IT1101412B - Metodo per la preparazione di pellicole sottili - Google Patents

Metodo per la preparazione di pellicole sottili

Info

Publication number
IT1101412B
IT1101412B IT29765/78A IT2976578A IT1101412B IT 1101412 B IT1101412 B IT 1101412B IT 29765/78 A IT29765/78 A IT 29765/78A IT 2976578 A IT2976578 A IT 2976578A IT 1101412 B IT1101412 B IT 1101412B
Authority
IT
Italy
Prior art keywords
preparation
thin films
films
thin
Prior art date
Application number
IT29765/78A
Other languages
English (en)
Other versions
IT7829765A0 (it
Original Assignee
Ici Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ici Ltd filed Critical Ici Ltd
Publication of IT7829765A0 publication Critical patent/IT7829765A0/it
Application granted granted Critical
Publication of IT1101412B publication Critical patent/IT1101412B/it

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/29Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by the substrates
    • H10P14/2901Materials
    • H10P14/2922Materials being non-crystalline insulating materials, e.g. glass or polymers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/169Photovoltaic cells having only PN heterojunction potential barriers comprising Cu2X/CdX heterojunctions, wherein X is a Group VI element, e.g. Cu2O/CdO PN heterojunction photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/125The active layers comprising only Group II-VI materials, e.g. CdS, ZnS or CdTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/26Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition
    • H10P14/265Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials using liquid deposition using solutions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/32Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by intermediate layers between substrates and deposited layers
    • H10P14/3202Materials thereof
    • H10P14/3241Materials thereof being conductive materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3424Deposited materials, e.g. layers characterised by the chemical composition being Group IIB-VIA materials
    • H10P14/3428Sulfides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3424Deposited materials, e.g. layers characterised by the chemical composition being Group IIB-VIA materials
    • H10P14/3431Selenides
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34Deposited materials, e.g. layers
    • H10P14/3402Deposited materials, e.g. layers characterised by the chemical composition
    • H10P14/3436Deposited materials, e.g. layers characterised by the chemical composition being chalcogenide semiconductor materials not being oxides, e.g. ternary compounds
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69Inorganic materials
    • H10P14/694Inorganic materials composed of nitrides
    • H10P14/6943Inorganic materials composed of nitrides containing silicon
    • H10P14/69433Inorganic materials composed of nitrides containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
    • H10P34/40Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
    • H10P34/42Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90Thermal treatments, e.g. annealing or sintering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/20Light-sensitive devices
    • H01G9/2004Light-sensitive devices characterised by the electrolyte, e.g. comprising an organic electrolyte
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/543Solar cells from Group II-VI materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
IT29765/78A 1977-11-15 1978-11-14 Metodo per la preparazione di pellicole sottili IT1101412B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4744377 1977-11-15

Publications (2)

Publication Number Publication Date
IT7829765A0 IT7829765A0 (it) 1978-11-14
IT1101412B true IT1101412B (it) 1985-09-28

Family

ID=10444991

Family Applications (1)

Application Number Title Priority Date Filing Date
IT29765/78A IT1101412B (it) 1977-11-15 1978-11-14 Metodo per la preparazione di pellicole sottili

Country Status (6)

Country Link
US (1) US4204933A (it)
EP (1) EP0002109B1 (it)
JP (1) JPS5485670A (it)
AU (1) AU526454B2 (it)
DE (1) DE2861418D1 (it)
IT (1) IT1101412B (it)

