Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
  • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
  • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
  • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
  • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/16—Vessels; Containers
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
  • H01J2237/02—Details
  • H01J2237/0216—Means for avoiding or correcting vibration effects

Landscapes

• Engineering & Computer Science (AREA)
• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• General Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Acoustics & Sound (AREA)
• Aviation & Aerospace Engineering (AREA)
• Mechanical Engineering (AREA)
• Analysing Materials By The Use Of Radiation (AREA)
• Vibration Prevention Devices (AREA)
• Electron Sources, Ion Sources (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=43528997

Family Applications (1)

Country Status (7)

Families Citing this family (2)

Family Cites Families (16)

• 2010
  • 2010-07-20 US US13/387,424 patent/US8809782B2/en active Active
  • 2010-07-20 DE DE112010003102.9T patent/DE112010003102B4/de active Active
  • 2010-07-20 KR KR1020127002432A patent/KR101364289B1/ko active Active
  • 2010-07-20 WO PCT/JP2010/004636 patent/WO2011013323A1/ja not_active Ceased
  • 2010-07-20 JP JP2011524643A patent/JP5241922B2/ja active Active
  • 2010-07-20 IN IN837DEN2012 patent/IN2012DN00837A/en unknown
  • 2010-07-20 CN CN201080031156.6A patent/CN102473577B/zh active Active

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