IT1272003B - Impianto di rivestimento sotto alto vuoto - Google Patents

Impianto di rivestimento sotto alto vuoto

Info

Publication number
IT1272003B
IT1272003B ITMI930460A ITMI930460A IT1272003B IT 1272003 B IT1272003 B IT 1272003B IT MI930460 A ITMI930460 A IT MI930460A IT MI930460 A ITMI930460 A IT MI930460A IT 1272003 B IT1272003 B IT 1272003B
Authority
IT
Italy
Prior art keywords
high vacuum
vacuum coating
coating system
tilting
unit
Prior art date
Application number
ITMI930460A
Other languages
English (en)
Inventor
Bernard Schonherr
Karl-Heinrich Wenk
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Publication of ITMI930460A0 publication Critical patent/ITMI930460A0/it
Publication of ITMI930460A1 publication Critical patent/ITMI930460A1/it
Application granted granted Critical
Publication of IT1272003B publication Critical patent/IT1272003B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)

Abstract

Un impianto di rivestimento sotto alto vuoto per il rivestimento di foglie ha al di sotto del suo cilindro di rivestimento (7) una unità ribaltabile (8), girevole intorno ad un albero di ribaltamento (25). Questa unità presenta una maschera regolabile (29) e al di sotto un diaframma (28), che dà una posizione ricoprente un vaporizzatore è spostabile in una posizione che lo libera. Mediante la ribaltabilità l'unità ribaltabile (8) può venire ben pulita nelle sue parti.
ITMI930460A 1992-03-10 1993-03-10 Impianto di rivestimento sotto alto vuoto IT1272003B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4207526A DE4207526C2 (de) 1992-03-10 1992-03-10 Hochvakuum-Beschichtungsanlage

Publications (3)

Publication Number Publication Date
ITMI930460A0 ITMI930460A0 (it) 1993-03-10
ITMI930460A1 ITMI930460A1 (it) 1994-09-10
IT1272003B true IT1272003B (it) 1997-06-10

Family

ID=6453647

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI930460A IT1272003B (it) 1992-03-10 1993-03-10 Impianto di rivestimento sotto alto vuoto

Country Status (4)

Country Link
US (1) US5215589A (it)
DE (1) DE4207526C2 (it)
GB (1) GB2264953B (it)
IT (1) IT1272003B (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19537779A1 (de) * 1995-10-11 1997-04-17 Leybold Ag Beschichtungsanlage für Folien
DE19537781A1 (de) * 1995-10-11 1997-04-17 Leybold Ag Beschichtungsanlage für Folien
DE19628102A1 (de) 1996-07-12 1998-01-15 Bayerische Motoren Werke Ag Vakuumbeschichtungsanlage mit einer Beschichtungskammer und zumindest einer Quellenkammer
DE19643843B4 (de) * 1996-10-30 2008-11-27 Applied Materials Gmbh & Co. Kg Vorrichtung zum Verdampfen von Metallen
DE19700407A1 (de) * 1997-01-09 1998-07-16 Leybold Ag Vakuum-Beschichtungsanlage
DE19947694A1 (de) * 1999-10-04 2001-04-05 Fluor Tech Sys Gmbh Behandlungsvorrichtung für Materialbahnen
DE102004006131B4 (de) 2004-02-07 2005-12-15 Applied Films Gmbh & Co. Kg Bandbeschichtungsanlage mit einer Vakuumkammer und einer Beschichtungswalze
DE102012108440A1 (de) * 2012-09-11 2014-03-13 Schmid Vacuum Technology Gmbh Folienbeschichtungsanlage und Beschichtungsfenster hierfür
JP6356824B2 (ja) * 2014-04-04 2018-07-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ フレキシブル基板を処理するための装置、及びその処理チャンバを洗浄するための方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4681780A (en) * 1983-12-01 1987-07-21 Polaroid Corporation Continuously cleaned rotary coating mask
DE3726113A1 (de) * 1987-08-06 1989-02-16 Leybold Ag Vorrichtung zum beschichten von baendern
DE3922187A1 (de) * 1989-07-06 1991-01-17 Leybold Ag Vorrichtung zum herstellen von metallfreien streifen bei im vakuum beschichteten folienbahnen, insbesondere fuer kondensatoren

Also Published As

Publication number Publication date
GB2264953A (en) 1993-09-15
ITMI930460A0 (it) 1993-03-10
ITMI930460A1 (it) 1994-09-10
GB9224717D0 (en) 1993-01-13
US5215589A (en) 1993-06-01
DE4207526A1 (de) 1993-09-16
GB2264953B (en) 1995-06-28
DE4207526C2 (de) 1995-07-13

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19990226