IN2012DN01896A - - Google Patents

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Publication number
IN2012DN01896A
IN2012DN01896A IN1896DEN2012A IN2012DN01896A IN 2012DN01896 A IN2012DN01896 A IN 2012DN01896A IN 1896DEN2012 A IN1896DEN2012 A IN 1896DEN2012A IN 2012DN01896 A IN2012DN01896 A IN 2012DN01896A
Authority
IN
India
Prior art keywords
image
phase
optical
topography
projected
Prior art date
Application number
Inventor
John Weston Nicholas
Ruth Huddart Yvonne
Original Assignee
Renishaw Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw Plc filed Critical Renishaw Plc
Publication of IN2012DN01896A publication Critical patent/IN2012DN01896A/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

A non-contact method of inspecting the topography of an area of an object via analysis of the phase of a pattern projected on the object. The method comprises taking a first image of the object, obtained from a first perspective, on which an optical pattern is projected, and taking a second image of the object, obtained from a second perspective, on which an optical pat¬tern is projected but in which the optical pattern, as it falls on the object, in the second image differs to that in the first image. The method farther comprises determining data describing the topography of at least a region of the object based on phase data relat¬ing to the phase of at least a region of the optical partem as imaged in the first image. Phase data obtained from a corresponding region of the object as imaged in the second image is used to resolve any ambiguity in the phase or topography data obtained from the first image.
IN1896DEN2012 2009-09-11 2010-09-06 IN2012DN01896A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0915904.7A GB0915904D0 (en) 2009-09-11 2009-09-11 Non-contact object inspection
PCT/GB2010/001675 WO2011030090A1 (en) 2009-09-11 2010-09-06 Non-contact object inspection

Publications (1)

Publication Number Publication Date
IN2012DN01896A true IN2012DN01896A (en) 2015-07-24

Family

ID=41228144

Family Applications (1)

Application Number Title Priority Date Filing Date
IN1896DEN2012 IN2012DN01896A (en) 2009-09-11 2010-09-06

Country Status (7)

Country Link
US (1) US9329030B2 (en)
EP (1) EP2475954B1 (en)
JP (1) JP5757950B2 (en)
CN (1) CN102483319B (en)
GB (1) GB0915904D0 (en)
IN (1) IN2012DN01896A (en)
WO (1) WO2011030090A1 (en)

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Also Published As

Publication number Publication date
EP2475954A1 (en) 2012-07-18
JP5757950B2 (en) 2015-08-05
JP2013504752A (en) 2013-02-07
CN102483319B (en) 2015-04-22
US20120154576A1 (en) 2012-06-21
GB0915904D0 (en) 2009-10-14
WO2011030090A1 (en) 2011-03-17
EP2475954B1 (en) 2016-12-28
CN102483319A (en) 2012-05-30
US9329030B2 (en) 2016-05-03

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