IT8567378A1 - Ellissometro interferometrico statico. - Google Patents

Ellissometro interferometrico statico.

Info

Publication number: IT8567378A1
Authority: IT; Italy
Prior art keywords: static interferometric; interferometric ellipsometer; ellipsometer; static; interferometric
Prior art date: 1985-04-23

Application number

IT1985A67378A

Other languages

English (en)

Other versions

IT8567378A0 (it

IT1184100B (it

Original Assignee

Cselt Centro Studi E Laboratori Telecomunicazioni S P A

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1985-04-23

Filing date

1985-04-23

Publication date

1986-10-23

1985-04-23 Application filed by Cselt Centro Studi E Laboratori Telecomunicazioni S P A filed Critical Cselt Centro Studi E Laboratori Telecomunicazioni S P A

1985-04-23 Priority to IT67378/85A priority Critical patent/IT1184100B/it

1985-04-23 Publication of IT8567378A0 publication Critical patent/IT8567378A0/it

1986-04-10 Priority to US06/850,493 priority patent/US4762414A/en

1986-04-11 Priority to CA000506489A priority patent/CA1264959A/en

1986-04-15 Priority to JP61085195A priority patent/JPS61259127A/ja

1986-04-21 Priority to EP86105472A priority patent/EP0200978B1/en

1986-04-21 Priority to DE8686105472T priority patent/DE3666511D1/de

1986-04-21 Priority to DE198686105472T priority patent/DE200978T1/de

1986-10-23 Publication of IT8567378A1 publication Critical patent/IT8567378A1/it

1987-10-22 Application granted granted Critical

1987-10-22 Publication of IT1184100B publication Critical patent/IT1184100B/it

Links

230000003068 static effect Effects 0.000 title 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry

Landscapes

General Health & Medical Sciences (AREA)
Physics & Mathematics (AREA)
Life Sciences & Earth Sciences (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
Immunology (AREA)
General Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Pathology (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)
Length Measuring Devices By Optical Means (AREA)
Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Steroid Compounds (AREA)

IT67378/85A 1985-04-23 1985-04-23 Ellissometro interferometrico statico IT1184100B (it)

Priority Applications (7)

Application Number	Priority Date	Filing Date	Title
IT67378/85A IT1184100B (it)	1985-04-23	1985-04-23	Ellissometro interferometrico statico
US06/850,493 US4762414A (en)	1985-04-23	1986-04-10	Static interferometric ellipsometer
CA000506489A CA1264959A (en)	1985-04-23	1986-04-11	Static interferometric ellipsometer
JP61085195A JPS61259127A (ja)	1985-04-23	1986-04-15	干渉式楕円偏光計
EP86105472A EP0200978B1 (en)	1985-04-23	1986-04-21	Static interferometric ellipsometer
DE8686105472T DE3666511D1 (en)	1985-04-23	1986-04-21	Static interferometric ellipsometer
DE198686105472T DE200978T1 (de)	1985-04-23	1986-04-21	Statisches interferometrisches ellipsometer.

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
IT67378/85A IT1184100B (it)	1985-04-23	1985-04-23	Ellissometro interferometrico statico

Publications (3)

Publication Number	Publication Date
IT8567378A0 IT8567378A0 (it)	1985-04-23
IT8567378A1 true IT8567378A1 (it)	1986-10-23
IT1184100B IT1184100B (it)	1987-10-22

Family

ID=11301892

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
IT67378/85A IT1184100B (it)	1985-04-23	1985-04-23	Ellissometro interferometrico statico

Country Status (6)

