IL189314A - A device with a glossy heating surface and a method of manufacturing it - Google Patents

A device with a glossy heating surface and a method of manufacturing it

Info

Publication number: IL189314A
Authority: IL; Israel
Prior art keywords: abrasive; tool; grooves; units; abrasive tool
Prior art date: 2005-08-25

Application number

IL189314A

Other languages

English (en)

Hebrew (he)

Other versions

IL189314A0 (en

Original Assignee

Ishizuka Hiroshi

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2005-08-25

Filing date

2008-02-05

Publication date

2013-01-31

2008-02-05 Application filed by Ishizuka Hiroshi filed Critical Ishizuka Hiroshi

2008-06-05 Publication of IL189314A0 publication Critical patent/IL189314A0/en

2013-01-31 Publication of IL189314A publication Critical patent/IL189314A/en

Links

238000004519 manufacturing process Methods 0.000 title claims abstract description 18
238000005498 polishing Methods 0.000 title abstract description 18
238000000034 method Methods 0.000 claims abstract description 36
239000000463 material Substances 0.000 claims abstract description 17
239000002245 particle Substances 0.000 claims description 78
239000010432 diamond Substances 0.000 claims description 37
229910003460 diamond Inorganic materials 0.000 claims description 36
238000003754 machining Methods 0.000 claims description 18
238000005520 cutting process Methods 0.000 claims description 17
239000002131 composite material Substances 0.000 claims description 16
239000002184 metal Substances 0.000 claims description 14
229910052751 metal Inorganic materials 0.000 claims description 14
238000005245 sintering Methods 0.000 claims description 8
238000009760 electrical discharge machining Methods 0.000 claims description 7
238000009763 wire-cut EDM Methods 0.000 claims description 3
230000003247 decreasing effect Effects 0.000 claims description 2
239000004568 cement Substances 0.000 claims 1
230000001172 regenerating effect Effects 0.000 claims 1
239000006061 abrasive grain Substances 0.000 abstract 2
239000010410 layer Substances 0.000 description 28
238000010276 construction Methods 0.000 description 7
230000003750 conditioning effect Effects 0.000 description 6
230000014759 maintenance of location Effects 0.000 description 6
239000007787 solid Substances 0.000 description 6
235000012431 wafers Nutrition 0.000 description 6
239000010953 base metal Substances 0.000 description 5
230000015572 biosynthetic process Effects 0.000 description 4
238000004070 electrodeposition Methods 0.000 description 4
230000002093 peripheral effect Effects 0.000 description 4
239000004065 semiconductor Substances 0.000 description 4
JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 3
XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
238000005299 abrasion Methods 0.000 description 3
229910052710 silicon Inorganic materials 0.000 description 3
239000010703 silicon Substances 0.000 description 3
229910052582 BN Inorganic materials 0.000 description 2
PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
239000000956 alloy Substances 0.000 description 2
229910045601 alloy Inorganic materials 0.000 description 2
230000000694 effects Effects 0.000 description 2
230000008030 elimination Effects 0.000 description 2
238000003379 elimination reaction Methods 0.000 description 2
230000002349 favourable effect Effects 0.000 description 2
239000010408 film Substances 0.000 description 2
239000006260 foam Substances 0.000 description 2
239000000203 mixture Substances 0.000 description 2
238000000926 separation method Methods 0.000 description 2
239000010935 stainless steel Substances 0.000 description 2
229910001220 stainless steel Inorganic materials 0.000 description 2
239000010409 thin film Substances 0.000 description 2
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
229910000831 Steel Inorganic materials 0.000 description 1
239000003082 abrasive agent Substances 0.000 description 1
239000000853 adhesive Substances 0.000 description 1
230000001070 adhesive effect Effects 0.000 description 1
229910052799 carbon Inorganic materials 0.000 description 1
238000005229 chemical vapour deposition Methods 0.000 description 1
239000010941 cobalt Substances 0.000 description 1
229910017052 cobalt Inorganic materials 0.000 description 1
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
LYKJEJVAXSGWAJ-UHFFFAOYSA-N compactone Natural products CC1(C)CCCC2(C)C1CC(=O)C3(O)CC(C)(CCC23)C=C LYKJEJVAXSGWAJ-UHFFFAOYSA-N 0.000 description 1
230000001143 conditioned effect Effects 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
230000006378 damage Effects 0.000 description 1
230000003292 diminished effect Effects 0.000 description 1
238000004090 dissolution Methods 0.000 description 1
238000009826 distribution Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
229920006332 epoxy adhesive Polymers 0.000 description 1
238000000227 grinding Methods 0.000 description 1
230000002706 hydrostatic effect Effects 0.000 description 1
238000007373 indentation Methods 0.000 description 1
239000004615 ingredient Substances 0.000 description 1
238000009413 insulation Methods 0.000 description 1
239000011229 interlayer Substances 0.000 description 1
230000001788 irregular Effects 0.000 description 1
238000005304 joining Methods 0.000 description 1
150000002739 metals Chemical class 0.000 description 1
238000005555 metalworking Methods 0.000 description 1
229910052759 nickel Inorganic materials 0.000 description 1
230000002028 premature Effects 0.000 description 1
230000002265 prevention Effects 0.000 description 1
229920005989 resin Polymers 0.000 description 1
239000011347 resin Substances 0.000 description 1
230000009528 severe injury Effects 0.000 description 1
239000010959 steel Substances 0.000 description 1
239000002344 surface layer Substances 0.000 description 1
UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical group [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/21—Circular sheet or circular blank
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/2457—Parallel ribs and/or grooves
- Y10T428/24579—Parallel ribs and/or grooves with particulate matter
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Polishing Bodies And Polishing Tools (AREA)
Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

