IL90599A - Layered structures comprising epitaxial layers and their production - Google Patents

Layered structures comprising epitaxial layers and their production

Info

Publication number
IL90599A
IL90599A IL9059989A IL9059989A IL90599A IL 90599 A IL90599 A IL 90599A IL 9059989 A IL9059989 A IL 9059989A IL 9059989 A IL9059989 A IL 9059989A IL 90599 A IL90599 A IL 90599A
Authority
IL
Israel
Prior art keywords
production
epitaxial layers
layered structures
layered
structures
Prior art date
Application number
IL9059989A
Other languages
English (en)
Other versions
IL90599A0 (en
Original Assignee
Minnesota Mining & Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining & Mfg filed Critical Minnesota Mining & Mfg
Publication of IL90599A0 publication Critical patent/IL90599A0/xx
Publication of IL90599A publication Critical patent/IL90599A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/02—Epitaxial-layer growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C30B23/002—Controlling or regulating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/54—Organic compounds
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/91—Product with molecular orientation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
IL9059989A 1988-07-13 1989-06-13 Layered structures comprising epitaxial layers and their production IL90599A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/219,004 US4940854A (en) 1988-07-13 1988-07-13 Organic thin film controlled molecular epitaxy

Publications (2)

Publication Number Publication Date
IL90599A0 IL90599A0 (en) 1990-01-18
IL90599A true IL90599A (en) 1993-06-10

Family

ID=22817401

Family Applications (1)

Application Number Title Priority Date Filing Date
IL9059989A IL90599A (en) 1988-07-13 1989-06-13 Layered structures comprising epitaxial layers and their production

Country Status (7)

Country Link
US (1) US4940854A (de)
EP (1) EP0352931B1 (de)
JP (1) JP2875817B2 (de)
AU (1) AU613493B2 (de)
CA (1) CA1336568C (de)
DE (1) DE68910032T2 (de)
IL (1) IL90599A (de)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5139592A (en) * 1988-07-13 1992-08-18 Minnesota Mining And Manufacturing Company Low gravity enhanced growth of phthalocyanine polymorphs and films
JP2666536B2 (ja) * 1990-08-09 1997-10-22 日本電気株式会社 有機薄膜とその形成方法
US5444473A (en) * 1990-11-15 1995-08-22 Canon Kabushiki Kaisha Ink jet recording apparatus
US5327373A (en) * 1992-08-21 1994-07-05 Board Of Regents, The University Of Texas System Optoelectronic memories with photoconductive thin films
US5674592A (en) * 1995-05-04 1997-10-07 Minnesota Mining And Manufacturing Company Functionalized nanostructured films
EP0781355B1 (de) * 1995-07-24 2001-09-19 International Business Machines Corporation Epitaxie-schichtstruktur
JP2004014311A (ja) * 2002-06-07 2004-01-15 Sony Corp 有機薄膜の形成方法
US20040224182A1 (en) * 2003-01-07 2004-11-11 Lazarev Pavel I. Backlight polar organic light-emitting device
US7166161B2 (en) * 2003-01-17 2007-01-23 Nitto Denko Corporation Anisotropic film manufacturing
US20050271893A1 (en) * 2004-06-04 2005-12-08 Applied Microstructures, Inc. Controlled vapor deposition of multilayered coatings adhered by an oxide layer
US7291223B2 (en) * 2003-09-24 2007-11-06 Nitto Denko Corporation Epitaxial organic layered structure and method for making
US20060165150A1 (en) * 2005-01-27 2006-07-27 Hul-Chun Hsu Method and apparatus for examining heat pipe temperature using infrared thermography
US7514721B2 (en) * 2005-11-29 2009-04-07 Koninklijke Philips Electronics N.V. Luminescent ceramic element for a light emitting device
GB2444491A (en) * 2006-12-06 2008-06-11 Univ Muenster Wilhelms Selective growth of organic molecules
US8900695B2 (en) * 2007-02-23 2014-12-02 Applied Microstructures, Inc. Durable conformal wear-resistant carbon-doped metal oxide-comprising coating
US20080248263A1 (en) * 2007-04-02 2008-10-09 Applied Microstructures, Inc. Method of creating super-hydrophobic and-or super-hydrophilic surfaces on substrates, and articles created thereby
US8236379B2 (en) * 2007-04-02 2012-08-07 Applied Microstructures, Inc. Articles with super-hydrophobic and-or super-hydrophilic surfaces and method of formation
US8481231B2 (en) * 2009-05-14 2013-07-09 GM Global Technology Operations LLC Preparation of nanostructured thin catalytic layer-based electrode ink
US8512908B2 (en) 2009-05-14 2013-08-20 GM Global Technology Operations LLC Fabrication of catalyst coated diffusion media layers containing nanostructured thin catalytic layers
US8802329B2 (en) 2009-05-14 2014-08-12 GM Global Technology Operations LLC Electrode containing nanostructured thin catalytic layers and method of making
US8507152B2 (en) * 2009-05-14 2013-08-13 GM Global Technology Operations LLC Fabrication of electrodes with multiple nanostructured thin catalytic layers
US8445164B2 (en) 2010-05-27 2013-05-21 GM Global Technology Operations LLC Electrode containing nanostructured thin catalytic layers and method of making
US8518596B1 (en) 2012-05-16 2013-08-27 GM Global Technology Operations LLC Low cost fuel cell diffusion layer configured for optimized anode water management
TWI639179B (zh) * 2014-01-31 2018-10-21 美商蘭姆研究公司 真空整合硬遮罩製程及設備
US10796912B2 (en) 2017-05-16 2020-10-06 Lam Research Corporation Eliminating yield impact of stochastics in lithography
US12211691B2 (en) 2018-12-20 2025-01-28 Lam Research Corporation Dry development of resists
TW202514246A (zh) 2019-03-18 2025-04-01 美商蘭姆研究公司 基板處理方法與設備
US12062538B2 (en) 2019-04-30 2024-08-13 Lam Research Corporation Atomic layer etch and selective deposition process for extreme ultraviolet lithography resist improvement
TWI837391B (zh) 2019-06-26 2024-04-01 美商蘭姆研究公司 利用鹵化物化學品的光阻顯影
KR20250160237A (ko) 2019-06-28 2025-11-11 램 리써치 코포레이션 복수의 패터닝 복사-흡수 엘리먼트들 및/또는 수직 조성 경사를 갖는 포토레지스트
SG11202108851RA (en) 2020-01-15 2021-09-29 Lam Res Corp Underlayer for photoresist adhesion and dose reduction
US11639559B2 (en) * 2020-02-25 2023-05-02 Meta Platforms Technologies, Llc High refractive index optical device formed based on solid crystal and fabrication method thereof
CN115244664A (zh) 2020-02-28 2022-10-25 朗姆研究公司 用于减少euv图案化缺陷的多层硬掩模
EP4078292A4 (de) 2020-07-07 2023-11-22 Lam Research Corporation Integrierte trockenverfahren zur strukturierung von fotolackmustern mittels strahlung
US12140730B2 (en) * 2020-07-28 2024-11-12 Meta Platforms Technologies, Inc. High refractive index birefringent organic solid crystal and methods of making thereof
US20230107357A1 (en) 2020-11-13 2023-04-06 Lam Research Corporation Process tool for dry removal of photoresist
JP7681106B2 (ja) 2020-12-08 2025-05-21 ラム リサーチ コーポレーション 有機蒸気によるフォトレジストの現像
US12031228B2 (en) 2021-07-21 2024-07-09 Meta Platforms Technologies, Llc Organic solid crystal—method and structure
KR102725782B1 (ko) 2022-07-01 2024-11-05 램 리써치 코포레이션 에칭 정지 억제 (etch stop deterrence) 를 위한 금속 옥사이드 기반 포토레지스트의 순환적 현상
US12474640B2 (en) 2023-03-17 2025-11-18 Lam Research Corporation Integration of dry development and etch processes for EUV patterning in a single process chamber
JP7852072B2 (ja) 2023-07-27 2026-04-27 ラム リサーチ コーポレーション 金属含有フォトレジストのためのオールインワン乾式現像

