IL321130A - Supercontinuum radiation source - Google Patents

Supercontinuum radiation source

Info

Publication number
IL321130A
IL321130A IL321130A IL32113025A IL321130A IL 321130 A IL321130 A IL 321130A IL 321130 A IL321130 A IL 321130A IL 32113025 A IL32113025 A IL 32113025A IL 321130 A IL321130 A IL 321130A
Authority
IL
Israel
Prior art keywords
supercontinuum
radiation source
broadband radiation
source according
generation
Prior art date
Application number
IL321130A
Other languages
English (en)
Hebrew (he)
Inventor
Amir Abdolvand
John Colin Travers
Yongfeng Ni
Hezaveh Mohsen Sajadi
Original Assignee
Asml Netherlands Bv
Amir Abdolvand
John Colin Travers
Yongfeng Ni
Hezaveh Mohsen Sajadi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv, Amir Abdolvand, John Colin Travers, Yongfeng Ni, Hezaveh Mohsen Sajadi filed Critical Asml Netherlands Bv
Publication of IL321130A publication Critical patent/IL321130A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3528—Non-linear optics for producing a supercontinuum
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/365—Non-linear optics in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/32—Photonic crystals

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
IL321130A 2022-12-07 2023-11-06 Supercontinuum radiation source IL321130A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP22211917 2022-12-07
PCT/EP2023/080777 WO2024120709A1 (fr) 2022-12-07 2023-11-06 Source de rayonnement supercontinuum

Publications (1)

Publication Number Publication Date
IL321130A true IL321130A (en) 2025-07-01

Family

ID=84440060

Family Applications (1)

Application Number Title Priority Date Filing Date
IL321130A IL321130A (en) 2022-12-07 2023-11-06 Supercontinuum radiation source

Country Status (7)

Country Link
EP (1) EP4630880A1 (fr)
JP (1) JP2025541764A (fr)
KR (1) KR20250114426A (fr)
CN (1) CN120303615A (fr)
IL (1) IL321130A (fr)
TW (1) TW202441270A (fr)
WO (1) WO2024120709A1 (fr)

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60319462T2 (de) 2002-06-11 2009-03-12 Asml Netherlands B.V. Lithographischer Apparat und Verfahren zur Herstellung eines Artikels
KR100434690B1 (ko) 2002-07-19 2004-06-04 소광섭 생명체에 대한 자기장의 영향을 측정하는 장치 및 방법
KR100585476B1 (ko) 2002-11-12 2006-06-07 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치 및 디바이스 제조방법
SG125101A1 (en) 2003-01-14 2006-09-29 Asml Netherlands Bv Level sensor for lithographic apparatus
US7265364B2 (en) 2004-06-10 2007-09-04 Asml Netherlands B.V. Level sensor for lithographic apparatus
US7791727B2 (en) 2004-08-16 2010-09-07 Asml Netherlands B.V. Method and apparatus for angular-resolved spectroscopic lithography characterization
JP4974161B2 (ja) * 2007-07-27 2012-07-11 古河電気工業株式会社 光ファイバデバイス
NL1036245A1 (nl) 2007-12-17 2009-06-18 Asml Netherlands Bv Diffraction based overlay metrology tool and method of diffraction based overlay metrology.
NL1036734A1 (nl) 2008-04-09 2009-10-12 Asml Netherlands Bv A method of assessing a model, an inspection apparatus and a lithographic apparatus.
NL1036857A1 (nl) 2008-04-21 2009-10-22 Asml Netherlands Bv Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method.
JP5584689B2 (ja) 2008-10-06 2014-09-03 エーエスエムエル ネザーランズ ビー．ブイ． ２次元ターゲットを用いたリソグラフィの焦点及びドーズ測定
EP2228685B1 (fr) 2009-03-13 2018-06-27 ASML Netherlands B.V. Détecteur de niveau pour appareil lithographique et procédé de fabrication de dispositif
JP5545782B2 (ja) 2009-07-31 2014-07-09 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置の焦点測定方法、散乱計、リソグラフィシステム、およびリソグラフィセル
US8385699B2 (en) * 2010-07-29 2013-02-26 Jian Liu Amplified broadband fiber laser source
WO2012022584A1 (fr) 2010-08-18 2012-02-23 Asml Netherlands B.V. Substrat pour l'utilisation dans la métrologie, procédé de métrologie et procédé de fabrication du dispositif
US9213215B2 (en) * 2012-01-19 2015-12-15 The United States Of America, As Represented By The Secretary Of The Navy IR fiber broadband mid-IR light source
WO2014019846A2 (fr) 2012-07-30 2014-02-06 Asml Netherlands B.V. Appareil de mesure de positions, procédé de mesure de positions, appareil lithographique, et procédé de fabrication de dispositif
US9160137B1 (en) 2014-05-09 2015-10-13 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e. V. Method and device for creating supercontinuum light pulses
WO2016083076A1 (fr) 2014-11-26 2016-06-02 Asml Netherlands B.V. Procédé de métrologie, système et produit informatique
WO2016102127A1 (fr) 2014-12-22 2016-06-30 Asml Netherlands B.V. Capteur de niveau, appareil lithographique, et procédé de fabrication d'un dispositif
IL256196B (en) 2015-06-17 2022-07-01 Asml Netherlands Bv Recipe selection based on inter-recipe consistency
EP3136143B1 (fr) 2015-08-26 2020-04-01 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Fibre à noyau creux et son procédé de fabrication
IL299683B2 (en) 2017-01-09 2025-08-01 Max Planck Gesellschaft Broadband light source device and method of creating broadband light pulses
CN106842762B (zh) * 2017-04-20 2022-12-06 陕西师范大学 一种级联超连续谱产生的装置
US10584999B2 (en) * 2018-03-28 2020-03-10 SA Photonics, Inc. High power supercontinuum fiber optical source with midstage spectrum broadening
WO2020092712A1 (fr) * 2018-11-01 2020-05-07 Ofs Fitel, Llc Source lumineuse supercontinuum basée sur des fibres
CA3146813A1 (fr) * 2021-02-16 2022-08-16 Thorlabs, Inc. Laser a large bande de l'infrarouge moyen a l'aide de non-linearites en cascade dans la fibre de l'infrarouge moyen et cristal non lineaire

Also Published As

Publication number Publication date
TW202441270A (zh) 2024-10-16
EP4630880A1 (fr) 2025-10-15
KR20250114426A (ko) 2025-07-29
WO2024120709A1 (fr) 2024-06-13
JP2025541764A (ja) 2025-12-23
CN120303615A (zh) 2025-07-11

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