IT1284629B1 - Metodo per la deposizione di film ottici con struttura mista inorganico-organica. - Google Patents

Metodo per la deposizione di film ottici con struttura mista inorganico-organica.

Info

Publication number
IT1284629B1
IT1284629B1 IT96RM000240A ITRM960240A IT1284629B1 IT 1284629 B1 IT1284629 B1 IT 1284629B1 IT 96RM000240 A IT96RM000240 A IT 96RM000240A IT RM960240 A ITRM960240 A IT RM960240A IT 1284629 B1 IT1284629 B1 IT 1284629B1
Authority
IT
Italy
Prior art keywords
deposition
optical film
organic structure
mixed inorganic
inorganic
Prior art date
Application number
IT96RM000240A
Other languages
English (en)
Inventor
Carlo Misiano
Enrico Simonetti
Original Assignee
Cetev Cent Tecnolog Vuoto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cetev Cent Tecnolog Vuoto filed Critical Cetev Cent Tecnolog Vuoto
Priority to IT96RM000240A priority Critical patent/IT1284629B1/it
Publication of ITRM960240A0 publication Critical patent/ITRM960240A0/it
Priority to EP97830179A priority patent/EP0801146A1/en
Publication of ITRM960240A1 publication Critical patent/ITRM960240A1/it
Application granted granted Critical
Publication of IT1284629B1 publication Critical patent/IT1284629B1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
IT96RM000240A 1996-04-17 1996-04-17 Metodo per la deposizione di film ottici con struttura mista inorganico-organica. IT1284629B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT96RM000240A IT1284629B1 (it) 1996-04-17 1996-04-17 Metodo per la deposizione di film ottici con struttura mista inorganico-organica.
EP97830179A EP0801146A1 (en) 1996-04-17 1997-04-15 Method for deposition of mixed organic-inorganic film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT96RM000240A IT1284629B1 (it) 1996-04-17 1996-04-17 Metodo per la deposizione di film ottici con struttura mista inorganico-organica.

Publications (3)

Publication Number Publication Date
ITRM960240A0 ITRM960240A0 (it) 1996-04-17
ITRM960240A1 ITRM960240A1 (it) 1997-10-17
IT1284629B1 true IT1284629B1 (it) 1998-05-21

Family

ID=11404112

Family Applications (1)

Application Number Title Priority Date Filing Date
IT96RM000240A IT1284629B1 (it) 1996-04-17 1996-04-17 Metodo per la deposizione di film ottici con struttura mista inorganico-organica.

Country Status (2)

Country Link
EP (1) EP0801146A1 (it)
IT (1) IT1284629B1 (it)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19824364A1 (de) * 1998-05-30 1999-12-02 Bosch Gmbh Robert Verfahren zum Aufbringen eines Verschleißschutz-Schichtsystems mit optischen Eigenschaften auf Oberflächen
JP2000017457A (ja) † 1998-07-03 2000-01-18 Shincron:Kk 薄膜形成装置および薄膜形成方法
EP1417042B1 (de) 2001-03-29 2013-01-23 Schott AG Verfahren zur herstellung eines beschichteten kunststoffkörpers
EP1245298B1 (de) * 2001-03-29 2008-02-27 Schott Ag Verfahren zum Herstellen eines beschichteten Kunststoffkörpers
DE10153760A1 (de) * 2001-10-31 2003-05-22 Fraunhofer Ges Forschung Verfahren zur Herstellung einer UV-absorbierenden transparenten Abriebschutzschicht
EP1818110A1 (en) * 2006-02-14 2007-08-15 The European Community, represented by the European Commission Functionalised material and production thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5377885A (en) * 1976-12-21 1978-07-10 Anelva Corp Coating method for substrate
DE2900724C2 (de) * 1979-01-10 1986-05-28 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur Beschichtung von Substraten im Vakuum
JPS56147829A (en) * 1980-04-17 1981-11-17 Asahi Glass Co Ltd Improved method of forming hard coating film
IT1261227B (it) * 1993-04-06 1996-05-09 Cetev Cent Tecnolog Vuoto Impianto di deposizione di film sottili, preferibilmente riferito a tecniche pecvd e "sputtering", e relativi processi.
DE4438359C2 (de) * 1994-10-27 2001-10-04 Schott Glas Behälter aus Kunststoff mit einer Sperrbeschichtung

Also Published As

Publication number Publication date
EP0801146A1 (en) 1997-10-15
ITRM960240A0 (it) 1996-04-17
ITRM960240A1 (it) 1997-10-17

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Legal Events

Date Code Title Description
0001 Granted