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1268422A (en) * 1968-08-30 1972-03-29 Xerox Corp Phthalocyanine compositions and methods of preparation
US4016331A (en) * 1976-01-26 1977-04-05 The Trustees Of The University Of Pennsylvania Composite polymeric material formed with an epitaxial crystalline film of polymeric sulfur nitride, and method of preparing same
US4536450A (en) * 1980-03-12 1985-08-20 University Patents, Inc. Nonlinear optical materials and processes employing diacetylenes
US4554076A (en) * 1982-08-18 1985-11-19 Georgia Tech Research Corporation Method of modifying membrane surface with oriented monolayers of amphiphilic compounds
US4531809A (en) * 1983-09-08 1985-07-30 Gte Laboratories Incorporated Optical waveguide coupling device
US4812352A (en) * 1986-08-25 1989-03-14 Minnesota Mining And Manufacturing Company Article having surface layer of uniformly oriented, crystalline, organic microstructures

Also Published As

Publication number Publication date
US4940854A (en) 1990-07-10
EP0352931A1 (de) 1990-01-31
EP0352931B1 (de) 1993-10-20
DE68910032D1 (de) 1993-11-25
AU613493B2 (en) 1991-08-01
CA1336568C (en) 1995-08-08
DE68910032T2 (de) 1994-05-05
AU3647589A (en) 1990-01-18
IL90599A0 (en) 1990-01-18
JPH0297498A (ja) 1990-04-10
JP2875817B2 (ja) 1999-03-31

Similar Documents

Publication Publication Date Title
IL90599A0 (en) Layered structures comprising epitaxial layers and their production
EP0326408A3 (en) Multilayered molding and method of manufacturing the same
EP0297552A3 (en) Composite structures and methods of manufacturing the same
GB2220341B (en) Composite agrotextile and its applications
EP0415758A3 (en) Stretchable laminate constructions and manufacturing process
EP0367187A3 (en) A composite rope and manufacturing method for the same
IL90658A0 (en) Particle-filled microporous materials and their production
EP0300499A3 (en) Composite superconductor layer
GB8626610D0 (en) Producing composite material
ZA901701B (en) Composite polyester films,their production and use
ZA89186B (en) Green diamond and method or producing the same
EP0350927A3 (en) Composite bar structures of interlocked multiple members and method of producing the same
IL90868A0 (en) Multilayered structures
GB8505660D0 (en) Composite layered material
GB8802079D0 (en) Producing semiconductor layers
DE3473577D1 (en) Composite material and the production thereof
EP0326930A3 (en) Planar multilayered magnetooptical-recording material
IL85461A0 (en) Superconductors and their production
GB8518231D0 (en) Producing layered structures
JPS6431943A (en) Composite material and its production
IL92027A0 (en) Aryloxyaldehydes and their manufacture
GB2236526B (en) Lightweight formed body and producing the same
ZA897772B (en) Organotinfluorides and their manufacture
GB2216143B (en) Composite material and method for manufacturing it
GB2222974B (en) Manufacture of composite materials

Legal Events

Date Code Title Description
KB Patent renewed
KB Patent renewed
KB Patent renewed