IL189314A 2005-08-25 2008-02-05 A device with a glossy heating surface and a method of manufacturing it IL189314A (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2005243529		2005-08-25
JP2006209236		2006-07-31
PCT/JP2006/316737 WO2007023949A1 (ja)	2005-08-25	2006-08-25	焼結体研磨部を持つ工具およびその製造方法

Publications (2)

Publication Number	Publication Date
IL189314A0 IL189314A0 (en)	2008-06-05
IL189314A true IL189314A (en)	2013-01-31

Family

ID=37771687

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IL189314A IL189314A (en)	2005-08-25	2008-02-05	A device with a glossy heating surface and a method of manufacturing it

Country Status (12)

Country	Link
US (1)	US20090215366A1 (pt)
EP (1)	EP1944125B1 (pt)
JP (1)	JP5033630B2 (pt)
KR (1)	KR101293461B1 (pt)
CN (2)	CN101247923B (pt)
AU (1)	AU2006282293B2 (pt)
BR (1)	BRPI0615020A2 (pt)
CA (1)	CA2620407A1 (pt)
IL (1)	IL189314A (pt)
RU (1)	RU2430827C2 (pt)
TW (1)	TWI406736B (pt)
WO (1)	WO2007023949A1 (pt)

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JP2009113133A (ja) *	2007-11-05	2009-05-28	Hiroshi Ishizuka	Ｃｍｐパッド・コンディショナー
CN102858496B (zh) *	2010-04-27	2016-04-27	3M创新有限公司	陶瓷成形磨粒及其制备方法以及包含陶瓷成形磨粒的磨具制品
US20120171935A1 (en) *	2010-12-20	2012-07-05	Diamond Innovations, Inc.	CMP PAD Conditioning Tool
JP5809880B2 (ja) *	2011-08-25	2015-11-11	新日鉄住金マテリアルズ株式会社	研磨布用ドレッサー
KR102074138B1 (ko)	2011-12-30	2020-02-07	생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드	형상화 연마입자 및 이의 형성방법
JP6715006B2 (ja) *	2012-08-02	2020-07-01	スリーエムイノベイティブプロパティズカンパニー	精密に成形された構造部を有する研磨物品及びその作製方法
CN102862121B (zh) *	2012-09-17	2015-05-20	上海华力微电子有限公司	一种cmp研磨垫修整结构
EP2835220B1 (de) *	2013-08-07	2019-09-11	Reishauer AG	Abrichtwerkzeug sowie ein Verfahren zu dessen Herstellung
JP5976228B2 (ja) *	2013-08-26	2016-08-23	株式会社東京精密	ダイシングブレード
WO2015057562A1 (en) *	2013-10-18	2015-04-23	3M Innovative Properties Company	Coated abrasive article and method of making the same
WO2015143278A1 (en) *	2014-03-21	2015-09-24	Entegris, Inc.	Chemical mechanical planarization pad conditioner with elongated cutting edges
TWI609742B (zh) *	2015-04-20	2018-01-01	中國砂輪企業股份有限公司	研磨工具
WO2017145491A1 (ja)	2016-02-22	2017-08-31	株式会社アライドマテリアル	砥粒工具
US11505730B2 (en)	2017-05-12	2022-11-22	3M Innovative Properties Company	Tetrahedral abrasive particles in abrasive articles
EP3713712B1 (en)	2017-11-21	2023-05-31	3M Innovative Properties Company	Coated abrasive disc and methods of making and using the same
WO2019102332A1 (en)	2017-11-21	2019-05-31	3M Innovative Properties Company	Coated abrasive disc and methods of making and using the same
EP3713711A4 (en) *	2017-11-21	2021-08-18	3M Innovative Properties Company	COATED GRINDING WHEEL AND METHOD OF MANUFACTURING AND USING THEREOF
KR102026250B1 (ko)	2018-02-05	2019-09-27	에스케이실트론 주식회사	웨이퍼 연마 장치용 연마 패드 및 그의 제조방법
KR20210002494A (ko) *	2018-04-27	2021-01-08	스미토모덴키고교가부시키가이샤	다결정 지립 및 그것을 구비한 연삭 휠
TWI735795B (zh) *	2018-08-24	2021-08-11	宋健民	拋光墊修整器及化學機械平坦化的方法
KR102440315B1 (ko) *	2020-05-11	2022-09-06	한국생산기술연구원	패턴구조를 갖는 화학기계적 연마용 패드 및 이의 제조방법
DK180350B1 (da) *	2019-09-18	2021-01-22	Flex Trim As	Slibeelement til brug i roterende slibe- eller pudseværktøj
CN112677062B (zh) *	2019-10-18	2022-12-09	江苏韦尔博新材料科技有限公司	一种打磨钢材磨盘的专用磨粒地貌、其金刚石磨盘与制备方法
CN218927436U (zh) *	2022-12-09	2023-04-28	林翔	一种修整器