Country	Link
US (1)	US4762414A (it)
EP (1)	EP0200978B1 (it)
JP (1)	JPS61259127A (it)
CA (1)	CA1264959A (it)
DE (2)	DE200978T1 (it)
IT (1)	IT1184100B (it)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5042951A (en) *	1989-09-19	1991-08-27	Therma-Wave, Inc.	High resolution ellipsometric apparatus
GB8926574D0 (en) *	1989-11-24	1990-01-17	Renishaw Plc	Laser interferometer
US5218424A (en) *	1991-03-19	1993-06-08	Zygo Corporation	Flying height and topography measuring interferometer
US5133602A (en) *	1991-04-08	1992-07-28	International Business Machines Corporation	Particle path determination system
NL194893C (nl) *	1992-12-31	2003-06-04	Univ Delft Tech	Zeeman-ellipsometer.
US5325172A (en) *	1993-01-13	1994-06-28	Hitachi Koki Company Limited	Optical system for analyzing samples separated by a centrifugal separator
US5557399A (en) *	1995-03-22	1996-09-17	Zygo Corporation	Optical gap measuring apparatus and method
CN1131741A (zh) *	1995-03-22	1996-09-25	载歌公司	光学间隙测量装置和方法
US5953125A (en) *	1995-09-01	1999-09-14	Zygo Corporation	Optical gap measuring apparatus and method
AUPN875296A0 (en) *	1996-03-19	1996-04-18	Manakato Pty Ltd	Method and apparatus for monitoring materials processing
US6414302B1 (en)	1998-08-11	2002-07-02	Interface Studies Inc	High photon energy range reflected light characterization of solids
US6222199B1 (en)	1999-05-25	2001-04-24	Interface Studies Inc.	Ultrathin layer measurement having a controlled ambient of light path
US6710881B1 (en) *	1999-09-28	2004-03-23	Nanyang Technological University	Heterodyne interferometry for small spacing measurement
US6323947B1 (en)	1999-12-14	2001-11-27	Interface Studies Corporation	Angle of incidence accuracy in ultrathin dielectric layer ellipsometry measurement
JP2002107119A (ja) *	2000-07-26	2002-04-10	Nippi:Kk	被測定物の厚さ測定方法及びその装置
US7589843B2 (en) *	2005-09-27	2009-09-15	Verity Instruments, Inc.	Self referencing heterodyne reflectometer and method for implementing
US7545503B2 (en) *	2005-09-27	2009-06-09	Verity Instruments, Inc.	Self referencing heterodyne reflectometer and method for implementing
DE102007062052A1 (de) *	2007-12-21	2009-06-25	Siemens Ag	Schichtdickenmessung an transparenten Schichten
WO2015134847A1 (en) *	2014-03-07	2015-09-11	Trustees Of Boston University	Polarization enhanced interferometric imaging
JP6194922B2 (ja) *	2015-05-13	2017-09-13	トヨタ自動車株式会社	不透明積層体の層厚み測定方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4053232A (en) *	1973-06-25	1977-10-11	International Business Machines Corporation	Rotating-compensator ellipsometer
EP0075689A1 (en) *	1981-09-28	1983-04-06	International Business Machines Corporation	Optical instruments for viewing a sample surface
IT1155284B (it) *	1982-02-10	1987-01-28	Cselt Centro Studi Lab Telecom	Procedimento e apparecchiatura per la misura dell'indice di rifrazione e dello spessore di materiali trasparenti
US4511430A (en) *	1984-01-30	1985-04-16	International Business Machines Corporation	Control of etch rate ratio of SiO2 /photoresist for quartz planarization etch back process

1985
- 1985-04-23 IT IT67378/85A patent/IT1184100B/it active
1986
- 1986-04-10 US US06/850,493 patent/US4762414A/en not_active Expired - Fee Related
- 1986-04-11 CA CA000506489A patent/CA1264959A/en not_active Expired
- 1986-04-15 JP JP61085195A patent/JPS61259127A/ja active Granted
- 1986-04-21 DE DE198686105472T patent/DE200978T1/de active Pending
- 1986-04-21 EP EP86105472A patent/EP0200978B1/en not_active Expired
- 1986-04-21 DE DE8686105472T patent/DE3666511D1/de not_active Expired

Also Published As

Publication number	Publication date
CA1264959A (en)	1990-01-30
EP0200978A1 (en)	1986-11-12
JPS61259127A (ja)	1986-11-17
DE3666511D1 (en)	1989-11-23
DE200978T1 (de)	1987-03-19
JPS649565B2 (it)	1989-02-17
IT8567378A0 (it)	1985-04-23
IT1184100B (it)	1987-10-22
US4762414A (en)	1988-08-09
EP0200978B1 (en)	1989-10-18

Legal Events

Date	Code	Title	Description
1999-10-27	TA	Fee payment date (situation as of event date), data collected since 19931001	Effective date: 19940316

Publication	Publication Date	Title
NO864359L (no)	1986-10-31	Kildedannende dopplerinterferometer.
DE3687175D1 (de)	1993-01-14	Heterodynes interferometersystem.
FI863146L (fi)	1987-02-07	Roekbar syntetisk film foer livsmedelsfoerpackning.
DE3750885D1 (de)	1995-01-26	Koordinaten-Messung.
FI862754A0 (fi)	1986-06-27	Orienterad film med syrespaerr.
DK80391A (da)	1991-04-30	Interferometer
DE3873563D1 (de)	1992-09-17	Planspiegelinterferometer.
ATE49403T1 (de)	1990-01-15	N-aralkylpiperidinmethanol-derivate.
IT1184100B (it)	1987-10-22	Ellissometro interferometrico statico
DE3681839D1 (de)	1991-11-14	Technisches gewebe.
BR8602795A (pt)	1987-02-10	Mancal hidrodinamico
DE3774479D1 (de)	1991-12-19	Winkelmessinterferometer.
DE3683529D1 (de)	1992-03-05	Antifaeulnis-ueberzugsmasse.
ES2014442B3 (es)	1990-07-16	Rodamiento
KR890003510U (ko)	1989-04-13	축받이 장치
DE68919410D1 (de)	1994-12-22	Interferometrie.
DE3688402D1 (de)	1993-06-17	Polycyanoarylaether-filme.
ATE41655T1 (de)	1989-04-15	Phenaethanolaminderivate.
FI863566L (fi)	1987-03-07	Framstaellningsfoerfarande foer cykloalkylsubstituerade 4-aminofenylderivat.
DE3578211D1 (de)	1990-07-19	Interferometrischer sensor.
IT8621688A1 (it)	1988-03-12	Cuscinetto oscillante
BR8904267A (pt)	1990-10-02	Mancal
BR8706134A (pt)	1988-06-21	Mancal
IT215130Z2 (it)	1990-08-06	Cuscinetto antilombaggine
FI860068L (fi)	1986-07-11	Drag- eller utblaosningskaopa.