IT1114695B - Apparecchiatura per il trasporto di oggetti quali wafer semiconduttori - Google Patents

Apparecchiatura per il trasporto di oggetti quali wafer semiconduttori

Info

Publication number
IT1114695B
IT1114695B IT30928/77A IT3092877A IT1114695B IT 1114695 B IT1114695 B IT 1114695B IT 30928/77 A IT30928/77 A IT 30928/77A IT 3092877 A IT3092877 A IT 3092877A IT 1114695 B IT1114695 B IT 1114695B
Authority
IT
Italy
Prior art keywords
transport
objects
equipment
semiconductor wafers
wafers
Prior art date
Application number
IT30928/77A
Other languages
English (en)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1114695B publication Critical patent/IT1114695B/it

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/36—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chutes (AREA)
IT30928/77A 1976-12-27 1977-12-20 Apparecchiatura per il trasporto di oggetti quali wafer semiconduttori IT1114695B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/754,306 US4081201A (en) 1976-12-27 1976-12-27 Wafer air film transportation system

Publications (1)

Publication Number Publication Date
IT1114695B true IT1114695B (it) 1986-01-27

Family

ID=25034226

Family Applications (1)

Application Number Title Priority Date Filing Date
IT30928/77A IT1114695B (it) 1976-12-27 1977-12-20 Apparecchiatura per il trasporto di oggetti quali wafer semiconduttori

Country Status (8)

Country Link
US (1) US4081201A (it)
JP (1) JPS5382273A (it)
BR (1) BR7708209A (it)
DE (1) DE2754228A1 (it)
FR (1) FR2375115A1 (it)
GB (1) GB1594791A (it)
IT (1) IT1114695B (it)
NL (1) NL7714379A (it)

