IT201700103058A1 - Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems - Google Patents

Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems

Info

Publication number
IT201700103058A1
IT201700103058A1 IT102017000103058A IT201700103058A IT201700103058A1 IT 201700103058 A1 IT201700103058 A1 IT 201700103058A1 IT 102017000103058 A IT102017000103058 A IT 102017000103058A IT 201700103058 A IT201700103058 A IT 201700103058A IT 201700103058 A1 IT201700103058 A1 IT 201700103058A1
Authority
IT
Italy
Prior art keywords
mems gyroscope
circuit
driving method
gyroscope
mems
Prior art date
Application number
IT102017000103058A
Other languages
English (en)
Inventor
Stefano Facchinetti
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102017000103058A priority Critical patent/IT201700103058A1/it
Priority to EP18188832.2A priority patent/EP3460397B1/en
Priority to US16/123,849 priority patent/US10955244B2/en
Priority to CN201811050424.3A priority patent/CN109506639B/zh
Priority to CN201821473474.8U priority patent/CN208847194U/zh
Publication of IT201700103058A1 publication Critical patent/IT201700103058A1/it
Priority to US17/179,225 priority patent/US11841229B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5649—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Gyroscopes (AREA)
IT102017000103058A 2017-09-14 2017-09-14 Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems IT201700103058A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102017000103058A IT201700103058A1 (it) 2017-09-14 2017-09-14 Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems
EP18188832.2A EP3460397B1 (en) 2017-09-14 2018-08-14 Driving circuit and method for a mems gyroscope and corresponding mems gyroscope
US16/123,849 US10955244B2 (en) 2017-09-14 2018-09-06 Driving circuit, method for driving a MEMS gyroscope and a corresponding MEMS gyroscope
CN201811050424.3A CN109506639B (zh) 2017-09-14 2018-09-10 驱动电路、用于驱动mems陀螺仪的方法和对应的mems陀螺仪
CN201821473474.8U CN208847194U (zh) 2017-09-14 2018-09-10 用于微机电系统陀螺仪的驱动电路和微机电系统陀螺仪
US17/179,225 US11841229B2 (en) 2017-09-14 2021-02-18 Driving circuit, method for driving a MEMS gyroscope and a corresponding MEMS gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102017000103058A IT201700103058A1 (it) 2017-09-14 2017-09-14 Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems

Publications (1)

Publication Number Publication Date
IT201700103058A1 true IT201700103058A1 (it) 2019-03-14

Family

ID=60813899

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102017000103058A IT201700103058A1 (it) 2017-09-14 2017-09-14 Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems

Country Status (4)

Country Link
US (2) US10955244B2 (it)
EP (1) EP3460397B1 (it)
CN (2) CN208847194U (it)
IT (1) IT201700103058A1 (it)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700103058A1 (it) * 2017-09-14 2019-03-14 St Microelectronics Srl Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems
DE102019210305A1 (de) * 2019-07-11 2021-01-14 Infineon Technologies Ag Steuern eines Oszillationssystems
DE102019215737B4 (de) * 2019-10-14 2021-05-12 Robert Bosch Gmbh Ausleseschaltung für ein MEMS-Gyroskop und Verfahren zum Betreiben einer solchen Ausleseschaltung
JP2021086916A (ja) * 2019-11-27 2021-06-03 ソニーセミコンダクタソリューションズ株式会社 ドライバ回路
DE102019220544A1 (de) * 2019-12-23 2021-06-24 Robert Bosch Gmbh Sensoranordnung sowie Verfahren zum Betreiben einer Sensoranordnung
CN111246336B (zh) 2020-02-27 2022-03-08 深迪半导体(绍兴)有限公司 耳机和电子设备
EP3882571B1 (en) * 2020-03-16 2022-08-24 Murata Manufacturing Co., Ltd. Gyroscope with locked secondary oscillation frequency
IT202100016880A1 (it) 2021-06-28 2022-12-28 St Microelectronics Srl Giroscopio microelettromeccanico con anello risonante di pilotaggio ad ampiezza di oscillazione controllata e metodo per controllare un giroscopio microelettromeccanico
IT202100016877A1 (it) * 2021-06-28 2022-12-28 St Microelectronics Srl Circuito di pilotaggio per il controllo di un oscillatore mems di tipo risonante
EP4187203B1 (en) * 2021-11-30 2024-10-23 STMicroelectronics S.r.l. Mems gyroscope device with improved hot startup and corresponding method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040088127A1 (en) * 2002-06-25 2004-05-06 The Regents Of The University Of California Integrated low power digital gyro control electronics
US20090217757A1 (en) * 2008-02-29 2009-09-03 Seiko Epson Corporation Physical quantity measuring apparatus and electronic device
US20170097245A1 (en) * 2014-03-14 2017-04-06 Northrop Grumman Litef Gmbh Method for optimizing the switch-on time of a coriolis gyroscope and coriolis gyroscope suitable thereof

