IL71730A - Cryopump with improved adsorption capacity - Google Patents

Cryopump with improved adsorption capacity

Info

Publication number
IL71730A
IL71730A IL71730A IL7173084A IL71730A IL 71730 A IL71730 A IL 71730A IL 71730 A IL71730 A IL 71730A IL 7173084 A IL7173084 A IL 7173084A IL 71730 A IL71730 A IL 71730A
Authority
IL
Israel
Prior art keywords
cryopump
adsorption capacity
improved adsorption
improved
capacity
Prior art date
Application number
IL71730A
Other languages
English (en)
Other versions
IL71730A0 (en
Original Assignee
Helix Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23965851&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IL71730(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Tech Corp filed Critical Helix Tech Corp
Publication of IL71730A0 publication Critical patent/IL71730A0/xx
Publication of IL71730A publication Critical patent/IL71730A/xx

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24149—Honeycomb-like

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
IL71730A 1983-05-13 1984-05-02 Cryopump with improved adsorption capacity IL71730A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/494,758 US4494381A (en) 1983-05-13 1983-05-13 Cryopump with improved adsorption capacity

Publications (2)

Publication Number Publication Date
IL71730A0 IL71730A0 (en) 1984-09-30
IL71730A true IL71730A (en) 1988-08-31

Family

ID=23965851

Family Applications (1)

Application Number Title Priority Date Filing Date
IL71730A IL71730A (en) 1983-05-13 1984-05-02 Cryopump with improved adsorption capacity

Country Status (6)

Country Link
US (1) US4494381A (de)
EP (1) EP0128323B1 (de)
JP (1) JPS6035190A (de)
CA (1) CA1221553A (de)
DE (1) DE3468726D1 (de)
IL (1) IL71730A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250354543A1 (en) * 2023-04-06 2025-11-20 Taiwan Semiconductor Manufacturing Company, Ltd. Cryogenic pump for semiconductor processing

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1201263B (it) * 1985-03-26 1989-01-27 Galileo Spa Off Pompa criogenica a refrigeratore con geometria degli scherma atta a raggiungere elevata efficienza e durata prolungata
US4718241A (en) * 1985-10-31 1988-01-12 Helix Technology Corporation Cryopump with quicker adsorption
DE3690558T1 (de) * 1985-10-31 1987-12-10
SU1682628A1 (ru) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криоадсорбционный насос
JP2551204B2 (ja) * 1990-06-14 1996-11-06 ダイキン工業株式会社 クライオポンプ
US5932119A (en) 1996-01-05 1999-08-03 Lazare Kaplan International, Inc. Laser marking system
US6154478A (en) * 1998-06-30 2000-11-28 The Boeing Company Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system
US6650681B1 (en) 2000-04-25 2003-11-18 The Boeing Company Sealed exhaust chemical oxygen-iodine laser system
US6621848B1 (en) 2000-04-25 2003-09-16 The Boeing Company SECOIL reprocessing system
JP4356250B2 (ja) * 2001-02-13 2009-11-04 日本電気株式会社 無線受信機
US7313922B2 (en) 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
JP4430042B2 (ja) * 2006-06-07 2010-03-10 住友重機械工業株式会社 クライオポンプおよび半導体製造装置
US20090038319A1 (en) * 2007-08-08 2009-02-12 Sumitomo Heavy Industries, Ltd. Cryopanel and Cryopump Using the Cryopanel
KR101554866B1 (ko) * 2010-11-24 2015-09-22 브룩스 오토메이션, 인크. 수소 가스 방출을 제어하는 저온 펌프
KR102033142B1 (ko) 2011-02-09 2019-10-16 브룩스 오토메이션, 인크. 극저온 펌프
JP6053588B2 (ja) * 2013-03-19 2016-12-27 住友重機械工業株式会社 クライオポンプ、及び非凝縮性気体の真空排気方法
KR102615000B1 (ko) 2017-11-17 2023-12-15 에드워즈 배큠 엘엘시 개선된 정면 어레이를 갖는 크라이오펌프
WO2019099862A1 (en) 2017-11-17 2019-05-23 Brooks Automation, Inc. Cryopump with peripheral first and second stage arrays
US11694899B2 (en) * 2020-01-10 2023-07-04 Taiwan Semiconductor Manufacturing Co., Ltd. Interconnect structures and methods and apparatuses for forming the same

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2831549A (en) * 1954-08-31 1958-04-22 Westinghouse Electric Corp Isolation trap
US3130563A (en) * 1961-08-07 1964-04-28 Gen Electric Cryogenic apparatus
US3309844A (en) * 1963-11-29 1967-03-21 Union Carbide Corp Process for adsorbing gases
US3335550A (en) * 1964-04-24 1967-08-15 Union Carbide Corp Cryosorption apparatus
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
US3502596A (en) * 1965-11-16 1970-03-24 Du Pont Ceramic structures
US3416326A (en) * 1967-06-02 1968-12-17 Stuffer Rowen Efficient nitrogen trap
US3490247A (en) * 1968-01-24 1970-01-20 Perkin Elmer Corp Sorption pump roughing system
FR2396879A1 (fr) * 1977-07-05 1979-02-02 Air Liquide Cryopompe
DE3034934A1 (de) * 1979-09-28 1982-04-22 Varian Associates, Inc., 94303 Palo Alto, Calif. Kryogenpumpe mit strahlungsschutzschild
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20250354543A1 (en) * 2023-04-06 2025-11-20 Taiwan Semiconductor Manufacturing Company, Ltd. Cryogenic pump for semiconductor processing

Also Published As

Publication number Publication date
EP0128323B1 (de) 1988-01-13
IL71730A0 (en) 1984-09-30
CA1221553A (en) 1987-05-12
DE3468726D1 (en) 1988-02-18
US4494381A (en) 1985-01-22
EP0128323A2 (de) 1984-12-19
EP0128323A3 (en) 1985-01-23
JPS6035190A (ja) 1985-02-22

Similar Documents

Publication Publication Date Title
DE3468726D1 (en) Cryopump with improved adsorption capacity
DE3480463D1 (en) Activated carbon adsorbent with increased heat capacity and the production thereof
EP0154343A3 (en) Adsorbent
DE3474334D1 (en) Multiport cryopump
DE3471347D1 (en) Reduced vacuum cryopump
GB2144838B (en) Refrigerators
DE3471998D1 (en) Cryostat
DE3465964D1 (en) Winder with controlled compression
DE3466036D1 (en) Bakeable cryopump
GB8404530D0 (en) Storing flat structures
EP0161882A3 (en) Improvements in adsorbents
GB2126123B (en) Adsorbent element
GB8406781D0 (en) Activated carbon
GB2191247B (en) Cryopump with quicker adsorption
DE3461331D1 (en) Gas accumulator with variable useful volume
DE3465376D1 (en) Valve arrangement with variable function
PL276459A1 (en) Cryogenic adsorption pump
DE3460415D1 (en) Adsorber
GB8613601D0 (en) Sorbent
GB2114555B (en) Improvements in the regeneration of adsorbents
GB2148474B (en) Cryogenic cell
GB2135661B (en) Regenerating sorbents
GB8318995D0 (en) Storage unit
GB8334605D0 (en) Low capacity pump
GB8424556D0 (en) Sorbent

Legal Events

Date Code Title Description
MM9K Patent not in force due to non-payment of renewal fees