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2006
- 2006-08-25 EP EP06796810A patent/EP1944125B1/en not_active Not-in-force
- 2006-08-25 US US11/990,562 patent/US20090215366A1/en not_active Abandoned
- 2006-08-25 WO PCT/JP2006/316737 patent/WO2007023949A1/ja not_active Ceased
- 2006-08-25 JP JP2007532202A patent/JP5033630B2/ja not_active Expired - Fee Related
- 2006-08-25 KR KR1020087005076A patent/KR101293461B1/ko not_active Expired - Fee Related
- 2006-08-25 CA CA002620407A patent/CA2620407A1/en not_active Abandoned
- 2006-08-25 RU RU2008110905/02A patent/RU2430827C2/ru not_active IP Right Cessation
- 2006-08-25 CN CN2006800307352A patent/CN101247923B/zh not_active Expired - Fee Related
- 2006-08-25 BR BRPI0615020-9A patent/BRPI0615020A2/pt not_active IP Right Cessation
- 2006-08-25 AU AU2006282293A patent/AU2006282293B2/en not_active Ceased
- 2006-08-25 TW TW095131436A patent/TWI406736B/zh not_active IP Right Cessation
- 2006-08-25 CN CN200910170789A patent/CN101693353A/zh active Pending
2008
- 2008-02-05 IL IL189314A patent/IL189314A/en not_active IP Right Cessation

Also Published As

Publication number	Publication date
IL189314A0 (en)	2008-06-05
AU2006282293B2 (en)	2011-06-23
BRPI0615020A2 (pt)	2009-08-04
US20090215366A1 (en)	2009-08-27
CA2620407A1 (en)	2007-03-01
CN101247923B (zh)	2010-12-08
TW200714416A (en)	2007-04-16
CN101247923A (zh)	2008-08-20
KR20080037693A (ko)	2008-04-30
WO2007023949A1 (ja)	2007-03-01
JPWO2007023949A1 (ja)	2009-03-05
RU2430827C2 (ru)	2011-10-10
RU2008110905A (ru)	2009-09-27
JP5033630B2 (ja)	2012-09-26
TWI406736B (zh)	2013-09-01
EP1944125A1 (en)	2008-07-16
EP1944125B1 (en)	2012-01-25
EP1944125A4 (en)	2009-12-16
AU2006282293A1 (en)	2007-03-01
CN101693353A (zh)	2010-04-14
KR101293461B1 (ko)	2013-08-07

Legal Events

Date	Code	Title
2013-05-30	FF	Patent granted
2013-08-29	KB	Patent renewed
2016-08-31	KB	Patent renewed
2021-03-25	MM9K	Patent not in force due to non-payment of renewal fees

Publication	Publication Date	Title
AU2006282293B2 (en)	2011-06-23	Tool with sintered body polishing surface and method of manufacturing the same
KR100387954B1 (ko)	2003-06-19	연마패드용 컨디셔너와 이의 제조방법
KR101091030B1 (ko)	2011-12-09	감소된 마찰력을 갖는 패드 컨디셔너 제조방법
KR100789620B1 (ko)	2007-12-27	초연마입자공구 및 그 제조방법
EP2351630B1 (en)	2013-07-24	Apparatus for polishing spherical body, method for polishing spherical body and method for manufacturing spherical member
JP3791610B2 (ja)	2006-06-28	鏡面加工用超砥粒ホイール
TW200821092A (en)	2008-05-16	Conditioning disk having uniform structures
CN110871407A (zh)	2020-03-10	抛光垫修整器及化学机械平坦化的方法
TWI383860B (zh)	2013-02-01	Modular dresser
JP2012213833A (ja)	2012-11-08	パッドコンディショニング用焼結体およびその製造方法
KR101147149B1 (ko)	2012-05-25	폴리싱패드드레서
JPH0715725Y2 (ja)	1995-04-12	電着砥石
JP2011020182A (ja)	2011-02-03	パッド・コンディショニングに適した研磨工具及びこれを用いた研磨方法
JP4281253B2 (ja)	2009-06-17	電着砥石とその製造装置及び製造方法
KR200175263Y1 (ko)	2000-03-15	화학적.기계적연마 장치의 폴리싱 패드용 콘디셔너의 구조
JP2006218577A (ja)	2006-08-24	研磨布用ドレッサー
JP2003039334A (ja)	2003-02-13	平面ホーニング加工用超砥粒ホイール及びそのドレス方法ならびに同ホイールを使用する研削装置
KR200188920Y1 (ko)	2000-07-15	연마패드용 컨디셔너
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