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IT1394898B1 (it) * 2009-06-03 2012-07-20 St Microelectronics Rousset Giroscopio microelettromeccanico con attuazione a controllo di posizione e metodo per il controllo di un giroscopio microelettromeccanico
US8539834B2 (en) * 2010-02-15 2013-09-24 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with calibrated synchronization of actuation and method for actuating a microelectromechanical gyroscope
JP5638419B2 (ja) * 2011-02-25 2014-12-10 セイコーエプソン株式会社 信号処理回路、物理量検出装置、角速度検出装置、集積回路装置及び電子機器
ITTO20110685A1 (it) * 2011-07-28 2013-01-29 St Microelectronics Srl Giroscopio microelettromeccanico con stadio di lettura perfezionato, e metodo
ITTO20110979A1 (it) * 2011-10-27 2013-04-28 St Microelectronics Srl Circuito di pilotaggio per un giroscopio microelettromeccanico e relativo giroscopio microelettromeccanico
EP2647952B1 (en) * 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
WO2014006437A1 (en) * 2012-07-04 2014-01-09 Freescale Semiconductor, Inc. A digital sample clock generator, a vibration gyroscope circuitry comprising such digital sample clock generator, an associated apparatus, an associated semiconductor device and associated methods
US9146109B2 (en) * 2012-11-26 2015-09-29 Stmicroelectronics S.R.L. Microelectromechanical gyroscope with improved start-up phase, system including the microelectromechanical gyroscope, and method for speeding-up the start up phase
WO2015075499A1 (en) * 2013-11-22 2015-05-28 Freescale Semiconductor, Inc. In-band beating removal for a mems gyroscope
WO2015200850A2 (en) * 2014-06-26 2015-12-30 Lumedyne Technologies Incorporated System and methods for determining rotation from nonlinear periodic signals
US9644965B2 (en) * 2014-10-09 2017-05-09 Nxp Usa, Inc. System comprising a mechanical resonator and method therefor
US9835454B2 (en) * 2015-02-09 2017-12-05 Invensense, Inc. High-Q MEMS gyroscope
JP6589333B2 (ja) * 2015-03-30 2019-10-16 セイコーエプソン株式会社 回路装置、電子機器及び移動体
ITUB20152221A1 (it) * 2015-07-15 2017-01-15 St Microelectronics Srl Circuito sfasatore di 90° e relativo metodo di sfasamento di 90°
IT201700103058A1 (it) * 2017-09-14 2019-03-14 St Microelectronics Srl Circuito e metodo di azionamento per un giroscopio mems e relativo giroscopio mems

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040088127A1 (en) * 2002-06-25 2004-05-06 The Regents Of The University Of California Integrated low power digital gyro control electronics
US20090217757A1 (en) * 2008-02-29 2009-09-03 Seiko Epson Corporation Physical quantity measuring apparatus and electronic device
US20170097245A1 (en) * 2014-03-14 2017-04-06 Northrop Grumman Litef Gmbh Method for optimizing the switch-on time of a coriolis gyroscope and coriolis gyroscope suitable thereof

Also Published As

Publication number Publication date
US10955244B2 (en) 2021-03-23
US20210172738A1 (en) 2021-06-10
EP3460397B1 (en) 2020-09-30
CN109506639A (zh) 2019-03-22
CN109506639B (zh) 2023-01-31
EP3460397A1 (en) 2019-03-27
CN208847194U (zh) 2019-05-10
US20190078889A1 (en) 2019-03-14
US11841229B2 (en) 2023-12-12

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