IT1070563B - Apparecchiatura perfezionata per l impiantamento di ioni - Google Patents

Apparecchiatura perfezionata per l impiantamento di ioni

Info

Publication number
IT1070563B
IT1070563B IT27577/76A IT2757776A IT1070563B IT 1070563 B IT1070563 B IT 1070563B IT 27577/76 A IT27577/76 A IT 27577/76A IT 2757776 A IT2757776 A IT 2757776A IT 1070563 B IT1070563 B IT 1070563B
Authority
IT
Italy
Prior art keywords
ion implantation
improved equipment
equipment
improved
implantation
Prior art date
Application number
IT27577/76A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1070563B publication Critical patent/IT1070563B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
IT27577/76A 1975-11-14 1976-09-24 Apparecchiatura perfezionata per l impiantamento di ioni IT1070563B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63198675A 1975-11-14 1975-11-14

Publications (1)

Publication Number Publication Date
IT1070563B true IT1070563B (it) 1985-03-29

Family

ID=24533608

Family Applications (1)

Application Number Title Priority Date Filing Date
IT27577/76A IT1070563B (it) 1975-11-14 1976-09-24 Apparecchiatura perfezionata per l impiantamento di ioni

Country Status (3)

Country Link
US (1) US4103042A (it)
JP (1) JPS5261898A (it)
IT (1) IT1070563B (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1592063A (en) * 1978-05-08 1981-07-01 Chloride Silent Power Ltd Sodium sulphur cells
US4703718A (en) * 1985-11-29 1987-11-03 Rca Corporation Vapor deposition apparatus and method of using same
CA2065581C (en) 1991-04-22 2002-03-12 Andal Corp. Plasma enhancement apparatus and method for physical vapor deposition
US6238537B1 (en) * 1998-08-06 2001-05-29 Kaufman & Robinson, Inc. Ion assisted deposition source
US7807961B2 (en) * 2008-10-08 2010-10-05 Varian Semiconductor Equipment Associates, Inc. Techniques for ion implantation of molecular ions
JP5321234B2 (ja) * 2009-05-15 2013-10-23 日新イオン機器株式会社 イオン源

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1659749A (en) * 1920-12-04 1928-02-21 Gen Electric Electric incandescent lamp and method of manufacturing its illuminating body
US1566848A (en) * 1922-01-26 1925-12-22 Gen Electric Incandescent lamp
NL11667C (it) * 1922-03-02
US1664136A (en) * 1927-05-03 1928-03-27 Gen Electric Method and apparatus for treating filaments
US2367331A (en) * 1941-12-08 1945-01-16 Gen Electric Cathode construction
US3107180A (en) * 1961-01-26 1963-10-15 Gen Electric Process for deposition of pyrolytic graphite

Also Published As

Publication number Publication date
US4103042A (en) 1978-07-25
JPS5261898A (en) 1977-05-21

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