IT1171423B - Catodo consumabile per evaporatori di metalli ad elettrico - Google Patents

Catodo consumabile per evaporatori di metalli ad elettrico

Info

Publication number
IT1171423B
IT1171423B IT49008/81A IT4900881A IT1171423B IT 1171423 B IT1171423 B IT 1171423B IT 49008/81 A IT49008/81 A IT 49008/81A IT 4900881 A IT4900881 A IT 4900881A IT 1171423 B IT1171423 B IT 1171423B
Authority
IT
Italy
Prior art keywords
cathode
layers
magnetic field
spot
igniter electrode
Prior art date
Application number
IT49008/81A
Other languages
English (en)
Other versions
IT8149008A1 (it
IT8149008A0 (it
Inventor
Leonid Pavlovich Sablev
Rimma Ivanovna Stupak
Original Assignee
Sablev Leonid P
Rimma Ivanovna Stupak
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sablev Leonid P, Rimma Ivanovna Stupak filed Critical Sablev Leonid P
Priority to IT49008/81A priority Critical patent/IT1171423B/it
Publication of IT8149008A0 publication Critical patent/IT8149008A0/it
Publication of IT8149008A1 publication Critical patent/IT8149008A1/it
Application granted granted Critical
Publication of IT1171423B publication Critical patent/IT1171423B/it

Links

Landscapes

  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
IT49008/81A 1981-06-29 1981-06-29 Catodo consumabile per evaporatori di metalli ad elettrico IT1171423B (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IT49008/81A IT1171423B (it) 1981-06-29 1981-06-29 Catodo consumabile per evaporatori di metalli ad elettrico

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT49008/81A IT1171423B (it) 1981-06-29 1981-06-29 Catodo consumabile per evaporatori di metalli ad elettrico

Publications (3)

Publication Number Publication Date
IT8149008A0 IT8149008A0 (it) 1981-06-29
IT8149008A1 IT8149008A1 (it) 1982-12-29
IT1171423B true IT1171423B (it) 1987-06-10

Family

ID=11269369

Family Applications (1)

Application Number Title Priority Date Filing Date
IT49008/81A IT1171423B (it) 1981-06-29 1981-06-29 Catodo consumabile per evaporatori di metalli ad elettrico

Country Status (1)

Country Link
IT (1) IT1171423B (it)

Also Published As

Publication number Publication date
IT8149008A1 (it) 1982-12-29
IT8149008A0 (it) 1981-06-29

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