IL78383A0 - Phospho-boro-silanol interlayer dielectric films and their preparation - Google Patents
Phospho-boro-silanol interlayer dielectric films and their preparationInfo
- Publication number
- IL78383A0 IL78383A0 IL78383A IL7838386A IL78383A0 IL 78383 A0 IL78383 A0 IL 78383A0 IL 78383 A IL78383 A IL 78383A IL 7838386 A IL7838386 A IL 7838386A IL 78383 A0 IL78383 A0 IL 78383A0
- Authority
- IL
- Israel
- Prior art keywords
- boro
- phospho
- silanol
- preparation
- interlayer dielectric
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/48—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
- C08G77/56—Boron-containing linkages
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/48—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule in which at least two but not all the silicon atoms are connected by linkages other than oxygen atoms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
- H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
- H01B3/46—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes silicones
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31663—As siloxane, silicone or silane
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Wood Science & Technology (AREA)
- Silicon Polymers (AREA)
- Paints Or Removers (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
- Formation Of Insulating Films (AREA)
- Organic Insulating Materials (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/733,690 US4663414A (en) | 1985-05-14 | 1985-05-14 | Phospho-boro-silanol interlayer dielectric films and preparation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL78383A0 true IL78383A0 (en) | 1986-07-31 |
Family
ID=24948726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL78383A IL78383A0 (en) | 1985-05-14 | 1986-03-31 | Phospho-boro-silanol interlayer dielectric films and their preparation |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4663414A (de) |
| EP (1) | EP0202108A3 (de) |
| JP (1) | JPS61261370A (de) |
| KR (1) | KR860009088A (de) |
| IL (1) | IL78383A0 (de) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2591587A1 (fr) * | 1985-12-17 | 1987-06-19 | Saint Gobain Vitrage | Film organo-mineral depose sur un substrat en verre eventuellement revetu d'une ou plusieurs couches metalliques minces. |
| US4758620A (en) * | 1987-07-02 | 1988-07-19 | Akzo America Inc. | Blend of solvent and arylsiloxane interlayer dielectric materials |
| US4801507A (en) * | 1987-07-02 | 1989-01-31 | Akzo American Inc. | Arylsiloxane/silicate compositions useful as interlayer dielectric films |
| US4765866A (en) * | 1987-07-02 | 1988-08-23 | Akzo America Inc. | Energy ray curing of arylsiloxane/silicate compositions and subsequent etching thereof |
| US5089303A (en) * | 1989-04-24 | 1992-02-18 | Akzo America Inc. | Blend of solvent and photocurable arylsiloxane materials |
| US5527872A (en) * | 1990-09-14 | 1996-06-18 | At&T Global Information Solutions Company | Electronic device with a spin-on glass dielectric layer |
| JP2003502449A (ja) * | 1999-06-10 | 2003-01-21 | ハネウエル・インターナシヨナル・インコーポレーテツド | フォトリソグラフィ用スピンオンガラス反射防止コーティング |
| US6368400B1 (en) * | 2000-07-17 | 2002-04-09 | Honeywell International | Absorbing compounds for spin-on-glass anti-reflective coatings for photolithography |
| SE521977C2 (sv) * | 2002-06-20 | 2003-12-23 | Mobile Media Group Stockholm A | Metod och apparat för att formatera en webbtjänst |
| US8053159B2 (en) | 2003-11-18 | 2011-11-08 | Honeywell International Inc. | Antireflective coatings for via fill and photolithography applications and methods of preparation thereof |
| US8642246B2 (en) | 2007-02-26 | 2014-02-04 | Honeywell International Inc. | Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof |
| US8557877B2 (en) | 2009-06-10 | 2013-10-15 | Honeywell International Inc. | Anti-reflective coatings for optically transparent substrates |
| US8864898B2 (en) | 2011-05-31 | 2014-10-21 | Honeywell International Inc. | Coating formulations for optical elements |
| US9006101B2 (en) * | 2012-08-31 | 2015-04-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure and method |
| CN104981518B (zh) * | 2012-12-28 | 2019-01-29 | 美国陶氏有机硅公司 | 用于换能器的可固化有机聚硅氧烷组合物和此类可固化有机硅组合物在换能器方面的应用 |
| KR101983010B1 (ko) | 2012-12-28 | 2019-09-10 | 다우 코닝 도레이 캄파니 리미티드 | 변환기용 경화성 유기폴리실록산 조성물 및 그러한 변환기용 경화성 실리콘 조성물의 응용 |
| US9076719B2 (en) | 2013-08-21 | 2015-07-07 | The Regents Of The University Of California | Doping of a substrate via a dopant containing polymer film |
| JP6072129B2 (ja) | 2014-04-30 | 2017-02-01 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | ドーパント含有ポリマー膜を用いた基体のドーピング |
| WO2016167892A1 (en) | 2015-04-13 | 2016-10-20 | Honeywell International Inc. | Polysiloxane formulations and coatings for optoelectronic applications |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3414463A (en) * | 1968-01-04 | 1968-12-03 | Owens Illinois Inc | Organopolysiloxane modified with an organophosphorus compound and use thereof |
| DE2040180B2 (de) * | 1970-01-22 | 1977-08-25 | Intel Corp, Mountain View, Calif. (V.St.A.) | Verfahren zur verhinderung von mechanischen bruechen einer duennen, die oberflaeche eines halbleiterkoerpers ueberdeckende isolierschichten ueberziehenden elektrisch leitenden schicht |
| US4218571A (en) * | 1975-12-08 | 1980-08-19 | Mobil Oil Corporation | Olefin hydrogenation over synthetic amorphous silica |
| JPS5760330A (en) * | 1980-09-27 | 1982-04-12 | Fujitsu Ltd | Resin composition |
| DE3213247A1 (de) * | 1981-04-13 | 1982-12-02 | Showa Electric Wire & Cable Co., Ltd., Kawasaki, Kanagawa | Polyborsiloxan-ueberzugsmasse und isolierter elektrischer leiter |
| JPS59199756A (ja) * | 1983-04-27 | 1984-11-12 | Toshiba Silicone Co Ltd | 導電性シリコ−ンゴム組成物 |
-
1985
- 1985-05-14 US US06/733,690 patent/US4663414A/en not_active Expired - Fee Related
-
1986
- 1986-03-28 KR KR1019860002316A patent/KR860009088A/ko not_active Ceased
- 1986-03-31 IL IL78383A patent/IL78383A0/xx unknown
- 1986-05-13 JP JP61107792A patent/JPS61261370A/ja active Pending
- 1986-05-13 EP EP86303627A patent/EP0202108A3/de not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| US4663414A (en) | 1987-05-05 |
| JPS61261370A (ja) | 1986-11-19 |
| EP0202108A2 (de) | 1986-11-20 |
| KR860009088A (ko) | 1986-12-20 |
| EP0202108A3 (de) | 1988-06-15 |
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