IT201700082961A1 - Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione - Google Patents

Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione

Info

Publication number
IT201700082961A1
IT201700082961A1 IT102017000082961A IT201700082961A IT201700082961A1 IT 201700082961 A1 IT201700082961 A1 IT 201700082961A1 IT 102017000082961 A IT102017000082961 A IT 102017000082961A IT 201700082961 A IT201700082961 A IT 201700082961A IT 201700082961 A1 IT201700082961 A1 IT 201700082961A1
Authority
IT
Italy
Prior art keywords
microfluid
printing
manufacturing
mems device
jet inks
Prior art date
Application number
IT102017000082961A
Other languages
English (en)
Inventor
Domenico Giusti
Mauro Cattaneo
Carlo Luigi Prelini
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102017000082961A priority Critical patent/IT201700082961A1/it
Priority to US16/030,630 priority patent/US10703102B2/en
Priority to CN201821138534.0U priority patent/CN209079461U/zh
Priority to CN201810790541.7A priority patent/CN109278407B/zh
Priority to EP18184377.2A priority patent/EP3431295B1/en
Publication of IT201700082961A1 publication Critical patent/IT201700082961A1/it
Priority to US16/885,908 priority patent/US11214061B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
IT102017000082961A 2017-07-20 2017-07-20 Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione IT201700082961A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102017000082961A IT201700082961A1 (it) 2017-07-20 2017-07-20 Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione
US16/030,630 US10703102B2 (en) 2017-07-20 2018-07-09 Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof
CN201821138534.0U CN209079461U (zh) 2017-07-20 2018-07-18 微流体器件
CN201810790541.7A CN109278407B (zh) 2017-07-20 2018-07-18 具有压电致动的微流体mems器件及其制造工艺
EP18184377.2A EP3431295B1 (en) 2017-07-20 2018-07-19 Microfluidic mems device for inkjet printing with piezoelectric actuation and manufacturing process thereof
US16/885,908 US11214061B2 (en) 2017-07-20 2020-05-28 Microfluidic MEMS device with piezoelectric actuation and manufacturing process thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000082961A IT201700082961A1 (it) 2017-07-20 2017-07-20 Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione

Publications (1)

Publication Number Publication Date
IT201700082961A1 true IT201700082961A1 (it) 2019-01-20

Family

ID=60294335

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000082961A IT201700082961A1 (it) 2017-07-20 2017-07-20 Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione

Country Status (4)

Country Link
US (2) US10703102B2 (it)
EP (1) EP3431295B1 (it)
CN (2) CN209079461U (it)
IT (1) IT201700082961A1 (it)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6568644B2 (ja) * 2016-03-18 2019-08-28 株式会社日立製作所 メンブレンデバイスの製造方法、メンブレンデバイス、および、ナノポアデバイス
IT201700082961A1 (it) * 2017-07-20 2019-01-20 St Microelectronics Srl Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione
GB2566309B (en) * 2017-09-08 2021-06-16 Xaar Technology Ltd A method for the manufacture of a MEMS device
US11696507B2 (en) 2018-12-14 2023-07-04 Stmicroelectronics S.R.L. Piezoelectric MEMS device with a suspended membrane having high mechanical shock resistance and manufacturing process thereof
CN111747376B (zh) * 2019-03-29 2023-06-30 研能科技股份有限公司 微流体致动器模块的制造方法
IT201900005794A1 (it) * 2019-04-15 2020-10-15 St Microelectronics Srl Dispositivo di eiezione di fluido con ridotto numero di componenti e metodo di fabbricazione del dispositivo di eiezione di fluido
IT201900005804A1 (it) * 2019-04-15 2020-10-15 St Microelectronics Srl Valvola microfluidica a membrana ad attuazione piezoelettrica e relativo procedimento di fabbricazione
IT201900007196A1 (it) * 2019-05-24 2020-11-24 St Microelectronics Srl Dispositivo microfluidico per l'espulsione continua di fluidi, in particolare per la stampa con inchiostri, e relativo procedimento di fabbricazione
EP3974189B1 (en) * 2020-09-23 2023-12-27 Canon Kabushiki Kaisha Droplet jetting device
WO2023046901A1 (en) 2021-09-24 2023-03-30 Analog Devices International Unlimited Company, Magnetic field sensing based on particle position within container
US11940502B2 (en) 2021-09-24 2024-03-26 Analog Devices International Unlimited Company Magnetic field sensing based on particle position within container
CN115872347A (zh) * 2021-09-29 2023-03-31 意法半导体股份有限公司 包括埋腔的微型流体mems设备及其制造过程
JP7753763B2 (ja) * 2021-09-30 2025-10-15 セイコーエプソン株式会社 液体噴射ヘッド、および、液体噴射装置
ES2900841B2 (es) * 2021-11-26 2023-03-02 Kerajet S A Dispositivo de impresion de inyeccion de tinta mems
US12435803B2 (en) 2022-05-27 2025-10-07 Analog Devices International Unlimited Company Flow adjustment based on particle movement in response to magnetic field
US12379433B2 (en) 2022-09-14 2025-08-05 Analog Devices International Unlimited Company Magnetically sensitive particles and magnetic structure
IT202200024411A1 (it) 2022-11-25 2024-05-25 St Microelectronics Srl Dispositivo trasduttore mems per applicazioni ad alta frequenza, e metodo di fabbricazione

