IT1148822B - Metodo per l'attacco o la deposizione selettiva di materiali
- Google Patents
Metodo per l'attacco o la deposizione selettiva di materiali
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Publication number
IT1148822B
IT1148822BIT21611/80AIT2161180AIT1148822BIT 1148822 BIT1148822 BIT 1148822BIT 21611/80 AIT21611/80 AIT 21611/80AIT 2161180 AIT2161180 AIT 2161180AIT 1148822 BIT1148822 BIT 1148822B
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Priority claimed from US06/037,075external-prioritypatent/US4217183A/en
Priority claimed from US05/037,073external-prioritypatent/US4239789A/en
Priority claimed from US06/037,074external-prioritypatent/US4283259A/en
Application filed by IbmfiledCriticalIbm
Publication of IT8021611A0publicationCriticalpatent/IT8021611A0/it
Application grantedgrantedCritical
Publication of IT1148822BpublicationCriticalpatent/IT1148822B/it