IT1172953B - Sistema di distribuzione di gas per catodi per polverizzazione - Google Patents

Sistema di distribuzione di gas per catodi per polverizzazione

Info

Publication number: IT1172953B
Authority: IT; Italy
Prior art keywords: target; reactive; gases; distributor; substrates
Prior art date: 1984-01-03

Application number

IT19009/84A

Other languages

English (en)

Other versions

IT8419009A0 (it

Inventor

G Robinson Merril

Original Assignee

Shatterproof Glass Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-01-03

Filing date

1984-01-03

Publication date

1987-06-18

1984-01-03 Application filed by Shatterproof Glass Corp filed Critical Shatterproof Glass Corp

1984-01-03 Priority to IT19009/84A priority Critical patent/IT1172953B/it

1984-01-03 Publication of IT8419009A0 publication Critical patent/IT8419009A0/it

1987-06-18 Application granted granted Critical

1987-06-18 Publication of IT1172953B publication Critical patent/IT1172953B/it

Links

238000005546 reactive sputtering Methods 0.000 title abstract 2
239000007789 gas Substances 0.000 abstract 6
239000000758 substrate Substances 0.000 abstract 3
-1 Ti or Ta Chemical class 0.000 abstract 1
229910045601 alloy Inorganic materials 0.000 abstract 1
239000000956 alloy Substances 0.000 abstract 1
238000000576 coating method Methods 0.000 abstract 1
230000003247 decreasing effect Effects 0.000 abstract 1
238000000151 deposition Methods 0.000 abstract 1
230000008021 deposition Effects 0.000 abstract 1
239000000463 material Substances 0.000 abstract 1
229910052751 metal Inorganic materials 0.000 abstract 1
239000002184 metal Substances 0.000 abstract 1
229910044991 metal oxide Inorganic materials 0.000 abstract 1
150000004706 metal oxides Chemical class 0.000 abstract 1
150000002739 metals Chemical class 0.000 abstract 1
150000004767 nitrides Chemical class 0.000 abstract 1
238000012421 spiking Methods 0.000 abstract 1

Landscapes

Physical Vapour Deposition (AREA)

IT19009/84A 1984-01-03 1984-01-03 Sistema di distribuzione di gas per catodi per polverizzazione IT1172953B (it)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
IT19009/84A IT1172953B (it)	1984-01-03	1984-01-03	Sistema di distribuzione di gas per catodi per polverizzazione

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
IT19009/84A IT1172953B (it)	1984-01-03	1984-01-03	Sistema di distribuzione di gas per catodi per polverizzazione

Publications (2)

Publication Number	Publication Date
IT8419009A0 IT8419009A0 (it)	1984-01-03
IT1172953B true IT1172953B (it)	1987-06-18

Family

ID=11153816

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT19009/84A IT1172953B (it)	1984-01-03	1984-01-03	Sistema di distribuzione di gas per catodi per polverizzazione

Country Status (1)

Country	Link
IT (1)	IT1172953B (it)

1984
- 1984-01-03 IT IT19009/84A patent/IT1172953B/it active

Also Published As

Publication number	Publication date
IT8419009A0 (it)	1984-01-03

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