IT1395100B1 - Strutture micromeccaniche e procedimento per la produzione di strutture micromeccaniche - Google Patents

Strutture micromeccaniche e procedimento per la produzione di strutture micromeccaniche

Info

Publication number
IT1395100B1
IT1395100B1 ITMI2009A001307A ITMI20091307A IT1395100B1 IT 1395100 B1 IT1395100 B1 IT 1395100B1 IT MI2009A001307 A ITMI2009A001307 A IT MI2009A001307A IT MI20091307 A ITMI20091307 A IT MI20091307A IT 1395100 B1 IT1395100 B1 IT 1395100B1
Authority
IT
Italy
Prior art keywords
micro
mechanical structures
procedure
production
structures
Prior art date
Application number
ITMI2009A001307A
Other languages
English (en)
Inventor
Christina Leinenbach
Volker Schmitz
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of ITMI20091307A1 publication Critical patent/ITMI20091307A1/it
Application granted granted Critical
Publication of IT1395100B1 publication Critical patent/IT1395100B1/it

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00095—Interconnects

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
ITMI2009A001307A 2008-07-28 2009-07-23 Strutture micromeccaniche e procedimento per la produzione di strutture micromeccaniche IT1395100B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008040758.5A DE102008040758B4 (de) 2008-07-28 2008-07-28 Mikromechanische Strukturen und Verfahren zur Herstellung von mikromechanischen Strukturen

Publications (2)

Publication Number Publication Date
ITMI20091307A1 ITMI20091307A1 (it) 2010-01-29
IT1395100B1 true IT1395100B1 (it) 2012-09-05

Family

ID=41461700

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI2009A001307A IT1395100B1 (it) 2008-07-28 2009-07-23 Strutture micromeccaniche e procedimento per la produzione di strutture micromeccaniche

Country Status (3)

Country Link
DE (1) DE102008040758B4 (it)
FR (1) FR2934257A1 (it)
IT (1) IT1395100B1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013222676B4 (de) 2013-11-07 2022-07-07 Robert Bosch Gmbh Elektrodenanordnung für ein mikromechanisches Bauelement

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4241045C1 (de) * 1992-12-05 1994-05-26 Bosch Gmbh Robert Verfahren zum anisotropen Ätzen von Silicium
DE4317174A1 (de) * 1993-05-22 1994-11-24 Bosch Gmbh Robert Verbundsystem mit mindestens zwei anorganischen keramischen Schichten und Verfahren zu deren Herstellung
DE19537814B4 (de) * 1995-10-11 2009-11-19 Robert Bosch Gmbh Sensor und Verfahren zur Herstellung eines Sensors
US5796412A (en) * 1996-09-06 1998-08-18 Samsung Electronics Co., Ltd. Image data storing method and processing apparatus thereof
JP2000138381A (ja) * 1998-11-02 2000-05-16 Toyota Central Res & Dev Lab Inc 密閉容器及びその製造方法
US7402897B2 (en) * 2002-08-08 2008-07-22 Elm Technology Corporation Vertical system integration
US7364932B2 (en) * 2002-12-27 2008-04-29 Matsushita Electric Industrial Co., Ltd. Electronic device and method of manufacturing the same
US7075160B2 (en) * 2003-06-04 2006-07-11 Robert Bosch Gmbh Microelectromechanical systems and devices having thin film encapsulated mechanical structures
JP4724488B2 (ja) * 2005-02-25 2011-07-13 日立オートモティブシステムズ株式会社 集積化マイクロエレクトロメカニカルシステム
JP4489651B2 (ja) * 2005-07-22 2010-06-23 株式会社日立製作所 半導体装置およびその製造方法
JP2007210083A (ja) * 2006-02-13 2007-08-23 Hitachi Ltd Ｍｅｍｓ素子及びその製造方法

Also Published As

Publication number Publication date
FR2934257A1 (fr) 2010-01-29
ITMI20091307A1 (it) 2010-01-29
DE102008040758B4 (de) 2017-05-18
DE102008040758A1 (de) 2010-02-04

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