IL102936A - Flow-soaking surfaces for non-electrical copper plating of complex systems - Google Patents
Flow-soaking surfaces for non-electrical copper plating of complex systemsInfo
- Publication number
- IL102936A IL102936A IL10293692A IL10293692A IL102936A IL 102936 A IL102936 A IL 102936A IL 10293692 A IL10293692 A IL 10293692A IL 10293692 A IL10293692 A IL 10293692A IL 102936 A IL102936 A IL 102936A
- Authority
- IL
- Israel
- Prior art keywords
- panel
- flow
- panels
- assemblies
- channels
- Prior art date
Links
- 230000001939 inductive effect Effects 0.000 title claims description 37
- 230000000712 assembly Effects 0.000 title claims description 36
- 238000000429 assembly Methods 0.000 title claims description 36
- 238000007747 plating Methods 0.000 title claims description 35
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims description 33
- 229910052802 copper Inorganic materials 0.000 title claims description 33
- 239000010949 copper Substances 0.000 title claims description 33
- 239000004033 plastic Substances 0.000 claims description 7
- 229920003023 plastic Polymers 0.000 claims description 7
- 230000013011 mating Effects 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1619—Apparatus for electroless plating
- C23C18/1628—Specific elements or parts of the apparatus
- C23C18/163—Supporting devices for articles to be coated
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Electroplating Methods And Accessories (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US75013791A | 1991-08-26 | 1991-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IL102936A0 IL102936A0 (en) | 1993-02-21 |
| IL102936A true IL102936A (en) | 1996-03-31 |
Family
ID=25016660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL10293692A IL102936A (en) | 1991-08-26 | 1992-08-25 | Flow-soaking surfaces for non-electrical copper plating of complex systems |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5603768A (fr) |
| EP (1) | EP0530665B1 (fr) |
| JP (1) | JPH05209281A (fr) |
| KR (1) | KR960015096B1 (fr) |
| AU (1) | AU647658B2 (fr) |
| CA (1) | CA2076701C (fr) |
| DE (1) | DE69228783T2 (fr) |
| ES (1) | ES2129419T3 (fr) |
| IL (1) | IL102936A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6225223B1 (en) | 1999-08-16 | 2001-05-01 | Taiwan Semiconductor Manufacturing Company | Method to eliminate dishing of copper interconnects |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2073679A (en) * | 1935-02-05 | 1937-03-16 | Western Electric Co | Electroplating apparatus |
| US2691144A (en) * | 1952-07-12 | 1954-10-05 | Fansteel Metallurgical Corp | Electroforming apparatus for rectifier disks |
| US3257308A (en) * | 1961-07-11 | 1966-06-21 | Western Electric Co | Article holder for electroplating articles |
| DE1239160B (de) * | 1963-05-04 | 1967-04-20 | Karl Schmidt Ges Mit Beschraen | Vorrichtung zum Galvanisieren ringfoermiger Koerper |
| US3648653A (en) * | 1970-06-01 | 1972-03-14 | Bell Telephone Labor Inc | Liquid phase crystal growth apparatus |
| US3972785A (en) * | 1974-06-17 | 1976-08-03 | The Empire Plating Company | Electroplating rack |
| FR2316761A1 (fr) * | 1975-07-04 | 1977-01-28 | Olivier Jean | Procede et reacteur pour soumettre une matiere a des ondes electromagnetiques |
| US4322592A (en) * | 1980-08-22 | 1982-03-30 | Rca Corporation | Susceptor for heating semiconductor substrates |
| US4312716A (en) * | 1980-11-21 | 1982-01-26 | Western Electric Co., Inc. | Supporting an array of elongate articles |
| CA1219179A (fr) * | 1982-09-27 | 1987-03-17 | Etd Technology, Inc. | Methode et dispositif de plaquate non electrolytique |
| DE3305564C1 (de) * | 1983-02-15 | 1984-03-22 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum Aufbau von metallisierten Leiterbahnen und Durchkontaktierungen an gelochten Leiterplatten |
| SU1167663A1 (ru) * | 1984-01-10 | 1985-07-15 | Предприятие П/Я Х-5618 | Кассета дл групповой обработки радиодеталей |
| DE3411208C2 (de) * | 1984-03-27 | 1987-01-29 | Leybold-Heraeus GmbH, 5000 Köln | Haltevorrichtung für Substrate, insbesondere in Vakuum-Beschichtungsanlagen |
| US4634512A (en) * | 1984-08-21 | 1987-01-06 | Komag, Inc. | Disk and plug |
-
1992
- 1992-08-24 CA CA002076701A patent/CA2076701C/fr not_active Expired - Fee Related
- 1992-08-25 IL IL10293692A patent/IL102936A/en not_active IP Right Cessation
- 1992-08-26 JP JP4227549A patent/JPH05209281A/ja active Pending
- 1992-08-26 DE DE69228783T patent/DE69228783T2/de not_active Expired - Fee Related
- 1992-08-26 ES ES92114558T patent/ES2129419T3/es not_active Expired - Lifetime
- 1992-08-26 AU AU21313/92A patent/AU647658B2/en not_active Ceased
- 1992-08-26 EP EP92114558A patent/EP0530665B1/fr not_active Expired - Lifetime
- 1992-08-26 KR KR1019920015373A patent/KR960015096B1/ko not_active Expired - Fee Related
-
1994
- 1994-07-21 US US08/278,682 patent/US5603768A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| ES2129419T3 (es) | 1999-06-16 |
| IL102936A0 (en) | 1993-02-21 |
| AU647658B2 (en) | 1994-03-24 |
| EP0530665A1 (fr) | 1993-03-10 |
| CA2076701C (fr) | 1997-12-23 |
| JPH05209281A (ja) | 1993-08-20 |
| EP0530665B1 (fr) | 1999-03-31 |
| DE69228783T2 (de) | 1999-12-02 |
| DE69228783D1 (de) | 1999-05-06 |
| AU2131392A (en) | 1993-03-11 |
| KR960015096B1 (ko) | 1996-10-24 |
| US5603768A (en) | 1997-02-18 |
| CA2076701A1 (fr) | 1993-02-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FF | Patent granted | ||
| KB | Patent renewed | ||
| KB | Patent renewed | ||
| HC | Change of name of proprietor(s) | ||
| KB | Patent renewed | ||
| MM9K | Patent not in force due to non-payment of renewal fees |