IL76664A0 - Filter apparatus for use with an x-ray source - Google Patents

Filter apparatus for use with an x-ray source

Info

Publication number
IL76664A0
IL76664A0 IL76664A IL7666485A IL76664A0 IL 76664 A0 IL76664 A0 IL 76664A0 IL 76664 A IL76664 A IL 76664A IL 7666485 A IL7666485 A IL 7666485A IL 76664 A0 IL76664 A0 IL 76664A0
Authority
IL
Israel
Prior art keywords
ray source
filter apparatus
filter
ray
source
Prior art date
Application number
IL76664A
Other languages
English (en)
Original Assignee
Maxwell Lab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maxwell Lab Inc filed Critical Maxwell Lab Inc
Publication of IL76664A0 publication Critical patent/IL76664A0/xx

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/009—Auxiliary arrangements not involved in the plasma generation
    • H05G2/0094—Reduction, prevention or protection from contamination; Cleaning
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/007—Production of X-ray radiation generated from plasma involving electric or magnetic fields in the process of plasma generation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
IL76664A 1984-10-12 1985-10-11 Filter apparatus for use with an x-ray source IL76664A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/660,447 US4837794A (en) 1984-10-12 1984-10-12 Filter apparatus for use with an x-ray source

Publications (1)

Publication Number Publication Date
IL76664A0 true IL76664A0 (en) 1986-02-28

Family

ID=24649575

Family Applications (1)

Application Number Title Priority Date Filing Date
IL76664A IL76664A0 (en) 1984-10-12 1985-10-11 Filter apparatus for use with an x-ray source

Country Status (6)

Country Link
US (1) US4837794A (fr)
EP (1) EP0182477A3 (fr)
JP (1) JPS61158656A (fr)
KR (1) KR860003625A (fr)
CA (1) CA1233918A (fr)
IL (1) IL76664A0 (fr)

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US7189446B2 (en) * 2003-07-11 2007-03-13 Corning Incorporated Curved honeycomb article, EUV apparatus having a curved honeycomb article, and method of making a curved honeycomb article
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US7167232B2 (en) * 2003-12-30 2007-01-23 Asml Netherlands B.V. Lithographic apparatus and radiation source comprising a debris-mitigation system and method for mitigating debris particles in a lithographic apparatus
US7251012B2 (en) * 2003-12-31 2007-07-31 Asml Netherlands B.V. Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris
US7030958B2 (en) * 2003-12-31 2006-04-18 Asml Netherlands B.V. Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
US20060146906A1 (en) * 2004-02-18 2006-07-06 Cymer, Inc. LLP EUV drive laser
US7193228B2 (en) * 2004-03-10 2007-03-20 Cymer, Inc. EUV light source optical elements
US7087914B2 (en) * 2004-03-17 2006-08-08 Cymer, Inc High repetition rate laser produced plasma EUV light source
US7164144B2 (en) * 2004-03-10 2007-01-16 Cymer Inc. EUV light source
US7196342B2 (en) * 2004-03-10 2007-03-27 Cymer, Inc. Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source
US8075732B2 (en) * 2004-11-01 2011-12-13 Cymer, Inc. EUV collector debris management
US7109503B1 (en) * 2005-02-25 2006-09-19 Cymer, Inc. Systems for protecting internal components of an EUV light source from plasma-generated debris
US7355191B2 (en) * 2004-11-01 2008-04-08 Cymer, Inc. Systems and methods for cleaning a chamber window of an EUV light source
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Also Published As

Publication number Publication date
JPS61158656A (ja) 1986-07-18
KR860003625A (ko) 1986-05-28
CA1233918A (fr) 1988-03-08
EP0182477A3 (fr) 1988-05-04
EP0182477A2 (fr) 1986-05-28
US4837794A (en) 1989-06-06

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