-03-12	MM9K	Patent not in force due to non-payment of renewal fees

Publication	Publication Date	Title
US5168249A (en)	1992-12-01	Miniature microwave and millimeter wave tunable circuit
US5175521A (en)	1992-12-29	Miniature dynamically tunable microwave and millimeter wave device
EP0516174B1 (de)	1997-11-05	Miniaturisierter Mikrowellen- und Millimeterwellen-Tuner
US7085121B2 (en)	2006-08-01	Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
US6218911B1 (en)	2001-04-17	Planar airbridge RF terminal MEMS switch
US6232847B1 (en)	2001-05-15	Trimmable singleband and tunable multiband integrated oscillator using micro-electromechanical system (MEMS) technology
US6898450B2 (en)	2005-05-24	High temperature superconducting tunable filter with an adjustable capacitance gap
US6486511B1 (en)	2002-11-26	Solid state RF switch with high cutoff frequency
US5696662A (en)	1997-12-09	Electrostatically operated micromechanical capacitor
US20050068129A1 (en)	2005-03-31	1:N MEM switch module
US6873223B2 (en)	2005-03-29	MEMS millimeter wave switches
US7283347B2 (en)	2007-10-16	Low cost digital variable capacitor
US20140152400A1 (en)	2014-06-05	Novel phase shifters and tuning elements
US20040229440A1 (en)	2004-11-18	Micro-actuator, variable optical attenuator provided with micro-actuator and method for manufacturing the same
US20140054143A1 (en)	2014-02-27	Switches for use in microelectromechanical and other systems, and processes for making same
TWI535104B (zh)	2016-05-21	新穎相移器及調諧元件
Nadim	0	A Proposed π-Structure RF MEMS Switch for Wide Bandwidth and High Isolation Applications
WO2014031920A1 (en)	2014-02-27	Switches for use in microelectromechanical and other systems, and processes for making same