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JPS55500237A (it) * 1978-04-27 1980-04-24
GB2033355B (en) * 1978-09-07 1982-05-06 Standard Telephones Cables Ltd Semiconductor processing
IL57908A0 (en) * 1979-07-07 1979-11-30 Yeda Res & Dev Photovoltaic materials
US4345967A (en) * 1980-03-04 1982-08-24 Cook Melvin S Method of producing thin single-crystal sheets
US4261802A (en) * 1980-02-21 1981-04-14 Ametek, Inc. Method of making a photovoltaic cell
US4354198A (en) * 1980-05-30 1982-10-12 International Business Machines Corporation Zinc-sulphide capping layer for gallium-arsenide device
US4396485A (en) * 1981-05-04 1983-08-02 Diamond Shamrock Corporation Film photoelectrodes
US4419278A (en) * 1981-05-04 1983-12-06 Diamond Shamrock Corporation Photoactive semiconductor material using true solid/solid solution mixed metal oxide
US4500397A (en) * 1981-07-27 1985-02-19 Sony Corporation Method for the preparation of a pyroelectric material
US4493886A (en) * 1982-05-11 1985-01-15 University Patents, Inc. Composition and method for forming amorphous chalcogenide films from solution
US4439464A (en) * 1982-05-11 1984-03-27 University Patents, Inc. Composition and method for forming amorphous chalcogenide films from solution
JPH0699808B2 (ja) * 1985-12-19 1994-12-07 松下電器産業株式会社 硫化カドミウム薄膜の形成方法
US4801476A (en) * 1986-09-24 1989-01-31 Exxon Research And Engineering Company Method for production of large area 2-dimensional arrays of close packed colloidal particles
US5270229A (en) * 1989-03-07 1993-12-14 Matsushita Electric Industrial Co., Ltd. Thin film semiconductor device and process for producing thereof
US5128064A (en) * 1989-04-18 1992-07-07 Wisconsin Alumni Research Foundation Cadmium sulfide membranes
US5059346A (en) * 1989-04-18 1991-10-22 Wisconsin Alumni Research Foundation Cadmium sulfide membranes
FR2682401B1 (fr) * 1991-10-09 1993-11-26 Sochata Procede de depot electrophoretique de poudre metallique pour rechargement de pieces par brasage-diffusion et bain utilise.
JP2967908B2 (ja) * 1994-09-21 1999-10-25 矢崎総業株式会社 分散めっき法と太陽電池の製造方法
JP2003265962A (ja) * 2002-03-18 2003-09-24 Nittetsu Mining Co Ltd 光触媒およびその製造方法
JP4357801B2 (ja) * 2002-06-25 2009-11-04 日鉄鉱業株式会社 高活性光触媒およびその製造方法
DE10228937A1 (de) 2002-06-28 2004-01-15 Philips Intellectual Property & Standards Gmbh Elektrolumineszierende Vorrichtung mit verbesserter Lichtauskopplung
US7247222B2 (en) * 2002-07-24 2007-07-24 Applied Materials, Inc. Electrochemical processing cell
US7128823B2 (en) 2002-07-24 2006-10-31 Applied Materials, Inc. Anolyte for copper plating
US7422709B2 (en) * 2004-05-21 2008-09-09 Crosby Gernon Electromagnetic rheological (EMR) fluid and method for using the EMR fluid
EP1882275A1 (en) * 2005-05-17 2008-01-30 Interuniversitair Microelektronica Centrum Vzw Method for the production of photovoltaic cells
KR100651919B1 (ko) * 2005-09-29 2006-12-01 엘지전자 주식회사 녹화 속도 조절 기능을 갖는 이동통신단말기 및 이를이용한 방법
US8071179B2 (en) 2007-06-29 2011-12-06 Stion Corporation Methods for infusing one or more materials into nano-voids if nanoporous or nanostructured materials
DE212009000031U1 (de) * 2008-03-05 2010-11-04 Global Solar Energy, Inc., Tuscon Vorrichtung zum Aufbringen einer dünnschichtigen Pufferschicht auf einen flexiblen Träger
US9252318B2 (en) 2008-03-05 2016-02-02 Hanergy Hi-Tech Power (Hk) Limited Solution containment during buffer layer deposition
WO2009111052A1 (en) * 2008-03-05 2009-09-11 Global Solar Energy, Inc. Heating for buffer layer deposition
US20100087015A1 (en) * 2008-03-05 2010-04-08 Global Solar Energy, Inc. Feedback for buffer layer deposition
JP5738601B2 (ja) 2008-03-05 2015-06-24 ハナジー・ハイ−テク・パワー・(エイチケー)・リミテッド 薄膜太陽電池セルのための緩衝層蒸着
US8383450B2 (en) * 2008-09-30 2013-02-26 Stion Corporation Large scale chemical bath system and method for cadmium sulfide processing of thin film photovoltaic materials
US7947524B2 (en) 2008-09-30 2011-05-24 Stion Corporation Humidity control and method for thin film photovoltaic materials
US20110018103A1 (en) * 2008-10-02 2011-01-27 Stion Corporation System and method for transferring substrates in large scale processing of cigs and/or cis devices
US8241943B1 (en) 2009-05-08 2012-08-14 Stion Corporation Sodium doping method and system for shaped CIGS/CIS based thin film solar cells
US8372684B1 (en) 2009-05-14 2013-02-12 Stion Corporation Method and system for selenization in fabricating CIGS/CIS solar cells
US8507786B1 (en) 2009-06-27 2013-08-13 Stion Corporation Manufacturing method for patterning CIGS/CIS solar cells
US8398772B1 (en) 2009-08-18 2013-03-19 Stion Corporation Method and structure for processing thin film PV cells with improved temperature uniformity
US8859880B2 (en) * 2010-01-22 2014-10-14 Stion Corporation Method and structure for tiling industrial thin-film solar devices
US8142521B2 (en) * 2010-03-29 2012-03-27 Stion Corporation Large scale MOCVD system for thin film photovoltaic devices
US9096930B2 (en) 2010-03-29 2015-08-04 Stion Corporation Apparatus for manufacturing thin film photovoltaic devices
US9136406B2 (en) * 2010-07-07 2015-09-15 Toyota Motor Engineering & Manufacturing North America, Inc. Solar cell assembly with diffraction gratings
US8461061B2 (en) 2010-07-23 2013-06-11 Stion Corporation Quartz boat method and apparatus for thin film thermal treatment
US8748216B2 (en) 2010-10-25 2014-06-10 Imra America, Inc. Non-vacuum method for fabrication of a photovoltaic absorber layer
US8409906B2 (en) 2010-10-25 2013-04-02 Imra America, Inc. Non-vacuum method for fabrication of a photovoltaic absorber layer

