IT1229872B - Dispositivo per l'evaporazione di metalli. - Google Patents

Dispositivo per l'evaporazione di metalli.

Info

Publication number
IT1229872B
IT1229872B IT8919421A IT1942189A IT1229872B IT 1229872 B IT1229872 B IT 1229872B IT 8919421 A IT8919421 A IT 8919421A IT 1942189 A IT1942189 A IT 1942189A IT 1229872 B IT1229872 B IT 1229872B
Authority
IT
Italy
Prior art keywords
evaporation device
metal evaporation
metal
evaporation
Prior art date
Application number
IT8919421A
Other languages
English (en)
Other versions
IT8919421A0 (it
Inventor
Siegfried Kleyer
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Publication of IT8919421A0 publication Critical patent/IT8919421A0/it
Application granted granted Critical
Publication of IT1229872B publication Critical patent/IT1229872B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT8919421A 1988-05-24 1989-02-13 Dispositivo per l'evaporazione di metalli. IT1229872B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3817513A DE3817513C2 (de) 1988-05-24 1988-05-24 Vorrichtung zum Verdampfen von Metallen

Publications (2)

Publication Number Publication Date
IT8919421A0 IT8919421A0 (it) 1989-02-13
IT1229872B true IT1229872B (it) 1991-09-13

Family

ID=6354965

Family Applications (1)

Application Number Title Priority Date Filing Date
IT8919421A IT1229872B (it) 1988-05-24 1989-02-13 Dispositivo per l'evaporazione di metalli.

Country Status (5)

Country Link
US (1) US4979468A (it)
JP (1) JPH0219458A (it)
DE (1) DE3817513C2 (it)
GB (1) GB2219008B (it)
IT (1) IT1229872B (it)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4100643C1 (it) * 1991-01-11 1991-10-31 Leybold Ag, 6450 Hanau, De
DE4204938C1 (it) * 1992-02-19 1993-06-24 Leybold Ag, 6450 Hanau, De
DE4310085A1 (de) * 1993-03-27 1994-09-29 Leybold Ag Verfahren und Vorrichtung zur Erzeugung von Mustern auf Substraten
DE4422697C1 (de) * 1994-06-29 1996-01-25 Zsw Verdampferquelle für eine Aufdampfanlage und ihre Verwendung
CH692000A5 (de) * 1995-11-13 2001-12-31 Unaxis Balzers Ag Beschichtungskammer, Substratträger hierfür, Verfahren zum Vakuumbedampfen sowie Beschichtungsverfahren.
US5951769A (en) * 1997-06-04 1999-09-14 Crown Roll Leaf, Inc. Method and apparatus for making high refractive index (HRI) film
EP1662017B1 (de) * 2004-11-20 2007-06-06 Applied Materials GmbH & Co. KG Vorrichtung zum Verdampfen von Materialien
EP1752555A1 (de) 2005-07-28 2007-02-14 Applied Materials GmbH & Co. KG Verdampfervorrichtung
EP1889942A1 (de) * 2006-08-16 2008-02-20 Applied Materials GmbH & Co. KG Verdampfervorrichtung mit automatischer Materialzuführung
EP2048261A1 (fr) * 2007-10-12 2009-04-15 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique
JP5621258B2 (ja) * 2009-12-28 2014-11-12 ソニー株式会社 成膜装置および成膜方法
DE102013112067B4 (de) * 2013-11-01 2018-01-04 Von Ardenne Gmbh Bandsubstratbehandlungsanlage
JP5987154B2 (ja) * 2014-10-14 2016-09-07 マシン・テクノロジー株式会社 真空蒸着装置およびそれに用いるフィルムコンデンサ用の蒸発装置
US20160281212A1 (en) 2015-03-24 2016-09-29 Siva Power, Inc. Thermal management of evaporation sources
CN116770258B (zh) * 2021-07-29 2026-03-17 苏州道一至诚纳米材料技术有限公司 双面往复镀膜装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE747257C (de) * 1943-03-05 1944-09-18 Bosch Gmbh Robert Vorrichtung zur Metallisierung laufender Baender durch Metallbedampfung im Vakuum
US2440135A (en) * 1944-08-04 1948-04-20 Alexander Paul Method of and apparatus for depositing substances by thermal evaporation in vacuum chambers
DE938644C (de) * 1953-07-03 1956-02-02 Hubert Mansfeld Verfahren zur Aufbringung lichtempfindlicher Stoffe auf Schichttraeger
GB1173978A (en) * 1967-11-14 1969-12-10 Edwards High Vaccum Internat L Vacuum Deposition Apparatus
US3581529A (en) * 1969-03-17 1971-06-01 Bernard A Mitchell Steamer
DE2548357C2 (de) * 1975-10-29 1983-05-26 Robert Bosch Gmbh, 7000 Stuttgart Einrichtung zur kontinuierlichen Vakuumbedampfung eines bandförmigen Trägermaterials mit Zink
US4163038A (en) * 1977-03-03 1979-07-31 Earth Chemical Company, Limited Fumigating method and apparatus
EP0082001A1 (en) * 1981-12-16 1983-06-22 General Engineering Radcliffe 1979 Limited Apparatus for and a method of metallising a length of material
JPS62260051A (ja) * 1986-05-02 1987-11-12 Hitachi Ltd 蒸気発生装置

Also Published As

Publication number Publication date
GB2219008A (en) 1989-11-29
US4979468A (en) 1990-12-25
IT8919421A0 (it) 1989-02-13
GB8903255D0 (en) 1989-04-05
GB2219008B (en) 1992-07-29
DE3817513C2 (de) 1996-01-25
DE3817513A1 (de) 1989-12-07
JPH0219458A (ja) 1990-01-23

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Legal Events

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Effective date: 19970131