IL84234A0 - Method of and apparatus for enhancing plating bath stability in electroless copper purification process - Google Patents
Method of and apparatus for enhancing plating bath stability in electroless copper purification processInfo
- Publication number
- IL84234A0 IL84234A0 IL84234A IL8423487A IL84234A0 IL 84234 A0 IL84234 A0 IL 84234A0 IL 84234 A IL84234 A IL 84234A IL 8423487 A IL8423487 A IL 8423487A IL 84234 A0 IL84234 A0 IL 84234A0
- Authority
- IL
- Israel
- Prior art keywords
- plating bath
- purification process
- electroless copper
- bath stability
- copper purification
- Prior art date
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- 229910052802 copper Inorganic materials 0.000 title 1
- 239000010949 copper Substances 0.000 title 1
- 230000002708 enhancing effect Effects 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000007747 plating Methods 0.000 title 1
- 238000000746 purification Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1617—Purification and regeneration of coating baths
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemically Coating (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/923,233 US4719128A (en) | 1986-10-27 | 1986-10-27 | Method of and apparatus for bailout elimination and for enhancing plating bath stability in electrosynthesis/electrodialysis electroless copper purification process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL84234A0 true IL84234A0 (en) | 1988-03-31 |
Family
ID=25448354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL84234A IL84234A0 (en) | 1986-10-27 | 1987-10-21 | Method of and apparatus for enhancing plating bath stability in electroless copper purification process |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4719128A (da) |
| EP (1) | EP0266122A3 (da) |
| JP (1) | JPS63114980A (da) |
| KR (1) | KR880005287A (da) |
| AU (1) | AU8009487A (da) |
| CA (1) | CA1270703A (da) |
| DK (1) | DK559687A (da) |
| IL (1) | IL84234A0 (da) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4938853A (en) | 1989-05-10 | 1990-07-03 | Macdermid, Incorporated | Electrolytic method for the dissolution of copper particles formed during electroless copper deposition |
| US5732724A (en) * | 1996-05-15 | 1998-03-31 | Ecolab Inc. | Sink mounted water agitation |
| AUPO399596A0 (en) * | 1996-12-02 | 1997-01-02 | Resmed Limited | A harness assembly for a nasal mask |
| KR100398417B1 (ko) * | 1999-08-10 | 2003-09-19 | 주식회사 포스코 | 전기도금폐수 처리방법 |
| JP2001107258A (ja) * | 1999-10-06 | 2001-04-17 | Hitachi Ltd | 無電解銅めっき方法とめっき装置および多層配線基板 |
| JP4024497B2 (ja) * | 2001-07-25 | 2007-12-19 | シャープ株式会社 | 異物除去機構,液流処理装置および異物除去方法 |
| KR100792747B1 (ko) * | 2001-09-27 | 2008-01-11 | 주식회사 포스코 | 용융아연도금 액 보충장치 |
| US20040072011A1 (en) * | 2002-10-10 | 2004-04-15 | Centro De Investigaciq Materiales Avanzados, S.C. | Electroless brass plating method and product-by-process |
| US20040258848A1 (en) * | 2003-05-23 | 2004-12-23 | Akira Fukunaga | Method and apparatus for processing a substrate |
| CN105420698B (zh) * | 2015-12-28 | 2018-08-10 | 湖南省鎏源新能源有限责任公司 | 油田钻杆表面化学镀镀槽 |
| JP6581121B2 (ja) * | 2017-01-17 | 2019-09-25 | 本田技研工業株式会社 | 処理液リサイクル方法および処理液リサイクルシステム |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2606025C2 (de) * | 1976-02-14 | 1978-04-06 | Grundig E.M.V. Elektro-Mechanische Versuchsanstalt Max Grundig, 8510 Fuerth | Verfahren zur Regenerierung von Bädern zur stromlosen Verkupferung |
| US4289597A (en) * | 1979-03-05 | 1981-09-15 | Electrochem International, Inc. | Process for electrodialytically regenerating an electroless plating bath by removing at least a portion of the reacted products |
| US4549946A (en) * | 1984-05-09 | 1985-10-29 | Electrochem International, Inc. | Process and an electrodialytic cell for electrodialytically regenerating a spent electroless copper plating bath |
| US4600493A (en) * | 1985-01-14 | 1986-07-15 | Morton Thiokol, Inc. | Electrodialysis apparatus for the chemical maintenance of electroless copper plating baths |
-
1986
- 1986-10-27 US US06/923,233 patent/US4719128A/en not_active Expired - Fee Related
-
1987
- 1987-10-02 CA CA000548464A patent/CA1270703A/en not_active Expired - Lifetime
- 1987-10-21 IL IL84234A patent/IL84234A0/xx unknown
- 1987-10-21 EP EP87309301A patent/EP0266122A3/en not_active Withdrawn
- 1987-10-23 AU AU80094/87A patent/AU8009487A/en not_active Abandoned
- 1987-10-26 KR KR870011890A patent/KR880005287A/ko not_active Ceased
- 1987-10-26 DK DK559687A patent/DK559687A/da not_active Application Discontinuation
- 1987-10-26 JP JP62268352A patent/JPS63114980A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US4719128A (en) | 1988-01-12 |
| EP0266122A3 (en) | 1989-08-16 |
| CA1270703A (en) | 1990-06-26 |
| EP0266122A2 (en) | 1988-05-04 |
| AU8009487A (en) | 1988-04-28 |
| DK559687A (da) | 1988-04-28 |
| JPS63114980A (ja) | 1988-05-19 |
| KR880005287A (ko) | 1988-06-28 |
| DK559687D0 (da) | 1987-10-26 |
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