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BE621339A (it) * 1961-08-30 1900-01-01
DE1171995B (de) * 1962-02-08 1964-06-11 Ibm Deutschland Verfahren zum Aufbringen von Fotoelementen auf nichtleitende Traeger
US3480535A (en) * 1966-07-07 1969-11-25 Trw Inc Sputter depositing semiconductor material and forming semiconductor junctions through a molten layer
US3585088A (en) * 1968-10-18 1971-06-15 Ibm Methods of producing single crystals on supporting substrates
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US4034127A (en) * 1975-03-31 1977-07-05 Rca Corporation Method of forming and treating cadmium selenide photoconductive bodies
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US4011149A (en) * 1975-11-17 1977-03-08 Allied Chemical Corporation Photoelectrolysis of water by solar radiation
US4059461A (en) * 1975-12-10 1977-11-22 Massachusetts Institute Of Technology Method for improving the crystallinity of semiconductor films by laser beam scanning and the products thereof
GB1573320A (en) * 1976-05-17 1980-08-20 Ici Ltd Electrophopretic deposition of inorganic films
US4087293A (en) * 1977-01-06 1978-05-02 Honeywell Inc. Silicon as donor dopant in Hg1-x Cdx Te
US4101341A (en) * 1977-05-04 1978-07-18 Battelle Development Corporation CdSe-SnSe photovoltaic cell

Also Published As

Publication number Publication date
DE2861418D1 (en) 1982-01-28
JPS5485670A (en) 1979-07-07
EP0002109A1 (en) 1979-05-30
AU526454B2 (en) 1983-01-13
EP0002109B1 (en) 1981-12-02
IT7829765A0 (it) 1978-11-14
US4204933A (en) 1980-05-27
AU4122678A (en) 1979-05-24

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