IL83675A - Beam position correction device and method - Google Patents

Beam position correction device and method

Info

Publication number
IL83675A
IL83675A IL83675A IL8367587A IL83675A IL 83675 A IL83675 A IL 83675A IL 83675 A IL83675 A IL 83675A IL 8367587 A IL8367587 A IL 8367587A IL 83675 A IL83675 A IL 83675A
Authority
IL
Israel
Prior art keywords
correction device
position correction
beam position
correction
Prior art date
Application number
IL83675A
Other languages
English (en)
Other versions
IL83675A0 (en
Original Assignee
Ferranti Sciaky Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferranti Sciaky Inc filed Critical Ferranti Sciaky Inc
Publication of IL83675A0 publication Critical patent/IL83675A0/xx
Publication of IL83675A publication Critical patent/IL83675A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/0013—Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electron beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
IL83675A 1986-08-29 1987-08-28 Beam position correction device and method IL83675A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/901,947 US4721842A (en) 1986-08-29 1986-08-29 Beam position correction device

Publications (2)

Publication Number Publication Date
IL83675A0 IL83675A0 (en) 1988-01-31
IL83675A true IL83675A (en) 1990-07-12

Family

ID=25415109

Family Applications (1)

Application Number Title Priority Date Filing Date
IL83675A IL83675A (en) 1986-08-29 1987-08-28 Beam position correction device and method

Country Status (7)

Country Link
US (1) US4721842A (fr)
EP (1) EP0280714B1 (fr)
CA (1) CA1285621C (fr)
DE (1) DE3784915T2 (fr)
ES (1) ES2005280A6 (fr)
IL (1) IL83675A (fr)
WO (1) WO1988001551A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3160315B2 (ja) * 1991-06-28 2001-04-25 川崎製鉄株式会社 電子ビームの照射方法及び照射装置
US6102164A (en) * 1996-02-28 2000-08-15 Applied Materials, Inc. Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
DE19745771B4 (de) * 1997-10-16 2005-12-22 Unaxis Deutschland Holding Gmbh Verfahren für den Betrieb eines Hochleistungs-Elektronenstrahls
EP1768162A3 (fr) * 2001-10-05 2007-05-09 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Dispositif à faisceaux d'électrons multiples
AU2018273352B2 (en) 2017-05-22 2023-07-27 Howmedica Osteonics Corp. Device for in-situ fabrication process monitoring and feedback control of an electron beam additive manufacturing process
US11117195B2 (en) 2018-07-19 2021-09-14 The University Of Liverpool System and process for in-process electron beam profile and location analyses
CN111650635B (zh) * 2020-06-11 2022-10-21 中国航发航空科技股份有限公司 一种电子束焊接束流垂直度验证及找正方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1212780A (en) * 1967-11-27 1970-11-18 Omron Tateisi Electronics Co An automatic water supply system
FR2181467B1 (fr) * 1972-04-25 1974-07-26 Thomson Csf
FR2274122A1 (fr) * 1974-06-07 1976-01-02 Cgr Mev Procede de centrage d'un faisceau de balayage a rayonnement ionisant et dispositif permettant la mise en oeuvre de ce procede
JPS59163506A (ja) * 1983-03-09 1984-09-14 Hitachi Ltd 電子ビ−ム測長装置
US4560854A (en) * 1983-12-27 1985-12-24 The Babcock & Wilcox Company Electron beam welder control

Also Published As

Publication number Publication date
US4721842A (en) 1988-01-26
EP0280714B1 (fr) 1993-03-17
DE3784915T2 (de) 1993-07-08
EP0280714A1 (fr) 1988-09-07
DE3784915D1 (de) 1993-04-22
IL83675A0 (en) 1988-01-31
EP0280714A4 (fr) 1989-11-14
WO1988001551A1 (fr) 1988-03-10
CA1285621C (fr) 1991-07-02
ES2005280A6 (es) 1989-03-01

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Legal Events

Date Code Title Description
KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees