IT1289811B1 - Metodo ed apparato di diagnosi per pompa da vuoto. - Google Patents

Metodo ed apparato di diagnosi per pompa da vuoto.

Info

Publication number
IT1289811B1
IT1289811B1 ITTO961091A IT1289811B1 IT 1289811 B1 IT1289811 B1 IT 1289811B1 IT TO961091 A ITTO961091 A IT TO961091A IT 1289811 B1 IT1289811 B1 IT 1289811B1
Authority
IT
Italy
Prior art keywords
vacuum pump
diagnostic apparatus
diagnostic
vacuum
pump
Prior art date
Application number
Other languages
English (en)
Inventor
Simon Mauro De
Fausto Casaro
Raffaella Caretto
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=11415164&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IT1289811(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT96TO001091 priority Critical patent/IT1289811B1/it
Priority to EP19970202185 priority patent/EP0851127B1/en
Priority to DE1997618889 priority patent/DE69718889T2/de
Publication of ITTO961091A1 publication Critical patent/ITTO961091A1/it
Application granted granted Critical
Publication of IT1289811B1 publication Critical patent/IT1289811B1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
IT96TO001091 1996-12-27 1996-12-27 Metodo ed apparato di diagnosi per pompa da vuoto. IT1289811B1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT96TO001091 IT1289811B1 (it) 1996-12-27 1996-12-27 Metodo ed apparato di diagnosi per pompa da vuoto.
EP19970202185 EP0851127B1 (en) 1996-12-27 1997-07-12 Diagnostic method and apparatus for vacuum pumps
DE1997618889 DE69718889T2 (de) 1996-12-27 1997-07-12 Diagnoseverfahren und -Gerät für Vakuumpumpen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT96TO001091 IT1289811B1 (it) 1996-12-27 1996-12-27 Metodo ed apparato di diagnosi per pompa da vuoto.

Publications (2)

Publication Number Publication Date
ITTO961091A1 ITTO961091A1 (it) 1998-06-27
IT1289811B1 true IT1289811B1 (it) 1998-10-16

Family

ID=11415164

Family Applications (1)

Application Number Title Priority Date Filing Date
IT96TO001091 IT1289811B1 (it) 1996-12-27 1996-12-27 Metodo ed apparato di diagnosi per pompa da vuoto.

Country Status (3)

Country Link
EP (1) EP0851127B1 (it)
DE (1) DE69718889T2 (it)
IT (1) IT1289811B1 (it)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006034478A1 (de) * 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe
JP5719592B2 (ja) * 2008-07-14 2015-05-20 エドワーズ株式会社 真空ポンプ
CN102425563B (zh) * 2011-12-08 2014-03-12 北京中科科仪股份有限公司 同步抑制磁悬浮分子泵转子次临界振动的方法和系统
GB2507500B (en) * 2012-10-30 2015-06-17 Edwards Ltd Vacuum pump
GB2528765A (en) * 2012-10-30 2016-02-03 Edwards Ltd Vacuum pump
DE102013223020A1 (de) * 2013-11-12 2015-05-13 Oerlikon Leybold Vacuum Gmbh Verfahren zum Betreiben einer Vakuumpumpe
KR101766017B1 (ko) * 2015-07-01 2017-08-08 현대자동차주식회사 Eop 로터 마모진단 방법
US9828992B2 (en) 2015-07-09 2017-11-28 Hamilton Sundstrand Corporation Vane pumps with vane wear detection
GB2551337A (en) * 2016-06-13 2017-12-20 Edwards Ltd Pump assembly, method and computer program
JP7006520B2 (ja) 2018-06-14 2022-01-24 株式会社島津製作所 真空ポンプおよび診断システム
EP3557072B1 (de) * 2019-02-27 2021-02-24 Pfeiffer Vacuum Gmbh Überwachung der lagereinrichtung einer vakuumpumpe
EP3933355A1 (en) 2020-06-30 2022-01-05 Alfa Laval Corporate AB A method for monitoring operating condition of a rotating equipment
FR3117435B1 (fr) 2020-12-16 2022-10-28 Psa Automobiles Sa Procede de diagnostic d’une defaillance de generation de vide dans un amplificateur de freinage
CN119333396B (zh) * 2024-11-29 2025-04-11 南京真空泵厂有限公司 一种基于数据分析的螺杆真空泵故障监测系统及方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
CA2141592A1 (en) * 1992-08-10 1994-02-17 Hilger A. Walter Process and device for monitoring vibrational excitation of an axial compressor
DE19511430A1 (de) * 1995-03-29 1996-10-02 Leybold Ag Umwälzgebläse, Vakuumpumpe oder dergleichen

Also Published As

Publication number Publication date
ITTO961091A1 (it) 1998-06-27
EP0851127A2 (en) 1998-07-01
DE69718889T2 (de) 2003-10-30
EP0851127B1 (en) 2003-02-05
EP0851127A3 (en) 1999-06-16
DE69718889D1 (de) 2003-03-13

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Legal Events

Date Code Title Description
0001 Granted