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US4165132A (en) * 1977-02-28 1979-08-21 International Business Machines Corporation Pneumatic control of the motion of objects suspended on an air film
CA1097770A (en) * 1977-02-28 1981-03-17 Robert L. Judge Controls for semiconductor wafer orientor
US4293249A (en) * 1980-03-03 1981-10-06 Texas Instruments Incorporated Material handling system and method for manufacturing line
US4348139A (en) * 1980-04-30 1982-09-07 International Business Machines Corp. Gas film wafer transportation system
JPS5727827A (en) * 1980-07-03 1982-02-15 Ibm Body transporter
US4395165A (en) * 1980-12-19 1983-07-26 International Business Machine Corp. Chip shuttle track
EP0059835A1 (en) * 1981-03-05 1982-09-15 The Perkin-Elmer Corporation Laterally stable air track
JPS57207128A (en) * 1981-06-15 1982-12-18 Daido Steel Co Ltd Correcting method for snaking
NL8103979A (nl) * 1981-08-26 1983-03-16 Bok Edward Methode en inrichting voor het aanbrengen van een film vloeibaar medium op een substraat.
US4600471A (en) * 1981-08-26 1986-07-15 Integrated Automation, Limited Method and apparatus for transport and processing of substrate with developing agent
US4493548A (en) * 1982-03-26 1985-01-15 Eastman Kodak Company Apparatus for supporting flexible members
US4453709A (en) * 1982-05-07 1984-06-12 Crown Zellerbach Corporation System for serially conveying discrete flexible articles
NL8203318A (nl) * 1982-08-24 1984-03-16 Integrated Automation Inrichting voor processing van substraten.
US4563635A (en) * 1983-05-16 1986-01-07 Wagner Delmer W Moisture measuring method and apparatus
FR2586159A1 (fr) * 1985-08-07 1987-02-13 Comptoir Europ Mat Electro Machine de casse
GB2228243A (en) * 1989-02-16 1990-08-22 Ibm Air bed transfer track.
GB9001234D0 (en) * 1990-01-19 1990-03-21 Morris Christopher P Improvements relating to conveying and separation apparatus
IT1238402B (it) * 1990-05-11 1993-07-26 Gd Spa Unita' di alimentazione di prodotti ad una macchina operatrice
US5209387A (en) * 1990-09-20 1993-05-11 Eastman Kodak Company Gas film conveyor for elongated strips of web material
US5518360A (en) * 1990-11-16 1996-05-21 Kabushiki-Kaisha Watanabe Shoko Wafer carrying device and wafer carrying method
US5483984A (en) * 1992-07-10 1996-01-16 Donlan, Jr.; Fraser P. Fluid treatment apparatus and method
US5788425A (en) * 1992-07-15 1998-08-04 Imation Corp. Flexible system for handling articles
JPH06255775A (ja) * 1993-03-05 1994-09-13 Ochiai Nekusasu:Kk 搬送装置
US5432653A (en) * 1993-06-22 1995-07-11 Minnesota Mining And Manufacturing Company Loop-shaped pneumatic drive
US5344365A (en) * 1993-09-14 1994-09-06 Sematech, Inc. Integrated building and conveying structure for manufacturing under ultraclean conditions
US5485325A (en) * 1994-04-04 1996-01-16 Minnesota Mining And Manufacturing Company Magazine storage system for recording strips
DE19620234A1 (de) * 1996-05-20 1997-11-27 Holtronic Technologies Ltd Verfahren und Vorrichtung zum Positionieren eines Substrats
DE19857142C2 (de) * 1998-12-11 2000-12-21 Fraunhofer Ges Forschung Vorrichtung zum kontaminationsfreien, kontinuierlichen oder getakteten Transport von scheibenförmigen Gegenständen, insbesondere Substraten oder Wafern, durch eine geschlossene Behandlungsstrecke
GB2353269A (en) * 1999-08-20 2001-02-21 Markem Tech Ltd Method and apparatus for conveying lamina objects
US6344106B1 (en) 2000-06-12 2002-02-05 International Business Machines Corporation Apparatus, and corresponding method, for chemically etching substrates
EP1184315A3 (de) * 2000-08-31 2003-09-10 Heidelberger Druckmaschinen Aktiengesellschaft Glättvorrichtung für flächige Bedruckstoffe
DE10319379A1 (de) 2003-04-30 2004-11-25 Applied Films Gmbh & Co. Kg Vorrichtung zum Transportieren eines flachen Substrats in einer Vakuumkammer
DE102004057904A1 (de) 2003-12-01 2005-06-30 Smc K.K. Werkstücklevitationsvorrichtung
DE102004014779A1 (de) 2004-03-26 2005-10-13 Grenzebach Maschinenbau Gmbh Berührungsfreier Plattenförderer, insbesondere für Glasplatten
JP4767251B2 (ja) * 2004-04-14 2011-09-07 コアフロー サイエンティフィック ソリューションズ リミテッド 光学検査装置を平坦な対象物の接面に対して焦点合わせする方法
JP5291281B2 (ja) * 2004-06-28 2013-09-18 株式会社渡辺商行 浮上搬送装置及び浮上搬送方法
AT501192B1 (de) * 2004-12-23 2007-04-15 Lisec Peter Vorrichtung zum transportieren und stützen tafelförmiger gegenstände, insbesondere glastafeln
US7419462B1 (en) * 2005-06-13 2008-09-02 Dixie Consumer Products Llc Pressware die set with pneumatic blank feed
US9159592B2 (en) 2005-06-18 2015-10-13 Futrfab, Inc. Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US7513822B2 (en) 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US9339900B2 (en) * 2005-08-18 2016-05-17 Futrfab, Inc. Apparatus to support a cleanspace fabricator
US9059227B2 (en) 2005-06-18 2015-06-16 Futrfab, Inc. Methods and apparatus for vertically orienting substrate processing tools in a clean space
KR101234475B1 (ko) * 2005-06-20 2013-02-18 엘지디스플레이 주식회사 비접촉 반송 장치에서의 지지플랫폼
JP4525514B2 (ja) * 2005-08-01 2010-08-18 パナソニック株式会社 バルクフィーダおよび電子部品実装装置
US7467024B2 (en) * 2005-08-26 2008-12-16 Flitsch Frederick A Method and apparatus for an elevator system for a multilevel cleanspace fabricator
CN105304529B (zh) 2005-09-18 2019-03-15 弗雷德里克·A·弗里奇 用于在洁净空间中垂直定位基片处理设备的方法和装置
JP4594241B2 (ja) * 2006-01-06 2010-12-08 東京エレクトロン株式会社 基板搬送装置、基板搬送方法及びコンピュータプログラム
US11136667B2 (en) * 2007-01-08 2021-10-05 Eastman Kodak Company Deposition system and method using a delivery head separated from a substrate by gas pressure
WO2009155119A2 (en) * 2008-05-30 2009-12-23 Alta Devices, Inc. Methods and apparatus for a chemical vapor deposition reactor
EP2388808A1 (de) * 2010-05-20 2011-11-23 Westfälische Wilhelms-Universität Münster Berührungsloses Transportsystem
US12189828B2 (en) 2013-01-05 2025-01-07 Frederick A. Flitsch Customized smart devices and touchscreen devices and cleanspace manufacturing methods to make them
CN104418498B (zh) * 2013-08-27 2016-12-28 洛阳兰迪玻璃机器股份有限公司 玻璃加热炉
TW202002135A (zh) * 2018-06-18 2020-01-01 美商維克精密表面處理股份有限公司 用於支撐及操縱晶圓的設備

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US3231165A (en) * 1961-12-02 1966-01-25 Svenska Flaektfabriken Ab Method and apparatus for stabilizing an air-borne web
BE645430A (it) * 1963-03-19
SE310117B (it) * 1965-07-08 1969-04-14 Svenska Flaektfabriken Ab
FR1527937A (fr) * 1967-03-31 1968-06-07 Saint Gobain Dispositif de transport d'un matériau en forme de feuille sur un coussin gazeux
US3873013A (en) * 1973-10-04 1975-03-25 Tec Systems High velocity web floating air bar having center exhaust means
SE393826B (sv) * 1974-05-29 1977-05-23 Svenska Flaektfabriken Ab Anordning for att vid transport av ett ban- eller arkformigt av luft uppburet material, framfora materialet i ett fixerat stabilt svevlege genom en eller flera etager av en behandlingsanleggning, foretredesvis en ...
US3918706A (en) * 1974-06-24 1975-11-11 Ibm Pneumatic sheet transport and alignment mechanism

Also Published As

Publication number Publication date
BR7708209A (pt) 1978-08-15
FR2375115A1 (fr) 1978-07-21
FR2375115B1 (it) 1980-01-04
GB1594791A (en) 1981-08-05
NL7714379A (nl) 1978-06-29
JPS5538055B2 (it) 1980-10-02
JPS5382273A (en) 1978-07-20
US4081201A (en) 1978-03-28
DE2754228A1 (de) 1978-07-06

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