Citations (6)

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Publication number Priority date Publication date Assignee Title
JPH11309867A (ja) * 1998-02-18 1999-11-09 Seiko Epson Corp インクジェット式記録ヘッドの製造方法
JP2002059555A (ja) * 2000-08-18 2002-02-26 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
US6547376B1 (en) * 1999-04-21 2003-04-15 Matsushita Electric Industrial Co., Ltd. Ink jet head and method for the manufacture thereof
EP1506864A1 (en) * 2003-08-11 2005-02-16 Brother Kogyo Kabushiki Kaisha Inkjet head
US20070279456A1 (en) * 2006-06-05 2007-12-06 Seiko Epson Corporation Liquid ejecting head, method of producing the same, and liquid ejecting apparatus
US20170182778A1 (en) * 2015-12-29 2017-06-29 Stmicroelectronics S.R.L. Manufacturing method for a fluid-ejection device, and fluid-ejection device

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US8434855B2 (en) 2011-04-19 2013-05-07 Eastman Kodak Company Fluid ejector including MEMS composite transducer
ITTO20130312A1 (it) * 2013-04-18 2014-10-19 St Microelectronics Srl Metodo di fabbricazione di un dispositivo di eiezione di fluido e dispositivo di eiezione di fluido
US9174445B1 (en) 2014-06-20 2015-11-03 Stmicroelectronics S.R.L. Microfluidic die with a high ratio of heater area to nozzle exit area
IT201700082961A1 (it) * 2017-07-20 2019-01-20 St Microelectronics Srl Dispositivo microfluidico mems per la stampa a getto di inchiostro ad attuazione piezoelettrica e relativo metodo di fabbricazione

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11309867A (ja) * 1998-02-18 1999-11-09 Seiko Epson Corp インクジェット式記録ヘッドの製造方法
US6547376B1 (en) * 1999-04-21 2003-04-15 Matsushita Electric Industrial Co., Ltd. Ink jet head and method for the manufacture thereof
JP2002059555A (ja) * 2000-08-18 2002-02-26 Seiko Epson Corp インクジェット式記録ヘッド及びその製造方法並びにインクジェット式記録装置
EP1506864A1 (en) * 2003-08-11 2005-02-16 Brother Kogyo Kabushiki Kaisha Inkjet head
US20070279456A1 (en) * 2006-06-05 2007-12-06 Seiko Epson Corporation Liquid ejecting head, method of producing the same, and liquid ejecting apparatus
US20170182778A1 (en) * 2015-12-29 2017-06-29 Stmicroelectronics S.R.L. Manufacturing method for a fluid-ejection device, and fluid-ejection device

Also Published As

Publication number Publication date
EP3431295A1 (en) 2019-01-23
CN109278407B (zh) 2021-06-25
US20200290355A1 (en) 2020-09-17
US11214061B2 (en) 2022-01-04
EP3431295B1 (en) 2023-09-27
CN109278407A (zh) 2019-01-29
US20190023014A1 (en) 2019-01-24
CN209079461U (zh) 2019-07-09
US10703102B2 (en) 2020-07-07

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