IN2012CH05191A - - Google Patents

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Publication number
IN2012CH05191A
IN2012CH05191A IN5191CH2012A IN2012CH05191A IN 2012CH05191 A IN2012CH05191 A IN 2012CH05191A IN 5191CH2012 A IN5191CH2012 A IN 5191CH2012A IN 2012CH05191 A IN2012CH05191 A IN 2012CH05191A
Authority
IN
India
Application number
Other languages
English (en)
Inventor
Krupakar Murali Subramanian
Original Assignee
Krupakar Murali Subramanian
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krupakar Murali Subramanian filed Critical Krupakar Murali Subramanian
Priority to IN5191CH2012 priority Critical patent/IN2012CH05191A/en
Priority to EP13861587.7A priority patent/EP3036967A4/fr
Priority to US14/651,549 priority patent/US20150318149A1/en
Priority to PCT/IB2013/060792 priority patent/WO2014091414A2/fr
Publication of IN2012CH05191A publication Critical patent/IN2012CH05191A/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/02—Details
    • H05B7/06—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/002—Cooling arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
IN5191CH2012 2012-12-13 2012-12-13 IN2012CH05191A (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IN5191CH2012 IN2012CH05191A (fr) 2012-12-13 2012-12-13
EP13861587.7A EP3036967A4 (fr) 2012-12-13 2013-12-11 Systèmes et procédés permettant une décharge de plasma à haute pression
US14/651,549 US20150318149A1 (en) 2012-12-13 2013-12-11 Systems and methods for generating high pressure discharge
PCT/IB2013/060792 WO2014091414A2 (fr) 2012-12-13 2013-12-11 Systèmes et procédés permettant une décharge de plasma à haute pression

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IN5191CH2012 IN2012CH05191A (fr) 2012-12-13 2012-12-13

Publications (1)

Publication Number Publication Date
IN2012CH05191A true IN2012CH05191A (fr) 2015-07-10

Family

ID=50935046

Family Applications (1)

Application Number Title Priority Date Filing Date
IN5191CH2012 IN2012CH05191A (fr) 2012-12-13 2012-12-13

Country Status (4)

Country Link
US (1) US20150318149A1 (fr)
EP (1) EP3036967A4 (fr)
IN (1) IN2012CH05191A (fr)
WO (1) WO2014091414A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6886349B2 (ja) * 2017-05-31 2021-06-16 日本特殊陶業株式会社 プラズマリアクタ

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5403453A (en) * 1993-05-28 1995-04-04 The University Of Tennessee Research Corporation Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
DE19826418C2 (de) * 1998-06-16 2003-07-31 Horst Schmidt-Boecking Vorrichtung zur Erzeugung eines Plasma sowie ein Herstellungsverfahren für die Vorrichtung sowie Verwendung der Vorrichtung
US6955794B2 (en) * 1999-12-15 2005-10-18 Plasmasol Corporation Slot discharge non-thermal plasma apparatus and process for promoting chemical reaction
US6800256B2 (en) * 2000-12-18 2004-10-05 Delphi Technologies, Inc. Scaleable inter-digitized tine non-thermal plasma reactor
DE10229340A1 (de) * 2002-06-29 2004-01-29 Robert Bosch Gmbh Plasmareaktor, Verfahren zu dessen Herstellung und Einrichtung zur Behandlung von Abgasen in Verbrennungsmotoren mit dem Plasmareaktor
EP1631128A4 (fr) * 2003-05-14 2010-07-28 Sekisui Chemical Co Ltd Appareil de traitement au plasma et procede permettant de produire cet appareil
JP4063784B2 (ja) * 2003-05-15 2008-03-19 シャープ株式会社 イオン発生素子、イオン発生装置
US20060162741A1 (en) * 2005-01-26 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma
CN2738870Y (zh) * 2003-10-24 2005-11-09 雅马哈株式会社 使用非平衡等离子体的气体处理装置
EP1905057B1 (fr) * 2005-07-15 2016-03-09 The Board Of Trustees Of The University Of Illinois Reseaux de dispositifs a plasma a microcavites comprenant des electrodes encapsulees dans un dielectrique
US7703479B2 (en) * 2005-10-17 2010-04-27 The University Of Kentucky Research Foundation Plasma actuator
JP4863743B2 (ja) * 2006-03-24 2012-01-25 日本碍子株式会社 プラズマ発生電極、プラズマ反応器及び排ガス浄化装置
GB2449707A (en) * 2007-06-02 2008-12-03 Ozone Clean Ltd Dielectric barrier electrode array
JP2011504404A (ja) * 2007-11-21 2011-02-10 ユニバーシティ オブ フロリダ リサーチ ファウンデーション，インク． プラズマ場を使用する自己滅菌装置
EP2322272B1 (fr) * 2008-07-17 2018-10-03 Kabushiki Kaisha Toshiba Appareil de génération d'un courant d'air et ses procédés de fabrication
EP2317829B1 (fr) * 2008-08-11 2018-12-05 NGK Insulators, Ltd. Dispositif de reformage de gaz et son procédé de fonctionnement
WO2012057271A1 (fr) * 2010-10-27 2012-05-03 京セラ株式会社 Générateur de vent ionique et dispositif générant un vent ionique
WO2012106735A2 (fr) * 2011-02-01 2012-08-09 Moe Medical Devices Llc Traitement de la peau assisté par plasma

Also Published As

Publication number Publication date
WO2014091414A3 (fr) 2017-01-26
WO2014091414A2 (fr) 2014-06-19
US20150318149A1 (en) 2015-11-05
EP3036967A2 (fr) 2016-06-29
EP3036967A4 (fr) 2018-03-14

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